Dec. 2024, International Society for Nanomanufacturing (ISNM), ISNM Outstanding Scientist Award (Taniguchi Medal)　　　　　　　　　　　　　　　
Yuki Shimizu

Nov. 2024, Conference Committee of ICPE2024, Outstanding Paper Award　　　　　　　　　　　　　　　
Development of a modified optical head for measurement of the pitch deviation of a diffraction grating having a pitch narrower than laser wavelength
Yuya Yamazaki;Tomoki Kitazume;Yuki Shimizu

Nov. 2024, Conference Committee of ICPE2024, Young Researcher Award　　　　　　　　　　　　　　　
Expansion of measuring range of optical angle sensor with light source having multiple longitudinal modes
Keita Nakaoka;Yuki Shimizu

Dec. 2022, 一般財団法人FA財団, FA財団論文賞　　　　　　　　　　　　　　　
An absolute surface encoder with a planar scale grating of variable periods
清水 裕樹;石塚 稜;真野 和樹;神田 悠利;松隈 啓;高 偉

Mar. 2022, 公益社団法人 精密工学会, JSPE Best Paper Award　　　　　　　　　　　　　　　
An absolute surface encoder with a planar scale grating of variable periods
Yuki Shimizu;Ryo Ishizuka;Kazuki Mano;Yuri Kanda;Hiraku Matsukuma;Wei Gao

Dec. 2021, 一般財団法人FA財団, FA Foundation paper award　　　　　　　　　　　　　　　
Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of a large-area two-dimensional scale gratings
Yuki Shimizu;Kazuki Mano;Hiroki Murakami;Shunsuke Hirota;Hiraku Matsukuma;Wei Gao

Mar. 2021, 公益社団法人 精密工学会, Japan Society for Precision Engineering Numata Memorial Award　　　　　　　　　　　　　　　
Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings
Yuki Shimizu;Kazuki Mano;Hiroki Murakami;Shunsuke Hirota;Hiraku Matsukuma;Wei Gao

Mar. 2019, 公益社団法人精密工学会, JSPE Numata Memorial Paper Award　　　　　　　　　　　　　　　
Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale grating
SHIMIZU Yuki;Ryo Aihara;Kazuki Mano;Chong Chen;Yuan-Liu Chen;Xiuguo Chen;Wei Gao

Nov. 2018, IEEE 2018 International Conference on Advanced Manufacturing, Best Conference Paper Award　　　　　　　　　　　　　　　
Theoretical calculation of the reading output from a micro thermal sensor for precision positioning
Yuki Shimizu;Ayaka Ishida;Hiraku Matsukuma;Wei Gao

Jun. 2018, 公益財団法人 工作機械技術振興財団, 工作機械技術振興賞（論文賞）　　　　　　　　　　　　　　　
An optical lever by using a mode-locked laser for angle measurement
清水 裕樹;工藤 幸利;陳 遠流;伊東 聡;高 偉

May 2018, 一般財団法人みやぎ産業科学振興基金, みやぎ産業科学振興基金研究奨励賞　　　　　　　　　　　　　　　
国家標準にダイレクトにリンクした超高精度・高安定精密角度計測に関する研究
清水 裕樹

Mar. 2018, 公益社団法人精密工学会, 精密工学会論文賞　　　　　　　　　　　　　　　
An optical lever by using a mode-locked laser for angle measurement
清水 裕樹;工藤 幸利;陳 遠流;伊東 聡;高 偉

Nov. 2017, 一般社団法人 日本機械学会 生産加工・工作機械部門, 一般社団法人 日本機械学会 生産加工・工作機械部門 優秀講演論文表彰　　　　　　　　　　　　　　　
Ultra-precision angle sensor with a mode-locked laser source
Shuhei MADOKORO;Yuki SHIMIZU;Yuan-Liu CHEN;Wei GAO

Nov. 2017, The conference Committee of CJUMP2017, The 13th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2017) Best Paper Award　　　　　　　　　　　　　　　
Bo Wen;Yuan-Liu Chen;Yuki Shimizu;Wei Gao

Sep. 2017, The conference Committee of ISMTII2017, 13th International Symposium on Measurement Technology and Intelligent Instruments 2017 Xi’an (ISMTII2017) Best Paper Award　　　　　　　　　　　　　　　
Non-contact detection of surface defects by using a micro thermal sensor
Yuki Shimizu;Yuki Matsuno;Yuan-Liu Chen;Wei Gao

Aug. 2016, The conference Committee of nanoMan2016, The 5th International Conference on Nanomanufacturing (nanoMan2016) Best Pawer Award　　　　　　　　　　　　　　　
Spindle Error Motion Measurement of Concentricity Gage by Using Laser Scan Micrometer
Zengyuan Niu;Yuki Shimizu;So Ito;Wei Gao

Apr. 2016, 文部科学省, 科学技術分野の文部科学大臣表彰 若手科学者賞　　　　　　　　　　　　　　　
微空間での熱収支と光を応用した超精密ナノ形状計測の研究
清水裕樹, Others, Japan

Nov. 2015, The Editorial and Review Committee of the 11th CJUMP, Excellent Paper Award　　　　　　　　　　　　　　　
Investigation of the Deformation Mechanism of a Copper Workpiece during Nanoindentation by using Molecular Dynamics
Yindi Cai;Yuanliu Chen;Yuki Shimizu;So Ito;Wei Gao

Nov. 2015, The Editorial and Review Committee of the 11th CJUMP, The 11th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2015) Excellent Paper Award　　　　　　　　　　　　　　　
Precision Measurement of Slide Straightness of an Ultra-Precision Lathe
Zengyuan Niu;Yuanliu Chen;Daiki Matsuura;Ryo Kobayashi;Yuki Shimizu;So Ito;Wei Gao

Jun. 2015, 公益財団法人工作機械技術振興財団, 工作機械技術振興賞・論文賞　　　　　　　　　　　　　　　
Development of an optical probe for evaluation of tool edge geometry
張 城豪;清水 裕樹;伊東 聡;高 偉, Japan society, Japan

Sep. 2014, International Measurement Confederation (IMEKO) Technical Committee TC14, Excellent Paper Award　　　　　　　　　　　　　　　
Design of an optical system for evaluation of edge contour of a diamond cutting tool
Y. Shimizu;S. Jang;W. Gao, International society

Nov. 2013, Asian Society for Precision Engineering and Nanotechnology, ASPEN Young Researcher Award　　　　　　　　　　　　　　　
Yuki Shimizu, International society

Jul. 2012, International Society of Nanomanufacturing, Excellent Presentation Award　　　　　　　　　　　　　　　
Design of a Micro-sized Thermal Contact Sensor for Inspection of Surface Defects
SHIMIZU Yuki

May 2012, 一般社団法人日本トライボロジー学会, 日本トライボロジー学会 2011年度日本トライボロジー学会技術賞　　　　　　　　　　　　　　　
ヘッド組み込み型熱検知センサを用いた磁気ディスク表面のナノ微小欠陥検出技術
清水裕樹;徐 鈞国;小平英一, Japan society, Japan

Aug. 2010, ASME Information Storage and Processing Systems (ISPS) Division, ASME ISPS2010 Best Conference Industry Paper Award　　　　　　　　　　　　　　　
Yuki SHIMIZU;Junguo XU;Hidekazu Kohira;Kenji Kuroki;Kyosuke ONO, International society

Apr. 2009, 社団法人日本機械学会, 2009年 日本機械学会奨励賞 （技術）　　　　　　　　　　　　　　　
Japan society, Japan

Mar. 2003, 社団法人精密工学会, 2002年度精密工学会沼田記念論文賞　　　　　　　　　　　　　　　
高 偉;星野 唯;清水 裕樹;清野 慧, Official journal, Japan

Dec. 2000, 社団法人精密工学会, 精密工学会東北支部2000年度支部講演会 優秀講演奨励賞　　　　　　　　　　　　　　　
Japan society, Japan

Expansion of the measuring range of an optical angle sensor based on laser autocollimation with a light source having multiple longitudinal modes
Keita Nakaoka, Yuki Shimizu
Measurement Science and Technology, IOP Publishing, 07 Aug. 2025, [Peer-reviewed], [Last author, Corresponding author]
English, Scientific journal, Abstract

An optical angle sensor based on laser autocollimation employing a laser source with multiple longitudinal modes (multi-mode laser), as well as a multi-element photodiode (PD array), is newly proposed. In the newly proposed optical angle sensor, the multi-mode laser reflected by a measurement target is spectrally dispersed by a diffraction grating, focused by an objective lens, and then detected by the PD array. The spacing of the neighboring focused modes is set appropriately with respect to the element spacing of the PD array. This optical configuration is expected to expand the measuring range of the optical angle sensor by stitching the readouts obtained from the PD array while maintaining a good measurement resolution. At first, the feasibility of the proposed method is theoretically investigated by numerical calculations. A prototype optical setup employing a laser diode having four independent longitudinal modes is then designed and constructed. Finally, the resolution and measuring range of the constructed optical angle sensor are evaluated through experiments to verify the feasibility of the proposed method with the multi-mode laser and the PD array.

Validation of pitch deviation measurement of a diffraction scale grating using robust and highly-sensitive optical angle sensors
Tomoki Kitazume, Naoya Tashiro, Yuya Yamazaki, Yuki Shimizu
Precision Engineering, Elsevier BV, Aug. 2025, [Peer-reviewed], [Last author, Corresponding author]
English, Scientific journal

Evaluation of the pitch deviation of a diffraction scale grating having a pitch shorter than the light wavelength of a measuring laser beam
Yuya Yamazaki, Tomoki Kitazume, Yuki Shimizu
Measurement Science and Technology, IOP Publishing, 19 Jun. 2025, [Peer-reviewed], [Last author, Corresponding author]
English, Scientific journal, Abstract

A major modification has been made to an optical head for the measuring method that evaluates the pitch deviation of a diffraction scale grating based on the angular information of the diffracted beams. In the conventional method, the angular information of the positive and negative diffracted beams obtained by projecting a laser beam onto a scale at a right angle is utilized to evaluate the pitch deviation. Meanwhile, this method cannot measure scales having a nominal pitch shorter than the wavelength of the laser beam; this fundamental limitation has restricted the applicability of this method. To address the issue, in this study, the optical head has been modified in such a way that a laser beam is projected onto a grating with an oblique incidence so that the negative first-order diffracted beam can be obtained even when the nominal pitch of the scale is shorter than the wavelength of the laser beam. By detecting the changes in the angle of diffraction of the diffracted beam and the angle of reflection of the reflected beam, the pitch deviation of a diffraction grating can be evaluated without being affected by the angular error motion of the scale, as well as the local slope of the grating. Numerical calculations are carried out to verify the effectiveness of the extended principle. In addition, a modified optical head using a Littrow configuration is newly designed and constructed. Experiments have been carried out, and a pitch deviation on the order of 0.001 nm has successfully been detected, verifying the feasibility of the modified optical head with the Littrow configuration.

A Technique for Estimating the Pitch of Interference Fringe Patterns for Pattern Exposure in a Non-Orthogonal One-Axis Lloyd’s Mirror Interferometer
Nozomu Takahiro, Yuki Shimizu
International Journal of Automation Technology, 18, 1, 18, 25, Fuji Technology Press Ltd., 05 Jan. 2024, [Peer-reviewed], [Last author, Corresponding author]
English, Scientific journal, A technique to realize in-situ evaluation of the pitch of interference fringe patterns in a non-orthogonal Lloyd’s mirror interferometer is proposed. The proposed method employs two laser sources with different wavelengths. Two magnified collimated laser beams with different wavelengths are then projected onto a non-orthogonal Lloyd’s mirror interferometer to generate interference fringe patterns with different pitches. The interference fringe patterns with a pitch g₁ generated by a laser beam with a wavelength λ₁ sensitive to the photoresist layer are employed for the pattern exposure, while the ones generated by a laser beam with a wavelength λ₂ insensitive to the photoresist layer are employed to be observed by a microscopic optical system located at the back of the exposure substrate. This enables the estimation of the pitch of the interference fringe patterns with the pitch g₁ during the exposure process in optical interference lithography, contributing to accelerating the alignment of the angular position of the reflective mirror in the interferometer. A prototype optical setup consisting of a beam-collimating unit with two laser sources having wavelengths of 405 nm and 780 nm, a non-orthogonal one-axis Lloyd’s mirror interferometer unit, and a microscopic optical system is designed and developed, and experiments are conducted to demonstrate the feasibility of the proposed technique of estimating the pitch of interference fringe patterns for pattern exposure.

Repetition Frequency Control of a Mid-Infrared Ultrashort Pulse Laser
Hiraku Matsukuma, Masashi Nagaoka, Hisashi Hirose, Ryo Sato, Yuki Shimizu, Wei Gao
International Journal of Automation Technology, 18, 1, 84, 91, Fuji Technology Press Ltd., 05 Jan. 2024, [Peer-reviewed]
Scientific journal, In this study, a method for controlling the repetition frequency of a mid-infrared ultrashort pulse laser with a central wavelength of 2.8 µm is developed. A ring cavity that is insensitive to the polarization state of the laser light emitted from the fiber end was constructed to stabilize the oscillation of the mid-infrared ultrashort pulse laser. More oscillation conditions for the ultrashort pulse laser based on nonlinear polarization rotation are found than the conventional method. To confirm that the pulse oscillation is mode-locked, ultrashort pulse oscillation was confirmed by an autocorrelator. The pulse repetition frequency of this robust ultrashort pulse laser was controlled. The control method was based on the phase-locked loop (PLL) control. A wedge window was inserted into the cavity and mounted on a linear stage driven by a piezoelectric transducer. By driving the piezoelectric transducer, the position of the wedge window changed, and the resulting optical path length also changed. The repetition frequency was controlled based on this principle. Optical path length control by the wedge window and temperature control provides an Allan deviation of approximately 1 mHz.

A resolution improvement of measuring the pitch deviation of a diffraction scale grating based on the change in angles of diffraction of diffracted beams
Tomoki KITAZUME, Yuki SHIMIZU
Journal of Advanced Mechanical Design, Systems, and Manufacturing, 18, 4, JAMDSM0036, JAMDSM0036, Japan Society of Mechanical Engineers, 2024, [Peer-reviewed], [Last author, Corresponding author]
English, Scientific journal

Feasible Resolution of Angular Displacement Measurement by an Optical Angle Sensor Based on Laser Autocollimation
Hyunsung Lim, Yuki Shimizu
Nanomanufacturing and Metrology, 6, 1, Dec. 2023, [Peer-reviewed], [Last author, Corresponding author]
English, Scientific journal

Demonstration of a non-orthogonal Lloyd’s mirror interferometer with a spatial light modulator for arbitrary two-dimensional pattern fabrication
Nozomu Takahiro, Yuki Shimizu
Optics Letters, 48, 21, 5475, 5475, Optica Publishing Group, 16 Oct. 2023, [Peer-reviewed], [Last author, Corresponding author]
English, Scientific journal, A new, to the best of our knowledge, method of generating interference patterns based on a non-orthogonal Lloyd’s mirror interferometer with a spatial phase modulation is proposed. In the proposed method, a spatial light modulator (SLM) is introduced to a conventional non-orthogonal Lloyd’s mirror interferometer so that arbitrary interference patterns, such as line interference patterns with varied line-spacing or two-dimensional patterns, can be generated by controlling the wavefronts of the laser beams at each position on the substrate. In this paper, as the first step of the research, the feasibility of the proposed method is theoretically confirmed by calculating interference patterns to be obtained when a spatial modulation of the phase delay is applied to the laser beams. A prototype of a non-orthogonal one-axis Lloyd’s mirror interferometer with an SLM in its optical path is also designed and constructed. Some basic experiments are carried out to demonstrate the feasibility of the generation of interference patterns having varied line-spacing and two-dimensional patterns by the proposed method.

Confocal probe based on the second harmonic generation for measurement of linear and angular displacements
Ryo Sato, Yuki Shimizu, Hiroki Shimizu, Hiraku Matsukuma, Wei Gao
OPTICS EXPRESS, 31, 7, 11982, 11993, Mar. 2023, [Peer-reviewed], [Corresponding author]
English, Scientific journal

Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer
Xin Xiong, Chenguang Yin, Lue Quan, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Hideaki Tamiya, Wei Gao
Sensors, 22, 23, Dec. 2022, [Peer-reviewed], [Corresponding author]
Scientific journal

Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range
Yifan Hong, Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Hiroki Shimizu, Wei Gao
Sensors, 22, 23, Dec. 2022, [Peer-reviewed], [Corresponding author]
English, Scientific journal

Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction
Lue Quan, Yuki Shimizu, Ryo Sato, Dong Wook Shin, Hiraku Matsukuma, Andreas Archenti, Wei Gao
International Journal of Automation Technology, 16, 5, 572, 581, 05 Sep. 2022, [Peer-reviewed], [Corresponding author], ［Internationally co-authored］, [International Magazine]
English, Scientific journal

A Second Harmonic Wave Angle Sensor with a Collimated Beam of Femtosecond Laser
Wijayanti Dwi Astuti, Kuangyi Li, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
APPLIED SCIENCES-BASEL, 12, 10, May 2022, [Peer-reviewed], [Corresponding author], [International Magazine]
English, Scientific journal

Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser
Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
APPLIED SCIENCES-BASEL, 12, 9, May 2022, [Peer-reviewed], [Corresponding author], [International Magazine]
English, Scientific journal

A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range
Yifan Hong, Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
SENSORS, 22, 8, Apr. 2022, [Peer-reviewed], [Corresponding author], [International Magazine]
English, Scientific journal

Precision Three-Axis Positioning Stage in Compact Size Employing Miniature Actuators
Yuki Shimizu
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 88, 9, 668, 672, 2022
Scientific journal

Correction: Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors (Nanomanufacturing and Metrology, (2021), 4, 1, (53-66), 10.1007/s41871-020-00091-2)
Hiraku Matsukuma, Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
Nanomanufacturing and Metrology, 5, 4, 439, 2022
Scientific journal

Mid-infrared autocollimation for linear motion error measurement
Hiraku Matsukuma, Kaede Matayoshi, Masashi Nagaoka, Yuki Shimizu, Wei Gao
Measurement: Sensors, 18, Dec. 2021, [Peer-reviewed]
English, Scientific journal

Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation
Yuki Shimizu, Lue Quan, Dong Wook Shin, Hiraku Matsukuma, Wei Gao
Measurement: Sensors, 18, Dec. 2021, [Peer-reviewed], [Lead author, Corresponding author]
English, Scientific journal

An application of the edge reversal method for accurate reconstruction of the three-dimensional profile of a single-point diamond tool obtained by an atomic force microscope
Kai Zhang, Yuki Shimizu, Hiraku Matsukuma, Yindi Cai, Wei Gao
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 117, 9-10, 2883, 2893, Dec. 2021, [Peer-reviewed], [Corresponding author]
English, Scientific journal

A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer
Xin Xiong, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Sensors, 21, 21, 7412, 7412, 08 Nov. 2021, [Peer-reviewed], [Corresponding author], ［Internationally co-authored］, [International Magazine]
English, Scientific journal

A Comparison of the Probes with a Cantilever Beam and a Double-Sided Beam in the Tool Edge Profiler for On-Machine Measurement of a Precision Cutting Tool
Bo Wen, Sho Sekine, Shinichi Osawa, Yuki Shimizu, Hiraku Matsukuma, Andreas Archenti, Wei Gao
Machines, 9, 11, 271, 271, 06 Nov. 2021, [Peer-reviewed], [Corresponding author], ［Internationally co-authored］, [International Magazine]
English, Scientific journal

On-machine diameter measurement of a cylindrical workpiece with a reference artefact
Yuki Shimizu, Qiaolin Li, Masami Kogure, Kimitaka Nishimura, Yuki Sato, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology, 32, 10, Oct. 2021, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
Scientific journal

In-Situ Evaluation of the Pitch of a Reflective-Type Scale Grating by Using a Mode-Locked Femtosecond Laser
Dong Wook Shin, Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Yindi Cai, Eberhard Manske, Wei Gao
Applied Sciences, 11, 17, 8028, 8028, 30 Aug. 2021, [Peer-reviewed], [Corresponding author], ［Internationally co-authored］, [International Magazine]
English, Scientific journal

Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source
Hiraku Matsukuma, Ryo Sato, Yuki Shimizu, Wei Gao
International Journal of Automation Technology, 15, 4, 529, 536, Fuji Technology Press Ltd., 05 Jul. 2021, [Peer-reviewed], [International Magazine]
English, Scientific journal

Self-calibration of a variable-line-spacing grating for an absolute optical encoder with a Fizeau interferometer
Xin Xiong, Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology, 32, 6, Jun. 2021, [Peer-reviewed], [Corresponding author]
Scientific journal

Improvement of a stitching operation in the stitching linear-scan method for measurement of cylinders in a small dimension
Qiaolin Li, Yuki Shimizu, Toshiki Saito, Hiraku Matsukuma, Yindi Cai, Wei Gao
Applied Sciences (Switzerland), 11, 10, 02 May 2021, [Peer-reviewed], [Corresponding author], ［Internationally co-authored］, [International Magazine]
Scientific journal

A technique for measurement of a prism apex angle by optical angle sensors with a reference artefact
Yuki Shimizu, Xu Ma, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology, 32, 5, May 2021, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
Scientific journal

An insight into optical metrology in manufacturing
Yuki Shimizu, Liang Chia Chen, Dae Wook Kim, Xiuguo Chen, Xinghui Li, Hiraku Matsukuma
Measurement Science and Technology, 32, 4, Apr. 2021, [Peer-reviewed], [Lead author, Corresponding author], ［Internationally co-authored］, [International Magazine]
Scientific journal

Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors
Hiraku Matsukuma, Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
Nanomanufacturing and Metrology, 4, 1, 53, 66, Mar. 2021, [Peer-reviewed], [International Magazine]
Scientific journal

Foreword to the Special Issue on Micro- and Nano-Metrology in Japan (I)
Yuki Shimizu, Yasuhiro Mizutani, Masaki Michihata
Nanomanufacturing and Metrology, 4, 1, 67, 68, Mar. 2021, [Lead author, Corresponding author], [International Magazine]
Research society

Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology
Yuki Shimizu
Nanomanufacturing and Metrology, 4, 1, 3, 27, Mar. 2021, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
Scientific journal

An optical frequency domain angle measurement method based on second harmonic generation
Wijayanti Dwi Astuti, Hiraku Matsukuma, Masaru Nakao, Kuangyi Li, Yuki Shimizu, Wei Gao
Sensors (Switzerland), 21, 2, 1, 14, 02 Jan. 2021, [Peer-reviewed], [International Magazine]
Scientific journal

Measurement of the apex angle of a small prism by an oblique-incidence mode-locked femtosecond laser autocollimator
Yuki Shimizu, Yuri Kanda, Xu Ma, Kakeru Ikeda, Hiraku Matsukuma, Yasunari Nagaike, Masaki Hojo, Keita Tomita, Wei Gao
Precision Engineering, 67, 339, 349, Jan. 2021, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
Scientific journal

An absolute surface encoder with a planar scale grating of variable periods
Yuki Shimizu, Ryo Ishizuka, Kazuki Mano, Yuri Kanda, Hiraku Matsukuma, Wei Gao
Precision Engineering, 67, 36, 47, Jan. 2021, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
Scientific journal

A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor
Lue Quan, Yuki Shimizu, Xin Xiong, Hiraku Matsukuma, Wei Gao
Precision Engineering, 67, 1, 13, Jan. 2021, [Peer-reviewed], [Corresponding author], [International Magazine]
Scientific journal

An autocollimator with a mid-infrared laser for angular measurement of rough surfaces
Hiraku Matsukuma, Yun Asumi, Masashi Nagaoka, Yuki Shimizu, Wei Gao
Precision Engineering, 67, 89, 99, Jan. 2021, [Peer-reviewed], [International Magazine]
Scientific journal

Design and Construction of a Low-Force Stylus Probe for On-machine Tool Cutting Edge Measurement
Hiraku Matsukuma, Bo Wen, Shinichi Osawa, Sho Sekine, Yuki Shimizu, Wei Gao
Nanomanufacturing and Metrology, 3, 4, 282, 291, Dec. 2020, [Peer-reviewed], [International Magazine]
Scientific journal

An off-axis differential method for improvement of a femtosecond laser differential chromatic confocal probe
Chong Chen, Yuki Shimizu, Ryo Sato, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland), 10, 20, 1, 15, 02 Oct. 2020, [Peer-reviewed], [Corresponding author], [International Magazine]
Scientific journal

On-machine profile measurement of a micro cutting edge by using a contact-type compact probe unit
Bo Wen, Yuki Shimizu, Yu Watanabe, Hiraku Matsukuma, Wei Gao
Precision Engineering, 65, 230, 239, Sep. 2020, [Peer-reviewed], [Corresponding author], [International Magazine]
Scientific journal

A new signal processing method for a differential chromatic confocal probe with a mode-locked femtosecond laser
Ryo Sato, Chong Chen, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Measurement Science and Technology, 31, 9, Sep. 2020, [Peer-reviewed], [Corresponding author], [International Magazine]
Scientific journal

Evaluation of the pitch deviation of a linear scale based on a self-calibration method with a Fizeau interferometer
Xin Xiong, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Measurement Science and Technology, 31, 9, Sep. 2020, [Peer-reviewed], [International Magazine]
Scientific journal

High-precision cutting edge radius measurement of single point diamond tools using an atomic force microscope and a reverse cutting edge artifact
Kai Zhang, Yindi Cai, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland), 10, 14, Jul. 2020, [Peer-reviewed], ［Internationally co-authored］, [International Magazine]
Scientific journal

Measurement uncertainty analysis of a stitching linear-scan method for the evaluation of roundness of small cylinders
Qiaolin Li, Yuki Shimizu, Toshiki Saito, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland), 10, 14, Jul. 2020, [Peer-reviewed], [Corresponding author], [International Magazine]
Scientific journal

A differential strategy for measurement of a static force in a single-point diamond cutting by a force-controlled fast tool servo
Bo Wen, Yuki Shimizu, Hiraku Matsukuma, Keisuke Tohyama, Haruki Kurita, Yuan-Liu Chen, Wei Gao
Measurement Science and Technology, 31, 7, 074014, 074014, 01 Jul. 2020, [Peer-reviewed], [International Magazine]
English, Scientific journal

Optical angle sensor technology based on the optical frequency comb laser
Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland), 10, 11, 01 Jun. 2020, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]

Development of an optical angle sensor with a mode-locked femtosecond laser source for surface profile measurement
Yuki Shimizu, Shota Takazono, Yuri Kanda, Hiraku Matsukuma, Wei Gao, Hajime Inaba
JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020, 2020, [Lead author]
International conference proceedings

Fabrication of a two-dimensional diffraction grating with isolated photoresist pattern structures
Hiraku Matsukuma, Masanori Matsunaga, Kai Zhang, Yuki Shimizu, Wei Gao
International Journal of Automation Technology, 14, 4, 546, 551, 2020, [Peer-reviewed]
Scientific journal

On-machine angle measurement of a precision V-groove on a ceramic workpiece
Yuki Shimizu, Wei Gao, Hiraku Matsukuma, Károly Szipka, Andreas Archenti
CIRP Annals, 69, 1, 469, 472, 2020, [Peer-reviewed], [Lead author], [International Magazine]
Scientific journal

Profile measurement by using a femtosecond laser chromatic confocal probe
Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020, 2020
International conference proceedings

A New Optical Angle Measurement Method Based on Second Harmonic Generation with a Mode-Locked Femtosecond Laser
Hiraku Matsukuma, Shuhei Madokoro, Wijayanti Dwi Astuti, Yuki Shimizu, Wei Gao
Nanomanufacturing and Metrology, 2, 4, 187, 198, 01 Dec. 2019, [Peer-reviewed], [International Magazine]
Scientific journal

Design optimization of a non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings
Yuki Shimizu, Kazuki Mano, Hiroki Murakami, Shunsuke Hirota, Hiraku Matsukuma, Wei Gao
Precision Engineering, 60, 280, 290, Nov. 2019, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
English, Scientific journal

Investigation and improvement of thermal stability of a chromatic confocal probe with a mode-locked femtosecond laser source
Ryo Sato, Yuki Shimizu, Chong Chen, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland), 9, 19, 01 Oct. 2019, [Peer-reviewed], [International Magazine]
Scientific journal

Integration of a Cr–N Thin-Film Displacement Sensor into an XY Micro-stage for Closed-Loop Nano-positioning
Keisuke Adachi, Hiraku Matsukuma, Takuma Sugawara, Yuki Shimizu, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
Nanomanufacturing and Metrology, 2, 3, 131, 139, 01 Sep. 2019, [Peer-reviewed], [International Magazine]
English, Scientific journal

Accurate polarization control in nonorthogonal two-axis Lloyd's mirror interferometer for fabrication of two-dimensional scale gratings
Yuki Shimizu, Kazuki Mano, Kai Zhang, Hiraku Matsukuma, Wei Gao
Optical Engineering, 58, 9, 92611, 01 Sep. 2019, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
English, Scientific journal

A Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor
Yuki Shimizu, Ayaka Ishida, Yuki Matsuno, Hiraku Matsukuma, Wei Gao
Nanomanufacturing and Metrology, 2, 2, 100, 110, 01 Jun. 2019, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
English, Scientific journal

Reduction in Cross-Talk Errors in a Six-Degree-of-Freedom Surface Encoder
Hiraku Matsukuma, Ryo Ishizuka, Masaya Furuta, Xinghui Li, Yuki Shimizu, Wei Gao
Nanomanufacturing and Metrology, 2, 2, 111, 123, 01 Jun. 2019, [Peer-reviewed], [International Magazine]
English, Scientific journal

A method for expansion of Z-directional measurement range in a mode-locked femtosecond laser chromatic confocal probe
Chong Chen, Ryo Sato, Yuki Shimizu, Taku Nakamura, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland), 9, 3, 454, 29 Jan. 2019, [Peer-reviewed], [Corresponding author], [International Magazine]
English, Scientific journal

Theoretical investigation on measurement range of a femtosecond laser chromatic confocal probe by utilizing side-lobe of axial response
Chong Chen, Hiraku Matsukuma, Ryo Sato, Xiuguo Chen, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, 362, 364, 16 Jan. 2019, [Peer-reviewed]
International conference proceedings

Development of a fiber-laser-based frequency comb for precision dimensional metrology
Yuri Kanda, Hiraku Matsukuma, Shaoqing Yang, Yuki Shimizu, Hajime Inaba, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, 18, 19, 16 Jan. 2019, [Peer-reviewed]
International conference proceedings

Measurement and uncertainty analysis of a precision V-shaped ceramic part
Masami Kogure, Hiraku Matsukuma, Ryo Kobayashi, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, 30, 31, 16 Jan. 2019, [Peer-reviewed]
International conference proceedings

Fast evaluation of a linear scale for a linear encoder with a Fizeau interferometer and stitching technique
Xin Xiong, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, 220, 222, 16 Jan. 2019, [Peer-reviewed]
International conference proceedings

An ultra-sensitive optical angle sensor for pitch deviation measurement of diffraction gratings
Lue Quan, Hiraku Matsukuma, Xiuguo Chen, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, 47, 48, 16 Jan. 2019, [Peer-reviewed]
International conference proceedings

A compact two-axis Lloyd's mirror interferometer for scale grating fabrication
Masanori Matsunaga, Kazuki Mano, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, 28, 29, 16 Jan. 2019, [Peer-reviewed]
International conference proceedings

Angle measurement using a diffraction of optical frequency comb
Kazuki Nakamura, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, 26, 27, 16 Jan. 2019, [Peer-reviewed]
International conference proceedings

Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage
Ryo Ishizuka, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, 36, 39, 16 Jan. 2019, [Peer-reviewed]
International conference proceedings

An optical frequency comb operating in the mid-infrared region for wide-range and high-precision optical sensor
Yun Asumi, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, 32, 35, 16 Jan. 2019, [Peer-reviewed]
International conference proceedings

Theoretical calculation of the reading output from a micro thermal sensors for precision positioning
Yuki Shimizu, Ayaka Ishida, Hiraku Matsukuma, Wei Gao
Proceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018, 24, 25, 16 Jan. 2019, [Peer-reviewed]
International conference proceedings

Theoretical investigation on measurement range expansion of a femtosecond laser chromatic confocal probe
Chong Chen, Hiraku MATSUKUMA, Ryo SATO, Yuki SHIMIZU, Wei GAO
The Proceedings of Conference of Tohoku Branch, 2019.54, 146, 146, Japan Society of Mechanical Engineers, 2019
Scientific journal

Measurement Technologies for Manufacturing
Yuki Shimizu, So Ito, Jungchul Lee, Shigeaki Goto, Hiraku Matsukuma, Wei Gao
Handbook of Manufacturing, 541, 568, 01 Jan. 2019
In book

An optical angle sensor based on second harmonic generation of a modelocked laser
Hiraku Matsukuma, Shuhei Madokoro, Masaru Nakao, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 11142, 2019, [Peer-reviewed]
International conference proceedings

Uncertainty evaluation for measurements of pitch deviation and out-of-flatness of planar scale gratings by a Fizeau interferometer in Littrow configuration
Xin Xiong, Yuki Shimizu, Xiuguo Chen, Hiraku Matsukuma, Wei Gao
Applied Sciences (Switzerland), 8, 12, 2539, 07 Dec. 2018, [Peer-reviewed]
English, Scientific journal

High Resolution Clinometers for Measurement of Roll Error Motion of a Precision Linear Slide
Yuki Shimizu, Satoshi Kataoka, Wei Gao
Chinese Journal of Mechanical Engineering (English Edition), 31, 1, 92, 01 Dec. 2018, [Peer-reviewed]
English, Scientific journal

Laser autocollimation based on an optical frequency comb for absolute angular position measurement
Yuan Liu Chen, Yuki Shimizu, Jun Tamada, Kazuki Nakamura, Hiraku Matsukuma, Xiuguo Chen, Wei Gao
Precision Engineering, 54, 284, 293, Oct. 2018, [Peer-reviewed]
Scientific journal

Molecular dynamics simulation of elastic–plastic deformation associated with tool–workpiece contact in force sensor–integrated fast tool servo
Yindi Cai, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 232, 11, 1893, 1902, 01 Sep. 2018, [Peer-reviewed]
English, Scientific journal

A chromatic confocal probe with a mode-locked femtosecond laser source
Xiuguo Chen, Taku Nakamura, Yuki Shimizu, Chong Chen, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao
Optics and Laser Technology, 103, 359, 366, Jul. 2018, [Peer-reviewed]
Scientific journal

A PD-edge method associated with the laser autocollimation for measurement of a focused laser beam diameter
Yuki Shimizu, Taiji Maruyama, Shota Nakagawa, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology, 29, 7, 24 May 2018, [Peer-reviewed]
Scientific journal

High quality-factor quartz tuning fork glass probe used in tapping mode atomic force microscopy for surface profile measurement
Yuan Liu Chen, Yanhao Xu, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology, 29, 6, 15 May 2018, [Peer-reviewed]
Scientific journal

Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings
Yuki Shimizu, Ryo Aihara, Kazuki Mano, Chong Chen, Yuan Liu Chen, Xiuguo Chen, Wei Gao
Precision Engineering, 52, 138, 151, Elsevier Inc., Apr. 2018, [Peer-reviewed]
English, Scientific journal

An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges
Yindi Cai, Yuan Liu Chen, Malu Xu, Yuki Shimizu, So Ito, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology, 29, 5, 23 Mar. 2018, [Peer-reviewed]
Scientific journal

Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings
Xiuguo Chen, Yuki Shimizu, Chong Chen, Yuan Liu Chen, Wei Gao
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 36, 2, AVS Science and Technology Society, 01 Mar. 2018, [Peer-reviewed], [Corresponding author], ［Internationally co-authored］, [International Magazine]
English, Scientific journal

Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface
Yuki Shimizu, Yuki Matsuno, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao
Nanomanufacturing and Metrology, 1, 1, 45, 57, 01 Mar. 2018, [Peer-reviewed]
English, Scientific journal

A liquid-surface-based three-axis inclination sensor for measurement of stage tilt motions
Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao
Sensors (Switzerland), 18, 2, Feb. 2018, [Peer-reviewed]
Scientific journal

Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage
Yuki Shimizu, Masaya Furuta, Yuan Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao
Procedia CIRP, 75, 355, 360, Elsevier {BV}, 2018, [Peer-reviewed]
International conference proceedings

Error separation method for precision measurement of the Run-Out of a microdrill bit by using a laser scan micrometer measurement system
Zengyuan Niu, Yuan-Liu Chen, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Journal of Manufacturing and Materials Processing, 2, 1, 4, 2018, [Peer-reviewed]
English, Scientific journal

A stitching linear-scan method for roundness measurement of small cylinders
Yuan Liu Chen, Yuki Machida, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
CIRP Annals, 67, 1, 535, 538, 01 Jan. 2018, [Peer-reviewed]
Scientific journal

An optical angle sensor based on chromatic dispersion with a mode-locked laser source
Yuki Shimizu, Shuhei Madokoro, Hiraku Matsukuma, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing, 12, 5, 96, 2018, [Peer-reviewed]
English, Scientific journal

Evaluation of the grating period based on laser diffraction by using a mode-locked femtosecond laser beam
Yuki Shimizu, Kentaro Uehara, Hiraku Matsukuma, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing, 12, 5, 97, 2018, [Peer-reviewed]
English, Scientific journal

Design and verification of an XYZ three-axis micro stage
Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Yuan Liu Chen, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
International conference proceedings

Polarization ray-tracing model for orthogonal two-axis Lloyd's mirror interference lithography
Xiuguo Chen, Zongwei Ren, Yuanliu Chen, Yuki Shimizu, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
International conference proceedings

Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer
Kazuki Mano, Ryo Aihara, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
International conference proceedings

Surface form measurement of a small roll workpiece
Toshiki Saito, Yuki Machida, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
International conference proceedings

Evaluation of grating periods by using pulsed laser source
Kentaro Uehara, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
International conference proceedings

A confocal microscope with a mode-locked laser source
Yuki Shimizu, Taku Nakamura, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
International conference proceedings

Evaluation of relative vertical error motions of a bench center by using an optical micrometer
Zengyuan Niu, Yuan Liu Chen, Yuki Shimizu, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
International conference proceedings

Ultra-precision angle sensor with a mode-locked laser source
Shuhei Madokoro, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
International conference proceedings

An edge reversal method for precision measurement of cutting edge radius of single point diamond tools
Yuan Liu Chen, Yindi Cai, Malu Xu, Yuki Shimizu, So Ito, Wei Gao
Precision Engineering, 50, 380, 387, Oct. 2017, [Peer-reviewed]
English, Scientific journal

Optimal polarization modulation for orthogonal two-axis Lloyd’s mirror interference lithography
Xiuguo Chen, Zongwei Ren, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Optics Express, 25, 19, 22237, 22252, 18 Sep. 2017, [Peer-reviewed]
English, Scientific journal

Implementation and verification of a four-probe motion error measurement system for a large-scale roll lathe used in hybrid manufacturing
Yuan Liu Chen, Zengyuan Niu, Daiki Matsuura, Jung Chul Lee, Yuki Shimizu, Wei Gao, Jeong Seok Oh, Chun Hong Park
Measurement Science and Technology, 28, 10, 07 Sep. 2017, [Peer-reviewed]
English, Scientific journal

Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setup
Xiuguo Chen, Yuki Shimizu, Xin Xiong, Yuan Liu Chen, Wei Gao
Optics Express, 25, 18, 21567, 21582, 04 Sep. 2017, [Peer-reviewed]
English, Scientific journal

Optimal polarization modulation for orthogonal two-axis Lloyd's mirror interference lithography
Xiuguo Chen, Zongwei Ren, Yuki Shimizu, Yuan-Liu Chen, Wei Gao
OPTICS EXPRESS, 25, 19, 22237, 22252, Sep. 2017, [Peer-reviewed]
English, Scientific journal

Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setup　　　　　　　　　　　　　　　
XIUGUO CHEN, YUKI SHIMIZU, XIN XIONG, YUAN-LIU CHEN, AND WEI GAO
Optics Express, 28 Aug. 2017, [Peer-reviewed]
English, Scientific journal

Optical frequency domain angle measurement in a femtosecond laser autocollimator
Yuan Liu Chen, Yuki Shimizu, Jun Tamada, Yukitoshi Kudo, Shuhei Madokoro, Kazuki Nakamura, Wei Gao
Optics Express, 25, 14, 16725, 16738, 10 Jul. 2017, [Peer-reviewed]
English, Scientific journal

Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo
Yuan Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
Precision Engineering, 49, 253, 261, Jul. 2017, [Peer-reviewed]
English, Scientific journal

Optical frequency domain angle measurement in a femtosecond laser autocollimator
Yuan-Liu Chen, Yuki Shimizu, Jun Tamada, Yukitoshi Kudo, Shuhei Madokoro, Kazuki Nakamura, Wei Gao
OPTICS EXPRESS, 25, 14, 16725, 16738, Jul. 2017, [Peer-reviewed]
English, Scientific journal

Precision measurement of Z-slide vertical error motion of an ultra-precision lathe by using three-probe method
Zengyuan Niu, Yuan Liu Chen, Daiki Matsuura, Jung Chul Lee, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeong Seok Oh, Chun Hong Park
International Journal of Precision Engineering and Manufacturing, 18, 5, 651, 660, 01 May 2017, [Peer-reviewed]
English, Scientific journal

Design and testing of a micro thermal sensor for non-contact surface defect detection
Yuki Shimizu, Yuki Matsuno, Yuan Liu Chen, Wei Gao
International Journal of Automation Technology, 11, 5, 781, 786, Fuji Technology Press, 2017, [Peer-reviewed]
English, Scientific journal

An optical lever by using a mode-locked laser for angle measurement
Yuki Shimizu, Yukitoshi Kudo, Yuan Liu Chen, So Ito, Wei Gao
Precision Engineering, 47, 72, 80, 01 Jan. 2017, [Peer-reviewed]
English, Scientific journal

Design and testing of an optical configuration for multi-dimensional measurement of a diamond cutting tool
Yuki Shimizu, Sung Ho Jang, Wei Gao
Measurement: Journal of the International Measurement Confederation, 94, 934, 941, 01 Dec. 2016, [Peer-reviewed]
English, Scientific journal

Molecular dynamics simulation of form measurement process of soft materials using atomic force microscope
Yindi Cai, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, 156, 159, 28 Nov. 2016, [Peer-reviewed]
English, International conference proceedings

Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer
Yuki Shimizu, Ryo Aihara, Zongwei Ren, Yuan Liu Chen, So Ito, Wei Gao
Optics Express, 24, 24, 27521, 27535, 28 Nov. 2016, [Peer-reviewed]
English, Scientific journal

Nanometrology of an ultraprecision machined surface by using optical sensors
Zengyuan Niu, Ryo Kobayashi, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
16th International Conference on Nanotechnology - IEEE NANO 2016, 984, 985, 21 Nov. 2016, [Peer-reviewed]
English, International conference proceedings

Analysis of a Lloyd's mirror interferometer for fabrication of gratings
Zongwei Ren, Ryo Aihara, Yuki Shimizu, So Ito, Yuan Liu Chen, Wei Gao
16th International Conference on Nanotechnology - IEEE NANO 2016, 982, 983, 21 Nov. 2016, [Peer-reviewed]
English, International conference proceedings

Micro thermal sensor for nanometric surface defect inspection
Yuki Shimizu, Yuki Matsuno, Yuta Ohba, Wei Gao
16th International Conference on Nanotechnology - IEEE NANO 2016, 978, 979, 21 Nov. 2016, [Peer-reviewed]
English, International conference proceedings

Mode-locked laser autocollimator with an expanded measurement range
Yuan Liu Chen, Yuki Shimizu, Yukitoshi Kudo, So Ito, Wei Gao
Optics Express, 24, 14, 15554, 15569, 11 Jul. 2016, [Peer-reviewed]
English, Scientific journal

On-line qualification of a micro probing system for precision length measurement of micro-features on precision parts
Yuan Liu Chen, So Ito, Hirotaka Kikuchi, Ryo Kobayashi, Yuki Shimizu, Wei Gao
Measurement Science and Technology, 27, 7, 1, 13, 31 May 2016, [Peer-reviewed]
English, Scientific journal

Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions
Yuki Shimizu, Siew Leng Tan, Dai Murata, Taiji Maruyama, So Ito, Yuan Liu Chen, Wei Gao
Optics Express, 24, 3, 2788, 2805, 08 Feb. 2016, [Peer-reviewed]
English, Scientific journal

Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting
Yindi Cai, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao, Liangchi Zhang
Applied Surface Science, 369, 354, 365, 2016, [Peer-reviewed]
English, Scientific journal

On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact
Yuan Liu Chen, Yindi Cai, Yuki Shimizu, So Ito, Wei Gao, Bing Feng Ju
Precision Engineering, 43, 462, 467, Jan. 2016, [Peer-reviewed]
English, Scientific journal

Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system
So Ito, Yuan Liu Chen, Yuki Shimizu, Hirotaka Kikuchi, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi
Precision Engineering, 43, 525, 529, Jan. 2016, [Peer-reviewed]
English, Scientific journal

A micro-coordinate measurement machine (CMM) for large-scale dimensional measurement of micro-slits
So Ito, Hirotaka Kikuchi, Yuanliu Chen, Yuki Shimizu, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi
Applied Sciences (Switzerland), 6, 5, 156, 2016, [Peer-reviewed]
English, Scientific journal

Determination of the zero-position for an optical angle sensor
Jun Tamada, Yukitoshi Kudo, Yuan Liu Chen, Yuki Shimizu, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing, 10, 5, 16-00128, 2016, [Peer-reviewed]
English, International conference proceedings

Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer
Yindi Cai, Xinghui Li, Ryo Aihara, Ren Zongwei, Yuki Shimizu, So Ito, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing, 10, 5, 16-00127, 2016, [Peer-reviewed]
English, International conference proceedings

A highly stable noncontact SPM for surface profile measurement and its application to insulating samples
Shigeaki Goto, Minglei Li, So Ito, Yuki Shimizu, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing, 10, 5, 16-00134, 2016, [Peer-reviewed]
English, International conference proceedings

Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool
Yuan Liu Chen, Yindi Cai, Yuki Shimizu, So Ito, Wei Gao, Bing Feng Ju
Journal of Micromechanics and Microengineering, 26, 2, 025002, 18 Dec. 2015, [Peer-reviewed]
English, Scientific journal

Precision measurement of vertical straightness of a roll workpiece on an ultra-precision lathe
Zengyuan Niu, Yuanliu Chen, Daiki Matsuura, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeongseok Oh, Chunhong Park
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
International conference proceedings

Noncontact electrostatic force microscopy for surface profile measurement of insulating materials
Shigeaki Goto, Minglei Li, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
International conference proceedings

Molecular dynamics simulation of nano-contact between a diamond cutting tool and a copper surface
Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao, Ying Chen
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
International conference proceedings

Laser interference lithography with a modified two-axis Lloyd's mirror interferometer for fabrication of two-dimensional micro patterns
Yindi Cai, Xinghui Li, Ryo Aihara, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
International conference proceedings

Ductile cutting of a microstructure array on silicon surface by using a diamond tool with a negative rake angle
Yuan Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
International conference proceedings

Determination of the origin position for an angle sensor with a femtosecond laser
Jun Tamada, Yukitoshi Kudo, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
International conference proceedings

Micro-probing system for slit width measurement by using a shear-force detection
So Ito, Kikuchi Hirotaka, Yuan Liu Chen, Yuki Shimizu, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
International conference proceedings

Measurement of angular error motions of a precision linear stage by using a high resolution clinometer
Satoshi Kataoka, Tatsuya Ishikawa, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
International conference proceedings

Profile Measurement of micro-optics with steep sidewalls by using a long stroke atomic force microscope
Minglei Li, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
International conference proceedings

Self-evaluation of the cutting edge contour of a microdiamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe
Yuan Liu Chen, Yuki Shimizu, Yindi Cai, Shu Wang, So Ito, Bing Feng Ju, Wei Gao
International Journal of Advanced Manufacturing Technology, 77, 9-12, 2257, 2267, Apr. 2015, [Peer-reviewed]
English, Scientific journal

Design of a laser autocollimator-based optical sensor with a rangefinder for error correction of precision slide guideways
Siew Leng Tan, Yuki Shimizu, Takayuki Meguro, So Ito, Wei Gao
International Journal of Precision Engineering and Manufacturing, 16, 3, 423, 431, Mar. 2015, [Peer-reviewed]
English, Scientific journal

On-machine measurement of a diamond tool edge contour with a force sensor integrated fast tool servo
Wang Shu, Chen Yuan-Liu, Ito So, Shimizu Yuki, Wei Gao
Proceedings of JSPE Semestrial Meeting, 2015, 295, 296, The Japan Society for Precision Engineering, 2015
Japanese, A self-evaluation method for the cutting edge contour of a micro diamond tool is developed without any accurate reference artifacts or additional measuring instruments by using a force sensor-integrated fast tool servo (FS-FTS) At first, a series of micro grooves are machined with overlaps on the side wall of a roller mounted on the lathe spindle alone Z-direction by using a cutting tool of the FS-FTS, which is mounted on the X-slide of the lathe to form a group of sharp line structures. The cutting tool is then induced to scan across the line structures as a contact probe based on the force feedback control function of the FS-FTS so that the scanning path of the tool can be transferred to the tool edge contour to be measured. In this paper, a principle of the proposed method, a development of the experimental setup and some experimental results are reported.

Molecular dynamics simulation on nanoindentation response of a copper workpiece
Cai Yindi, Chen Yuanliu, Shimizu Yuki, Ito So, Gao Wei
Proceedings of JSPE Semestrial Meeting, 2015, 231, 232, The Japan Society for Precision Engineering, 2015
Japanese, Contact detection process of ultra-precision surfaces fabrication and form measurement by using a force sensor-integrated fast tool servo will cause the surface damages of a copper workpiece. Based on the study of contact deformation, nanoindentation test is carried out by MD simulation in this paper to theoretically investigate the surface damages due to the contact detection process. Mechanical behaviors of the molecules on the copper workpiece surface during nanoindentation process are observed. In addition, the physical properties of the workpiece are also analyzed in this paper.

Detection and repair of micro defects in the process of diamond cutting of a microstructure array
Chen Yuanliu, Shimizu Yuki, Ito So, Gao Wei
Proceedings of JSPE Semestrial Meeting, 2015, 237, 238, The Japan Society for Precision Engineering, 2015
Japanese, This paper presents an in-process measurement technique, which is capable of conducting position identification and dimension characterization of defects, for repair of micro defects by using a fast tool servo with a force sensor. A thrust force map is in-process produced to indicate the cutting status with respect to the positions of the machine slide and the machine spindle measured by linear encoder and rotary encoder, respectively. The position of the defect is detected by observing the thrust force map to determine the location of the abnormal variation in the monitored thrust force. Confirmation and characterization of the defects are conducted by employing the force-controlled tool to measure the sectional profile of the defective microstructures. The identified position and the characterized dimension are fed back to carry out repair which can be thus with exact tool setting position and accurate repair path. Experiments were carried out on a nikel cylindrical workpiece with a diameter of 55 mm fabricated by using a micro diamond tool. Defects, with dimension on the order of 1 μm among a cut microstructure array over the outer surface of the cylindrical workpiece, were in-process detected and repaired to confirm the feasibility of the proposed method.

Pitch deviation measurement of an involute spur gear by a rotary profiling system
Bin Xu, Yuki Shimizu, So Ito, Wei Gao
Precision Engineering, 39, 152, 160, 01 Jan. 2015, [Peer-reviewed]
English, Scientific journal

An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor
Yuan Liu Chen, Shu Wang, Yuki Shimizu, So Ito, Wei Gao, Bing Feng Ju
Precision Engineering, 39, 134, 142, 01 Jan. 2015, [Peer-reviewed]
English, Scientific journal

Investigation on sensitivity of a contact-type thermal sensor for surface defect inspections
Yuki Shimizu, Yuta Ohba, Wei Gao
International Journal of Automation Technology, 9, 3, 291, 296, 2015, [Peer-reviewed]
English, Scientific journal

Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography
Xinghui Li, Yindi Cai, Ryo Aihara, Yuki Shimizu, So Ito, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 9524, 2015, [Peer-reviewed]
English, International conference proceedings

An ultra-precision Electronic Clinometer for Measurement of Small Inclination Angles　　　　　　　　　　　　　　　
Siew-Leng Tan, Satoshi Kataoka, Tatsuya Ishikawa, So Ito, Yuki Shimizu, Yuanliu Chen, Wei Gao, Satoshi Nakagawa
Journal of the Korean Society of Manufacturing Technology Engineers, 23, 6, 539, 545, Dec. 2014, [Peer-reviewed]
English, Scientific journal

Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder
Xinghui Li, Yuki Shimizu, Takeshi Ito, Yindi Cai, So Ito, Wei Gao
Optical Engineering, 53, 12, Dec. 2014, [Peer-reviewed]
English, Scientific journal

Precision evaluation of surface form error of a large-scale roll workpiece on a drum roll lathe
Jung Chul Lee, Yuki Shimizu, Wei Gao, Jeongseok Oh, Chun Hong Park
Precision Engineering, 38, 4, 839, 848, Oct. 2014, [Peer-reviewed]
English, Scientific journal

Drift reduction in a scanning electrostatic force microscope for surface profile measurement
Zhigang Jia, So Ito, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Wei Gao
Measurement Science and Technology, 25, 9, 01 Sep. 2014, [Peer-reviewed]
English, Scientific journal

Design and testing of a four-probe optical sensor head for three-axis surface encoder with a mosaic scale grating
Yuki Shimizu, Takeshi Ito, Xinghui Li, Woojae Kim, Wei Gao
Measurement Science and Technology, 25, 9, 01 Sep. 2014, [Peer-reviewed]
English, Scientific journal

Three-axis vibration measurement by using a grating-interferometric vibrometer
So Ito, Ryo Aihara, Woo Jae Kim, Yuki Shimizu, Wei Gao
Advanced Optical Technologies, 3, 4, 435, 440, Walter de Gruyter GmbH, 01 Aug. 2014, [Peer-reviewed]
English, Scientific journal

A measurement method of cutting tool position for relay fabrication of microstructured surface
Yuan Liu Chen, Wei Gao, Bing Feng Ju, Yuki Shimizu, So Ito
Measurement Science and Technology, 25, 6, Jun. 2014, [Peer-reviewed]
English, Scientific journal

Feasibility study on the concept of thermal contact sensor for nanometre-level defect inspections on smooth surfaces
Yuki Shimizu, Wenjian Lu, Yuta Ohba, Wei Gao
Measurement Science and Technology, 25, 6, Jun. 2014, [Peer-reviewed]
English, Scientific journal

A Cr-N thin film displacement sensor for precision positioning of a micro-stage
Yuxin Peng, So Ito, Yuki Shimizu, Toyohiro Azuma, Wei Gao, Eiji Niwa
Sensors and Actuators, A: Physical, 211, 89, 97, 01 May 2014, [Peer-reviewed]
English, Scientific journal

A micro optical probe for edge contour evaluation of diamond cutting tools
S. H. Jang, Y. Shimizu, S. Ito, W. Gao
Journal of Sensors and Sensor Systems, 3, 1, 69, 76, 28 Mar. 2014, [Peer-reviewed]
English, Scientific journal

Contact/clearance sensor for HDI subnanometer regime
Junguo Xu, Yuki Shimizu, Masaru Furukawa, Jianhua Li, Yuichiro Sano, Toshiya Shiramatsu, Yuichi Aoki, Hiroyuki Matsumoto, Kenji Kuroki, Hidekazu Kohira
IEEE Transactions on Magnetics, 50, 3, 114, 118, Mar. 2014, [Peer-reviewed]
English, Scientific journal

Experiment of polarization forces in scanning electrostatic force microscopy for measuring surface profile of dielectric
Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Open Electrical and Electronic Engineering Journal, 8, 1, 342, 347, Bentham Science Publishers B.V., 2014, [Peer-reviewed]
English, Scientific journal

On-machine form measurement of high precision ceramics parts by using a laser displacement sensor
So Ito, Daiki Matsuura, Takayuki Meguro, Shigeaki Goto, Yuki Shimizu, Wei Gao, Shigeru Adachi, Kyohei Omiya
Journal of Advanced Mechanical Design, Systems and Manufacturing, 8, 4, 2014, [Peer-reviewed]
English, Scientific journal

Self-calibration and compensation of setting errors for surface profile measurement of a microstructured roll workpiece
Wei Gao, Bin Xu, Toshiki Takeishi, Yuki Shimizu, So Ito
Chinese Journal of Mechanical Engineering (English Edition), 27, 1, 14, 22, Jan. 2014, [Peer-reviewed]
English, Scientific journal

A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings
Xinghui Li, Wei Gao, Yuki Shimizu, So Ito
CIRP Annals - Manufacturing Technology, 63, 1, 461, 464, 2014, [Peer-reviewed]
English, Scientific journal

Development of an optical probe for evaluation of tool edge geometry
Sung Ho Jang, Yuki Shimizu, So Ito, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing, 8, 4, 2014, [Peer-reviewed]
English, Scientific journal

Design of fabrication process of a thermal contact sensor for surface defect inspection
Yuki Shimizu, Yuta Ohba, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing, 8, 4, 2014, [Peer-reviewed]
English, Scientific journal

Measurement of contact potential difference and material distribution by using an SEFM
Keiichiro Hosobuchi, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing, 8, 4, 2014, [Peer-reviewed]
English, Scientific journal

An improved scan mode in an electrostatic force microscope for surface profile measurement of micro-optics
Zhigang Jia, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing, 8, 4, 2014, [Peer-reviewed]
English, Scientific journal

Fabrication of scale gratings for surface encoders by using laser interference lithography with 405 nm laser diodes
Xinghui Li, Yuki Shimizu, So Ito, Wei Gao
International Journal of Precision Engineering and Manufacturing, 14, 11, 1979, 1988, Nov. 2013, [Peer-reviewed]
English, Scientific journal

Development of a micro-sized thermal contact sensor for inspection of surface defects
Yuki Shimizu, Wenjian Lu, Yuta Ohba, Wei Gao
International Journal of Automation Technology, 7, 6, 708, 713, Fuji Technology Press, Nov. 2013, [Peer-reviewed]
English, Scientific journal

An electrostatic force probe for surface profile measurement in noncontact condition
So Ito, Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Gaofa He, Wei Gao
International Journal of Automation Technology, 7, 6, 714, 719, Fuji Technology Press, Nov. 2013, [Peer-reviewed]
English, Scientific journal

Surface profile measurement of internal micro-structures
Bin Xu, Yuki Shimizu, So Ito, Wei Gao
International Journal of Precision Engineering and Manufacturing, 14, 9, 1535, 1541, Sep. 2013, [Peer-reviewed]
English, Scientific journal

Characterization of electrostatic force for scanning electrostatic force microscopy of micro-structured surface
Zhigang Jia, So Ito, Keiichiro Hosobuchi, Shigeaki Goto, Yuki Shimizu, Gaofa He, Wei Gao
International Journal of Precision Engineering and Manufacturing, 14, 9, 1543, 1549, Sep. 2013, [Peer-reviewed]
English, Scientific journal

Construction and verification of a linear-rotary microstage with a millimeter-scale range
Yuxin Peng, So Ito, Yasumasa Sakurai, Yuki Shimizu, Wei Gao
International Journal of Precision Engineering and Manufacturing, 14, 9, 1623, 1628, Sep. 2013, [Peer-reviewed]
English, Scientific journal

Fabrication of large-size SiC mirror with precision aspheric profile for artificial satellite
Yuki Shimizu, Shigeaki Goto, Jungchul Lee, So Ito, Wei Gao, Shigeru Adachi, Kyohei Omiya, Hiroki Sato, Tetsuya Hisada, Yoshifumi Saito, Hiroaki Kubota
Precision Engineering, 37, 3, 640, 649, Jul. 2013, [Peer-reviewed]
English, Scientific journal

A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage
Xinghui Li, Wei Gao, Hiroshi Muto, Yuki Shimizu, So Ito, Songyi Dian
Precision Engineering, 37, 3, 771, 781, Jul. 2013, [Peer-reviewed]
English, Scientific journal

A micro-ball tapping probe for form measurement of micro-structured surface
Bin Xu, Yuki Shimizu, So Ito, Wei Gao
Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao, 34, 1, 73, 80, Feb. 2013, [Peer-reviewed]
English, Scientific journal

On the use of mercury sessile drops as reference artefacts for the calibration of optical surface topography measuring instruments
Jacob W. Chesna, Yuki Shimizu, Richard K. Leach
Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013, 74, 77, 2013
International conference proceedings

Measurement of cutting edgewidth of a rotary cutting tool by using a laser displacement sensor
So Ito, Sho Sekine, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato, Kouji Kubota
International Journal of Automation Technology, 8, 1, 28, 33, 2013, [Peer-reviewed]
Scientific journal

Precision tool setting for fabrication of a microstructure array
Wei Gao, Yuan Liu Chen, Kang Won Lee, Young Jin Noh, Yuki Shimizu, So Ito
CIRP Annals - Manufacturing Technology, 62, 1, 523, 526, 2013, [Peer-reviewed]
English, Scientific journal

Design and construction of the motion mechanism of an XY micro-stage for precision positioning
Yuki Shimizu, Yuxin Peng, Junji Kaneko, Toyohiro Azuma, So Ito, Wei Gao, Tien Fu Lu
Sensors and Actuators, A: Physical, 201, 395, 406, 2013, [Peer-reviewed]
English, Scientific journal

Surface form metrology of micro-optics
Bin Xu, Zhigang Jia, Xinghui Li, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 8769, 2013, [Peer-reviewed], [Invited]
English, International conference proceedings

Development of a micro-sized thermal contact sensor for inspection of surface defects
Yuki Shimizu, Wenjian Lu, Yuta Ohba, Wei Gao
International Journal of Automation Technology, 7, 6, 708, 713, Fuji Technology Press, 2013, [Invited]
English, Scientific journal

Modeling and analysis of a scanning electrostatic force microscope for surface profile measurement
Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 8759, 2013, [Peer-reviewed]
English, International conference proceedings

Fabrication of diffraction gratings for surface encoders by using a Lloyd's mirror interferometer with a 405 nm laser diode
Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Lijiang Zeng
Proceedings of SPIE - The International Society for Optical Engineering, 8759, 2013, [Peer-reviewed]
English, International conference proceedings

Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric
Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 8916, 2013, [Peer-reviewed]
English, International conference proceedings

A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement
Akihide Kimura, Wei Gao, Woojae Kim, Koji Hosono, Yuki Shimizu, Lei Shi, Lijiang Zeng
Precision Engineering, 36, 4, 576, 585, Oct. 2012, [Peer-reviewed]
English, Scientific journal

Fast evaluation of period deviation and flatness of a linear scale by using a fizeau interferometer
Woo Jae Kim, Yuki Shimizu, Akihide Kimura, Wei Gao
International Journal of Precision Engineering and Manufacturing, 13, 9, 1517, 1524, Sep. 2012, [Peer-reviewed]
English, Scientific journal

Effect of reduction of slider pitch-mode vibration on magneticrecording performance at low-clearance head-disk interface
Yuki Shimizu, Junguo Xu, Jianhua Li, Hidekazu Kohira, Kiyoshi Hashimoto
Microsystem Technologies, 18, 9-10, 1597, 1606, Sep. 2012, [Peer-reviewed]
English, International conference proceedings

On-machine profile measurement of large mirror for satellite (1st report) - Construction of the measurement system and development of the alignment methods
Shigeaki Goto, Yuki Shimizu, Jung Chul Lee, So Ito, Wei Gao, Shigeru Adachi, Kyohei Omiya, Hiroki Sato, Tetsuya Hisada, Yoshifumi Saito, Hiroaki Kubota
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 78, 7, 631, 635, Jul. 2012, [Peer-reviewed]
Scientific journal

Spindle error motion measurement of a large precision roll lathe
Jungchul Lee, Wei Gao, Yuki Shimizu, Jooho Hwang, Jeong Seok Oh, Chun Hong Park
International Journal of Precision Engineering and Manufacturing, 13, 6, 861, 867, Jun. 2012, [Peer-reviewed]
English, Scientific journal

Spindle error motion measurement of a large precision roll lathe
JungChul Lee, Wei Gao, Yuki Shimizu, Jooho Hwang, Jeong Seok Oh, Chun Hong Park
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 13, 6, 861, 867, Jun. 2012, [Peer-reviewed]
English, Scientific journal

Precision measurement of carriage slide motion error of a drum roll lathe
Jung Chul Lee, Wei Gao, Yuki Shimizu, Jooho Hwang, Jeong Seok Oh, Chun Hong Park
Precision Engineering, 36, 2, 244, 251, Apr. 2012, [Peer-reviewed]
English, Scientific journal

An air-bearing displacement sensor for nanometrology of surface forms
Kang Won Lee, So Ito, Yuki Shimizu, Wei Gao, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai
2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings, 2469, 2471, 2012, [Peer-reviewed]
English, International conference proceedings

A scanning-light method for inspection of tool cutting edge
Yuki Shimizu, Sungho Jang, Takemi Asai, So Ito, Wei Gao
2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings, 2395, 2397, 2012, [Peer-reviewed]
English, International conference proceedings

Design and experiment of thermal contact sensor detecting defects on Si wafer surface
Wenjian Lu, Yuki Shimizu, So Ito, Wei Gao
Key Engineering Materials, 523-524, 826, 831, 2012, [Peer-reviewed]
English, International conference proceedings

Edge contour measurement of single point diamond cutting tools by an optical probe
Sung Ho Jang, Yuki Shimizu, Takemi Asai, So Ito, Wei Gao
Key Engineering Materials, 523-524, 925, 931, 2012, [Peer-reviewed]
English, International conference proceedings

Cr-N strain-gauge-type precision displacement sensor for measuring positions of micro stage
Toyohiro Azuma, Eiji Niwa, Yuxin Peng, Junji Kaneko, Yuki Shimizu, So Ito, Wei Gao
Key Engineering Materials, 523-524, 939, 944, 2012, [Peer-reviewed]
English, International conference proceedings

Improvement of an air-bearing displacement sensor with nanometric resolution
So Ito, Kang Won Lee, Yuki Shimizu, Wei Gao
Key Engineering Materials, 523-524, 945, 950, 2012, [Peer-reviewed]
English, International conference proceedings

Cutting edge height measurement of a rotary cutting tool by a laser displacement sensor
Shinichi Osawa, So Ito, Yuki Shimizu, Sungho Jang, Wei Gao, Tsutomu Fukuda, Akira Kato, Kouji Kubota
Journal of Advanced Mechanical Design, Systems and Manufacturing, 6, 6, 815, 828, 2012, [Peer-reviewed]
English, International conference proceedings

Surface form measurement and analysis of a cylindrical workpiece with microstructures
Bin Xu, Yuki Shimizu, Toshiki Takeishi, So Ito, Wei Gao
Journal of Advanced Mechanical Design, Systems and Manufacturing, 6, 6, 936, 948, 2012, [Peer-reviewed]
English, International conference proceedings

衛星用大型ミラーの加工機上高精度形状測定に関する研究(第1報) －形状測定システムの構築とアライメント手法の開発－
後藤 成晶, 清水 裕樹, 李 貞徹, 伊東 聡, 高 偉, 足立 茂, 大宮 恭平, 佐藤 広規, 久田 哲弥, 齋藤 佳史, 久保田 浩明
精密工学会誌, 78, 7, 2012, [Peer-reviewed]
Japanese

Fabrication of micro-ball styluses for scanning-type surface form metrology
Shimizu Yuki, Xu Bin, Gao Wei
International Journal of Nanomanufacturing, 8, 1-2, 87, 105, Jan. 2012, [Peer-reviewed]
English, Scientific journal

Establishment of a measuring station on a diamond turning machine for in-process cutting edge inspection of single point diamond micro-tools
Sung Ho Jang, Takemi Asai, Yuki Shimizu, Wei Gao
International Journal of Nanomanufacturing, 8, 1-2, 106, 122, Jan. 2012, [Peer-reviewed]
English, Scientific journal

New measurement concept of nanometer-level defects on Si wafer surface by using micro contact sensor
Wenjian Lu, Shimizu Yuki, Gao Wei
Advanced Materials Research, 497, 137, 141, 2012, [Peer-reviewed]
English, International conference proceedings

A noncontact scanning electrostatic force microscope for surface profile measurement
Wei Gao, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu
CIRP Annals - Manufacturing Technology, 61, 1, 471, 474, 2012, [Peer-reviewed]
English, Scientific journal

A micro-stage for linear-rotary positioning
Yuxin Peng, So Ito, Yuki Shimizu, Wei Gao
Key Engineering Materials, 523-524, 650, 655, 2012, [Peer-reviewed]
English, International conference proceedings

Design and Experiment of Thermal Contact Sensor Detecting Defects on Si Wafer Surface
Wenjian Lu, Yuki Shimizu, So Ito, Wei Gao
EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV, 523-524, 826, 831, 2012, [Peer-reviewed]
English, International conference proceedings

Dynamic response of an air-bearing displacement sensor for on-machine surface form measurement
Kang Won Lee, So Ito, Yuki Shimizu, Wei Gao, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai
Key Engineering Materials, 523-524, 836, 841, 2012, [Peer-reviewed]
English, International conference proceedings

Analysis and measurement of the dynamic motions of a large-scale rotating roll workpiece
Jung Chul Lee, Wei Gao, Yuki Shimizu, So Ito, Jooho Hwang, Jeong Seok Oh, Chun Hong Park
Key Engineering Materials, 523-524, 847, 852, 2012, [Peer-reviewed]
English, International conference proceedings

Eccentric error compensation for pitch deviation measurement of gears
Bin Xu, So Ito, Yuki Shimizu, Wei Gao
Key Engineering Materials, 523-524, 853, 858, 2012, [Peer-reviewed]
English, International conference proceedings

Form error characterization of reflective-type gratings
Yuki Shimizu, Woo Jae Kim, So Ito, Wei Gao
Key Engineering Materials, 523-524, 859, 864, 2012, [Peer-reviewed]
English, International conference proceedings

Design of a three-axis surface encoder with a blue-ray laser diode
Xinghui Li, Yuki Shimizu, Hiroshi Muto, So Ito, Wei Gao
Key Engineering Materials, 523-524, 913, 918, 2012, [Peer-reviewed]
English, International conference proceedings

Design and test of a three-axis mosaic surface encoder
Woo Jae Kim, Yuki Shimizu, Koji Hosono, Ito So, Wei Gao
Key Engineering Materials, 523-524, 919, 924, 2012, [Peer-reviewed]
English, International conference proceedings

Edge Contour Measurement of Single Point Diamond Cutting Tools by An Optical Probe
SungHo Jang, Yuki Shimizu, Takemi Asai, So Ito, Wei Gao
EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV, 523-524, 925, 931, 2012, [Peer-reviewed]
English, International conference proceedings

Cr-N Strain-gauge-type Precision Displacement Sensor for Measuring Positions of Micro Stage
Toyohiro Azuma, Eiji Niwa, Yuxin Peng, Junji Kaneko, Yuki Shimizu, So Ito, Wei Gao
EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV, 523-524, 939, +, 2012, [Peer-reviewed]
English, International conference proceedings

Improvement of an air-bearing displacement sensor with nanometric resolution
So Ito, Kang-Won Lee, Yuki Shimizu, Wei Gao
EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV, 523-524, 945, 950, 2012, [Peer-reviewed]
English, International conference proceedings

Pit detection using a contact sensor
J. Xu, Y. Shimizu, J. Liu, T. Shiramatsu, M. Furukawa, J. Li, H. Kohira
2012 Digest APMRC - Asia-Pacific Magnetic Recording Conference: A Strong Tradition. An Exciting New Look!, 49, 6, 2715, 2718, 2012, [Peer-reviewed]
English, International conference proceedings

Multi-axis grating encoders for stage motion measurement
Woo Jae Kim, Akihide Kimura, Koji Hosono, Yuki Shimizu, Wei Gao
International Journal of Nanomanufacturing, 7, 5-6, 409, 426, Nov. 2011, [Peer-reviewed]
English, Scientific journal

Optical analysis of an optical probe for three-dimensional position detection of micro-objects
Sung Ho Jang, Takemi Asai, Yuki Shimizu, Wei Gao
International Journal of Automation Technology, 5, 6, 862, 865, Fuji Technology Press, Nov. 2011, [Peer-reviewed]
English, Scientific journal

Nano-scale defect mapping on a magnetic disk surface using a contact sensor
Yuki Shimizu, Junguo Xu, Hidekazu Kohira, Masayuki Kurita, Toshiya Shiramatsu, Masaru Furukawa
IEEE Transactions on Magnetics, 47, 10, 3426, 3432, Oct. 2011, [Peer-reviewed], [Invited]
English, International conference proceedings

Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures
Kang Won Lee, Young Jin Noh, Wei Gao, Yoshikazu Arai, Yuki Shimizu, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai
International Journal of Precision Engineering and Manufacturing, 12, 4, 671, 678, Aug. 2011, [Peer-reviewed]
English, Scientific journal

Experimental Investigation of an Air-bearing Displacement Sensor for On-machine Surface Form Measurement of Micro-structures
Kang-Won Lee, Young-Jin Noh, Wei Gao, Yoshikazu Arai, Yuki Shimizu, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 12, 4, 671, 678, Aug. 2011, [Peer-reviewed]
English, Scientific journal

Experimental study on slider dynamics during touchdown by using thermal flying-height control
Yuki Shimizu, Junguo Xu, Hidekazu Kohira, Kenji Kuroki, Kyosuke Ono
Microsystem Technologies, 17, 5-7, 897, 902, Jun. 2011, [Peer-reviewed]
English, International conference proceedings

A two-degree-of-freedom linear encoder with a mosaic scale grating
Akihide Kimura, Koji Hosono, Woo Jae Kim, Yuki Shimizu, Wei Gao, Lijiang Zeng
International Journal of Nanomanufacturing, 7, 1, 73, 91, May 2011, [Peer-reviewed]
English, Scientific journal

A linear micro-stage with a long stroke for precision positioning of micro-objects
Yu Xin Peng, Wei Gao, Jun Kaneko, Yoshikazu Arai, Yuki Shimizu, Koichi Okamoto, Miho Chiba, Shuji Aisawa
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, 9, 3, 221, 227, May 2011, [Peer-reviewed]
English, Scientific journal

Surface encoders for a mosaic scale grating
Koji Hosono, Woo Jae Kim, Akihide Kimura, Yuki Shimizu, Wei Gao
International Journal of Automation Technology, 5, 2, 91, 96, Fuji Technology Press, Mar. 2011, [Peer-reviewed]
English, Scientific journal

Spindle error motion measurement of a large-scale ultra-precision lathe
Lee JungChul, Shimizu Yuki, Gao Wei, Park ChunHong, Hwang Jooho, Oh JeongSeok
Proceedings of JSPE Semestrial Meeting, 2011, 876, 877, The Japan Society for Precision Engineering, 2011
This paper presents a spindle error measurement system to evaluate the performance of a spindle of a large-scale ultra-precision lathe, which is under development for fabrication of large roll dies with micro-structured surfaces. Measurement of the spindle error motion is an important issue for the ultra-precision lathe because the fabrication accuracy is influenced by the motion error. In order to measure the spindle error motion of the large-scale ultra-precision lathe, reversal technique is employed. In this research, large-scale roll workpiece is used as the measurement artifact instead of other master ball or cylinders. This paper reports the spindle error motion measurement with refined reversal operation method for the reversal of the large-scale roll workpiece. Spindle error motion was evaluated over the entire fabrication length (1.7 m) of the large-scale ultra-precision lathe.

Height measurement of cutting edge by a laser displacement sensor
Shinichi Osawa, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato, Kouji Kubota
Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, 2011
International conference proceedings

Wavelet analysis for precision measurement of a micro-part
Toshiki Takeishi, Xu Bin, Yuki Shimizu, Wei Gao
Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, 2011
International conference proceedings

An angle sensor with a laser rangefinder
Takayuki Meguro, Yuki Shimizu, Wei Gao
Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, 2011
International conference proceedings

AN OVERVIEW OF PRECISION MEASUREMENT TECHNOLOGY IN HEAD-DISK INTERFACE IN HARD DISK DRIVES　　　　　　　　　　　　　　　
Yuki Shimizu
Proceedings of The 7th International Symposium on Precision, 2011, [Invited]
English, International conference proceedings

A three-axis autocollimator for detection of angular error motions of a precision stage
W. Gao, Y. Saito, H. Muto, Y. Arai, Y. Shimizu
CIRP Annals - Manufacturing Technology, 60, 1, 515, 518, 2011, [Peer-reviewed]
English, Scientific journal

Precision measurement of micro-lens profile by using a force-controlled diamond cutting tool on an ultra-precision lathe　　　　　　　　　　　　　　　
K. W. Lee, Y. J. Noh, Y. Arai, Y. Shimizu, W. Gao
International Journal of Precision Technology, 2011, [Peer-reviewed]
English, Scientific journal

Surface characterization of a diamond turned XY sinusoidal grating
Y. Shimizu, S. Osawa, T. Meguro, W. Lu, W. Gao
Procedia Engineering, 19, 337, 342, 2011, [Peer-reviewed]
English, International conference proceedings

A glass tube micro-stylus probe for surface form metrology
Bin Xu, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 8321, 2011, [Peer-reviewed]
English, International conference proceedings

Design of a linear-rotary micro-stage
Yuxin Peng, Yasumasa Sakurai, Yoshikazu Arai, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 8321, 2011, [Peer-reviewed]
English, International conference proceedings

Design and evaluation of damped air bearings at head-disk interface
Jianhua Li, Junguo Xu, Yuki Shimizu, Masayuki Honchi, Kyosuke Ono, Yukio Kato
Journal of Tribology, 132, 3, 1, 13, Jul. 2010, [Peer-reviewed]
English, Scientific journal

Mechanism study of scratch-induced demagnetization for perpendicular magnetic disks
Masaru Furukawa, Junguo Xu, Yuki Shimizu, Yukio Kato
Microsystem Technologies, 16, 1-2, 221, 226, Jan. 2010, [Peer-reviewed]
English, International conference proceedings

Fluorine-ion-implanted air-bearing surface for low-friction head-disk interface
Yuki Shimizu, Noritsugu Umehara, Junguo Xu
Microsystem Technologies, 16, 1-2, 293, 299, Jan. 2010, [Peer-reviewed]
English, International conference proceedings

Design of damped air bearings at head disk interface
Jianhua Li, Junguo Xu, Yuki Shimizu, Masayuki Honchi, Kyosuke Ono
Proceedings of the ASME/STLE International Joint Tribology Conference 2009, IJTC2009, 399, 402, 2010, [Peer-reviewed]
English, International conference proceedings

Effect of slider surface energy on head disk interface performance
J. Xu, Y. Shimizu, H. Matsumoto, K. Matsuda
Digest of the Asia-Pacific Magnetic Recording Conference 2010, APMRC 2010, 47, 7, 1817, 1822, 2010, [Peer-reviewed]
English, International conference proceedings

Experimental and numerical simulation study on low-surface energy slider with thermal flying-height control function
Yuki Shimizu, Kyosuke Ono, Noritsugu Umehara, Junguo Xu
IEEE Transactions on Magnetics, 45, 10, 3620, 3623, Oct. 2009, [Peer-reviewed]
English, International conference proceedings

Numerical simulation of touchdown/takeoff hysterisis of spherical pad slider by considering the liquid bridge between the slider and lubricant-disk
Hui Li, Jianhua Li, Junguo Xu, Yuki Shimizu, Kyosuke Ono, Shinobu Yoshida
2008 Proceedings of the STLE/ASME International Joint Tribology Conference, IJTC 2008, 165, 167, 2009
International conference proceedings

Scratch-induced demagnetization of perpendicular magnetic disk
Masaru Furukawa, Junguo Xu, Yuki Shimizu, Yukio Kato
IEEE Transactions on Magnetics, 44, 11 PART 2, 3633, 3636, Nov. 2008, [Peer-reviewed]
English, International conference proceedings

Dynamically controlled thermal flying-height control slider
Toshiya Shiramatsu, Takenori Atsumi, Masayuki Kurita, Yuki Shimizu, Hideaki Tanaka
IEEE Transactions on Magnetics, 44, 11 PART 2, 3695, 3697, Nov. 2008, [Peer-reviewed]
English, International conference proceedings

Study of a spherical-pad head slider for stable low-clearance recording in near-contact regime
Yuki Shimizu, Kyosuke Ono, Junguo Xu, Ryuji Tsuchiyama, Hidetoshi Anan
Tribology Letters, 30, 3, 161, 167, Jun. 2008, [Peer-reviewed]
English, Scientific journal

Performance of sliders flying over discrete-track media
Jianhua Li, Junguo Xu, Yuki Shimizu
Journal of Tribology, 129, 4, 712, 719, Oct. 2007, [Peer-reviewed]
English, Scientific journal

Air-bearing surface chemical modification for low-friction head-disk interface
Yuki Shimizu, Junguo Xu, Shozo Saegusa, Noritsugu Umehara
Microsystem Technologies, 13, 8-10, 811, 816, May 2007, [Peer-reviewed]
English, International conference proceedings

Numerical simulation of effect of roughness/texture of slider surface on intermolecular force
Jianhua Li, Junguo Xu, Yuki Shimizu
Microsystem Technologies, 13, 8-10, 981, 986, May 2007, [Peer-reviewed]
English, International conference proceedings

Characteristics of Miniaturized Air-Bearing Flying over Discrete Track Medium
Jianhua Li, Junguo Xu, Yuki Shimizu
Tribology Online, 2, 2, 59, 63, Japanese Society of Tribologists, 2007, [Peer-reviewed]
English, Scientific journal, We have developed a simulation method in which grooves are virtually distributed on a slider air-bearing surface instead of on a grooved medium surface and used it to investigate slider flying performance. The characteristics of miniaturized air-bearing flying over a discrete track medium (DTM) with a sufficiently small mesh size are simulated minutely. The simulation results indicated that the air-bearing characteristics do not abruptly change when the DTM's land and groove sizes change from below to above the air mean free path. The "brush" shaped pressure distribution causes a larger shear stress difference between the DTM land and groove, which possibly leads to bigger lube moguls or ripples, and the shear stress on DTM land may make lube move into the groove from the land.

Two-Dimensional Flying-Height Modulation Mapping at HDD Drive Level
Yuki Shimizu, Junguo Xu
IEEE Transactions on Magnetics, 42, 10, 2516, 2518, Oct. 2006, [Peer-reviewed]
English, Scientific journal

Ability of slider flying over discrete track medium
Jianhua Li, Junguo Xu, Yuki Shimizu
Proceedings of STLE/ASME International Joint Tribology Conference, IJTC 2006, 2006, 2006
International conference proceedings

Drive level measurement of flying height modulation and control of slider disk contact
Junguo Xu, Yuki Shimizu, Lizhi Su
Proceedings of STLE/ASME International Joint Tribology Conference, IJTC 2006, 2006, 2, 159, 162, 2006, [Peer-reviewed]
English, International conference proceedings

Precision measurement of two-axis positions and tilt motions using a surface encoder
W. Gao, S. Dejima, Y. Shimizu, S. Kiyono
CIRP Annals - Manufacturing Technology, 52, 1, 435, 438, 2003, [Peer-reviewed]
English, Scientific journal

マルチスポット光源を用いたサーフェスエンコーダの研究
高偉,星野唯, 清水裕樹, 清野慧
精密工学会誌, 68, 1, 70, 74, 05 Jan. 2002, [Peer-reviewed]
Japanese, Scientific journal

A Surface Encoder with a Multi-Spot Light Source.
GAO W, 星野唯, 清水裕樹, 清野慧
精密工学会誌, 68, 1, 70, 74, 2002, [Peer-reviewed]

A New Method of Position Detection Using an Optical Scanning Angle Sensor.
清野慧, GAO W, 金井雅也, 星野唯, 清水裕樹
精密工学会誌, 67, 3, 493, 497, 2001, [Peer-reviewed]
Japanese, A new position detecting method, which uses a 2-D angle grid and a 2-D angle sensor, is proposed. The angle grid has a 2-D sinusoidal angular pattern on the surface. The relative displacements between the angle grid and the angle sensor in the X- and Y-directions can be detected from the output of the angle sensor. Because of the angle independency in the X- and Y- directions, it is possible to detect the X- and Y-directional positions from the 2-D angle sensor outputs. Furthermore, use of an optical scanning angle sensor, which scans a beam spot on the angle grid, can reduce the effect of the form error of the angle grid. Rolling and pitching can also be detected by using this method. In this paper, a scanning 2-D angle sensor is designed and manufactured. Experimental results of position detection are reported.

A new method of position detection using an optical scanning angle sensor
Satoshi Kiyono, Wei Gao, Masaya Kanai, Tadashi Hoshino, Yuki Shimizu
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 67, 3, 493, 497, 公益社団法人精密工学会, 2001, [Peer-reviewed]
Scientific journal

多自由度の位置と姿勢の精密検出法の研究　　　　　　　　　　　　　　　
清野慧, 高偉, 金井雅也, 星野唯, 清水裕樹
精密工学会誌, 2001, [Peer-reviewed]
Japanese, Scientific journal

Optical metrology for precision engineering
Wei Gao, Yuki Shimizu, Optical Metrology for Precision Engineering, 1, 644, 22 Nov. 2021
Others

モード同期レーザーを用いた共焦点プローブ
佐藤遼, 清水裕樹, 仲村拓, 松隈啓, 高偉, 光アライアンス, 31, 2, 2020

中赤外線レーザの開発とレーザオートコリメーション法への適用
松隈啓, 阿隅結夢, 長岡将史, 清水裕樹, 高偉, 精密工学会大会学術講演会講演論文集, 2020, 2020

Feasibility study on an encoder system employing a micro thermal sensor head
清水裕樹, 高園翔太, 神田悠利, 松隈啓, 稲場肇, GAO Wei, 精密工学会大会学術講演会講演論文集, 2020, 2020

精密位置決め技術の最新動向と要素技術を活かした設計への展開 PART1 最新の位置決め技術 解説1 精密位置決めのための多軸センサ活用
清水裕樹, 松隈啓, 高偉, 機械設計, 64, 9, 2020

Feasibility study on an encoder system employing a micro thermal sensor head
清水裕樹, 高園翔太, 神田悠利, 松隈啓, 稲場肇, GAO Wei, 精密工学会大会学術講演会講演論文集, 2020, 2020

Optical sensors for multi-axis angle and displacement measurement using grating reflectors
Yuki Shimizu, Hiraku Matsukuma, Wei Gao, Sensors (Switzerland), 19, 23, 01 Dec. 2019
Book review

微細光学表面計測用プローブ顕微鏡技術
松隈啓, 清水裕樹, GAO Wei, 光技術コンタクト, 57, 8, 2019

高強度レーザパルスによる非線形効果を用いた角度計測法に関する研究 第2報:光線追跡による第2高調波の角度特性の解明
松隈啓, 間所周平, 清水裕樹, 高偉, 精密工学会大会学術講演会講演論文集, 2019, 2019

非直交型2軸ロイドミラー干渉計による2軸スケール回折格子パターニング-偏光制御ユニット改良によるパターン高精度化-
清水裕樹, 真野和樹, 松永雅教, 村上佑記, 松隈啓, GAO Wei, 精密工学会大会学術講演会講演論文集, 2019, 2019

高強度レーザパルスによる非線形効果を用いた角度計測法に関する研究
松隈啓, 間所周平, 清水裕樹, 高偉, 精密工学会大会学術講演会講演論文集, 2019, 2019

フェムト秒レーザ光源を用いた角度センサに関する研究-シングルモードファイバの適用-
清水裕樹, 高園翔太, 中村一貴, 松隈啓, GAO Wei, 精密工学会大会学術講演会講演論文集, 2019, 2019

光周波数コムを用いた角度センサの研究
中村一貴, 松隈啓, 清水裕樹, GAO Wei, 日本機械学会東北支部総会・講演会講演論文集(Web), 54th, 2019

2軸微細格子製作のための小型露光装置の開発
松永雅教, 真野和樹, 松隈啓, 清水裕樹, GAO Wei, 日本機械学会東北支部総会・講演会講演論文集(Web), 54th, 2019

精密測定のためのファイバ型光周波数コムの開発
神田悠利, 松隈啓, 清水裕樹, 稲場肇, GAO Wei, 日本機械学会東北支部総会・講演会講演論文集(Web), 54th, 2019

精密位置決めのためのセンサ活用 (特集 産業機械の高精度化と高速化を支える基盤技術 精密位置決め技術の最新動向と有効活用のポイント) -- (精密位置決めの最新技術とその適用)
清水 裕樹, 松隈 啓, 伊東 聡, 高 偉, 機械設計 = Machine design, 62, 9, 38, 43, Aug. 2018
日刊工業新聞社, Japanese

高精度走査プローブ顕微鏡技術
清水裕樹, 松隈啓, 高偉, 先端加工技術, 104, 4‐6, 2018
Japanese

ミリメートル級の長ストローク駆動におけるナノメートルレベル位置決めを実現する超精密3軸XYZマイクロステージの開発
清水裕樹, NSK-FAM研究助成・教育助成成果報告書, 28, 15, 2018
Japanese

精密位置決め技術の最新動向と有効活用のポイント PART1 精密位置決めの最新技術とその適用 解説4 精密位置決めのためのセンサ活用
清水裕樹, 松隈啓, 伊東聡, 高偉, 機械設計, 62, 9, 38‐43, 2018
Japanese

マイクロ熱検知センサを利用したエンコーダに関する研究
清水裕樹, 松野優紀, 石田彩華, 松隈啓, GAO Wei, 精密工学会大会学術講演会講演論文集, 2018, 2018

光周波数コムを用いた角度計測について
松隈啓, 清水裕樹, 高偉, 精密工学会大会学術講演会講演論文集, 2018, 2018

微空間での熱収支を利用した平滑面欠陥検出に関する研究-熱検知センサプローブの構築と基礎特性評価-
清水裕樹, 松野優紀, CHEN Yuan-Liu, 松隈啓, GAO Wei, 精密工学会大会学術講演会講演論文集, 2018, 2018

微空間での熱収支を利用した平滑面欠陥検出に関する研究-生成熱収支場による欠陥検出可能性の実験的検討-
清水裕樹, 松野優紀, CHEN Yuan-Liu, GAO Wei, 精密工学会大会学術講演会講演論文集, 2017, 2017

ダイヤモンド切削工具形状の超精密測定に関する研究 切削工具切れ刃稜丸み径測定手法の検討
清水裕樹, 中川翔太, CHEN Yuan-Liu, GAO Wei, 精密工学会大会学術講演会講演論文集, 2017, 2017

マイクロプローブのその場校正法を用いたマイクロスリット溝幅の精密測定
伊東聡, CHEN YuanLiu, 菊池浩貴, 小林遼, 清水裕樹, GAO Wei, 砥粒加工学会学術講演会講演論文集(CD-ROM), 2017, 2017

Special issue on intelligent measurement for advanced production engineering
Satoru Takahashi, Yuki Shimizu, Yasuhiro Mizutani, International Journal of Automation Technology, 11, 5, 681, 2017
Fuji Technology Press, English

精密位置決めにおける多軸センサの活用 (特集 高度化する精密位置決め技術の最新動向と設計への応用) -- (超精密位置決め技術の最新動向と設計のポイント)
伊東 聡, 清水 裕樹, 高 偉, 機械設計, 60, 11, 40, 45, Aug. 2016
日刊工業新聞社, Japanese

超精密形状計測加工システム : ダイヤモンド切削工具の機上ナノ計測 (特集 高精度加工と計測技術 : 計測・測定機器・システムの最適活用のポイント)
清水 裕樹, 陳 遠流, 張 城豪, 伊東 聡, 高 偉, 機械技術, 64, 7, 28, 31, Jun. 2016
日刊工業出版プロダクション ; 1953-, Japanese

高機能高速工具サーボによる3次元微細形状加工技術のイノベーション　　　　　　　　　　　　　　　
清水裕樹, 陳遠流, 盧泳辰, 伊東聡,高偉, 機械技術, 64, 4, 36, 40, Mar. 2016
Japanese, Introduction commerce magazine

切削加工の高速化と要素技術の最新動向をさぐる〔解説〕高速加工を実現する要素技術 高機能高速工具サーボによる3次元微細形状加工技術のイノベーション
清水裕樹, CHEN Yuan‐Liu, NOH Young‐Jin, 伊東聡, GAO Wei, 機械技術, 64, 4, 36‐40, 2016
Japanese

高精度加工と計測技術―計測・測定機器・システムの最適活用のポイント〔解説〕超精密形状計測加工システム―ダイヤモンド切削工具の機上ナノ計測―
清水裕樹, CHEN Yuan‐Liu, JANG SungHo, 伊東聡, GAO Wei, 機械技術, 64, 7, 28‐31, 2016
Japanese

高度化する精密位置決め技術の最新動向と設計への応用 PART1 超精密位置決め技術の最新動向と設計のポイント 解説5 精密位置決めにおける多軸センサの活用
伊東聡, 清水裕樹, 高偉, 機械設計, 60, 11, 40‐45, 2016
Japanese

微空間での熱収支を利用した平滑面欠陥検出に関する研究-非接触欠陥検出の原理検討-
清水裕樹, 松野優紀, 大場裕太, GAO Wei, 精密工学会大会学術講演会講演論文集, 2016, 2016

スロットダイコーターの精密計測に関する研究-第2報 マイクロプローブによる溝幅分布測定システムの構築-
菊地浩貴, 伊東聡, 陳遠流, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦, 精密工学会大会学術講演会講演論文集, 2016, 2016

スロットダイコーターの精密計測に関する研究-第3報 マイクロプローブ先端球のその場校正の不確かさ評価-
伊東聡, 菊地浩貴, 小林遼, CHEN Yuan-Liu, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦, 精密工学会大会学術講演会講演論文集, 2016, 2016

マイクロプローブを用いたスロットダイコーターの精密溝幅計測に関する研究
伊東聡, CHEN Yuanliu, 菊地浩貴, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦, 日本機械学会年次大会講演論文集(CD-ROM), 2016, 2016

XYZマイクロステージに関する研究-ステージ基礎特性の評価-
清水裕樹, 菅原拓馬, 安達圭祐, 伊東聡, GAO Wei, 丹羽英二, 佐々木祥弘, 日本機械学会年次大会講演論文集(CD-ROM), 2016, 2016

超精密形状計測加工システム―ダイヤモンド切削工具の機上ナノ計測―　　　　　　　　　　　　　　　
清水 裕樹, 陳 遠流, 張 城豪, 伊東 聡, 高 偉, 機械技術, 64, 7, 28, 31, 2016
Japanese, Introduction commerce magazine

精密位置決めにおける多軸センサの活用　　　　　　　　　　　　　　　
伊東 聡, 清水 裕樹, 高 偉, 機械設計, 60, 11, 40, 45, 2016
Japanese, Introduction commerce magazine

長ストロークステージ向けの精密姿勢角センサの開発
清水 裕樹, 石川 龍弥, 片岡 智史, 陳 遠流, 伊東 聡, 高 偉, 機械の研究, 68, 10, 827, 833, 2016
養賢堂, Japanese, Introduction research institution

知的なはかり方とは？ 精度を左右する計測アルゴリズム　　　　　　　　　　　　　　　
清水裕樹, 高偉, 日本機械学会誌, 118, 1164, 668, 671, Nov. 2015
Japanese, Introduction other

フォトニクスが拓く次世代ものづくり技術 精密測定機・加工機向け光学式エンコーダー技術
LI Xinghui, LI Xinghui, 清水裕樹, GAO Wei, 光学, 44, 9, 356, 362, 2015
Japanese

知的なはかり方とは?精度を左右する計測アルゴリズム
清水裕樹, 清水裕樹, GAO Wei, GAO Wei, 日本機械学会誌, 118, 1164, 668, 671, 2015
Japanese

What is "Intelligent Measurement"? : Measurement Algorithm Affecting its Accuracy
SHIMIZU Yuki, GAO Wei, Journal of the Society of Mechanical Engineers, 118, 1164, 668, 671, 2015
一般社団法人 日本機械学会, Japanese

光学式3軸角度センサの小型化に関する研究
丸山泰司, 清水裕樹, 伊東聡, GAO Wei, TAN Siew Leng, 精密工学会大会学術講演会講演論文集, 2015, 2015

長尺AFMプローブによるマイクロ光学素子の表面形状測定に関する研究
伊東聡, JIA Zhigang, LI Minglei, 清水裕樹, GAO Wei, 精密工学会大会学術講演会講演論文集, 2015, 2015

水平走査プローブによる小型円筒ワークの精密形状測定に関する研究
町田裕貴, 清水裕樹, 伊東聡, GAO Wei, 山崎宏, 柴本裕輔, 花岡浩毅, 精密工学会大会学術講演会講演論文集, 2015, 2015

超高感度角度センサに関する研究
丸山泰司, 清水裕樹, 伊東聡, GAO Wei, 精密工学会大会学術講演会講演論文集, 2015, 2015

3ビームロイドミラー干渉計による2軸回折格子加工に関する研究
相原涼, LI Xinghui, CAI Yindi, 伊東聡, 清水裕樹, GAO Wei, 精密工学会大会学術講演会講演論文集, 2015, 2015

光周波数コムを用いた角度スケールコムに関する研究
清水裕樹, 玉田純, 工藤幸利, CHEN Yuan-Liu, 伊東聡, GAO Wei, 精密工学会大会学術講演会講演論文集, 2015, 2015

液面基準3軸姿勢角センサに関する研究
伊東聡, 石川龍弥, 片岡智史, CHEN Yuan-Liu, 清水裕樹, GAO Wei, 精密工学会大会学術講演会講演論文集, 2015, 2015

ダイヤモンド切削工具切れ刃の光学式形状測定に関する研究-切削工具切れ刃輪郭形状の測定-
中川翔太, JANG SungHo, 清水裕樹, 伊東聡, GAO Wei, 精密工学会大会学術講演会講演論文集, 2015, 2015

2次元格子とフィゾー干渉計の一括自律校正に関する研究-自律校正法の提案-
大野敦子, KIM WooJae, CAI Yindi, CHEN Yuan-Liu, 清水裕樹, 伊東聡, GAO Wei, 精密工学会大会学術講演会講演論文集, 2015, 2015

高精度セラミックス部品の加工機上形状測定に関する研究
小林遼, 清水裕樹, 伊東聡, GAO Wei, 足立茂, 大宮恭平, 佐藤友樹, 精密工学会大会学術講演会講演論文集, 2015, 2015

微空間での熱収支を利用した平滑面欠陥検出に関する研究-10nm級サイズ欠陥との接触検知シミュレーション実験-
松野優紀, 大場裕太, 清水裕樹, GAO Wei, 精密工学会大会学術講演会講演論文集, 2015, 2015

XYZマイクロステージに関する研究-ステージの設計と製作-
菅原拓馬, 清水裕樹, 伊東聡, GAO Wei, 丹羽英二, 佐々木祥弘, 精密工学会大会学術講演会講演論文集, 2015, 2015

ステージロール運動誤差計測用高分解能クリノメータに関する研究
片岡智史, 石川龍弥, CHEN Yuan-Liu, 清水裕樹, 伊東聡, GAO Wei, 精密工学会大会学術講演会講演論文集, 2015, 2015

平面ステージ精密制御用多自由度光センサに関する研究
古田雅也, LI Xinghui, CAI Yindi, 清水裕樹, 伊東聡, GAO Wei, 精密工学会大会学術講演会講演論文集, 2015, 2015

ロール金型の加工機上測定に関する研究
清水裕樹, NIU ZengYuan, 松浦大貴, 小林遼, 伊東聡, GAO Wei, 日本機械学会年次大会講演論文集(CD-ROM), 2015, 2015

低測定力変位プローブによる工具刃先形状測定に関する研究
伊東聡, 関根匠, 清水裕樹, GAO Wei, 高橋和彦, 荒川訓明, 山本泰河, 久保田晃史, 日本機械学会年次大会講演論文集(CD-ROM), 2015, 2015

光学式超精密多軸位置決めセンサ　　　　　　　　　　　　　　　
高偉, 清水裕樹, 伊東聡, 陳遠流, 自動化推進, 44, 4, 2, 5, 2015
Japanese, Introduction scientific journal

精密測定器・加工機向け光学式エンコーダー技術　　　　　　　　　　　　　　　
李 星輝, 清水 裕樹, 高 偉, 光学, 44, 9, 2015
Japanese, Introduction scientific journal

Postscript to the Special Issue on the Front Line of Railway Technology
SHIMIZU Yuki, Journal of the Japan Society of Mechanical Engineers, 117, 1152, 752, 752, 05 Nov. 2014
The Japan Society of Mechanical Engineers, Japanese

精密位置決めのための角度センサ活用 (特集 高精度・高スループットを実現する精密位置決め機構設計) -- (高速・高精度の位置決め設計の勘どころ)
清水 裕樹, 伊東 聡, 高 偉, 機械設計, 58, 8, 46, 52, Aug. 2014
日刊工業新聞社, Japanese

174 Compensation of frequency drifts in a scanning electrostatic force microscope for surface profile measurement
JIA Zhigang, HOSOBUCHI Keiichiro, ITO So, SHIMIZU Yuki, GAO Wei, 講演論文集, 2014, 49, 145, 146, 2014
The Japan Society of Mechanical Engineers, English

微細形状測定のための非接触静電気力顕微鏡に関する研究-形状測定の高速・高精度化のための走査方式の検討-
細渕啓一郎, JIA Zhigang, 伊東聡, 清水裕樹, GAO Wei, 精密工学会大会学術講演会講演論文集, 2014, 2014

超高感度角度センサに関する研究-測定レーザビーム径拡大に伴うレンズ収差の影響-
村田大, 清水裕樹, 伊東聡, GAO Wei, 精密工学会大会学術講演会講演論文集, 2014, 2014

ダイヤモンド切削工具切れ刃の光学式形状測定に関する研究
清水裕樹, JANG SungHo, GAO Wei, 精密工学会大会学術講演会講演論文集, 2014, 2014

マルチプローブ型サーフェスエンコーダに関する研究-6自由度計測手法の開発-
伊藤武志, LI Xinghui, 清水裕樹, 伊東聡, GAO Wei, 精密工学会大会学術講演会講演論文集, 2014, 2014

精密ステージ位置検出用モザイク格子サーフェスエンコーダに関する研究
清水裕樹, 伊藤武志, LI Xinghui, KIM WooJae, GAO Wei, 砥粒加工学会学術講演会講演論文集(CD-ROM), 2014, 2014

接触型マイクロ熱検知センサによるナノ平滑面微欠陥検出に関する研究-素子プロファイル改善と接触検知感度の検討-
清水裕樹, 大場裕太, GAO Wei, 精密工学会大会学術講演会講演論文集, 2014, 2014

2軸ロイドミラー干渉計によるスケール格子の製作に関する研究
LI Xinghui, 清水裕樹, 伊東聡, GAO Wei, 日本機械学会東北支部総会・講演会講演論文集(CD-ROM), 49th, 2014

光学システムを用いたダイヤモンド切削工具切れ刃輪郭形状の3次元測定に関する研究
JANG SungHo, 清水裕樹, GAO Wei, 日本機械学会東北支部総会・講演会講演論文集(CD-ROM), 49th, 2014

精密位置決めのための角度センサ活用
清水 裕樹, 伊東 聡, 高 偉, 機械設計, 58, 8, 46, 52, 2014
日刊工業新聞社, Japanese, Introduction commerce magazine

C017 Design and Testing of a Four-Probe Sensor Head For a Mosaic Grating Surface Encoder
Ito Takeshi, Shimizu Yuki, Kim WooJae, Hosono Koji, Ito So, Gao Wei, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 381, 384, 06 Nov. 2013
A surface encoder, which can measure the XYZ-directional displacements, has been developed. The XY-directional measurement range depends on the size of the XY-axis scale grating. A mosaic XY-axis scale grating, which consists of multiple XY-axis grating, has been proposed to expand the XY-directional measurement range of the three-axis surface encoder. And multi-probe surface encoder, which has two-probe, for the mosaic scale grating has been proposed. In this paper, an optical sensor head, which has four-probe for the mosaic XY-axis scale grating, was developed and basic experiment was carried out to confirm the feasibility of the proposed method., The Japan Society of Mechanical Engineers, English

C016 An ultra-sensitive angle sensor based on laser autocollimation for stage motion measurement
MURATA Dai, TAN Siew-Leng, SHIMIZU Yuki, ITO So, GAO Wei, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 377, 380, 06 Nov. 2013
This paper proposes a method of improving the sensitivity of the angle sensor for angular motion errors of precision linear stages. The sensitivity of the angle sensor based on laser autocollimation depends on the diameter of the incident beam on the objective lens. The relationship between the sensitivity of the sensor and the beam diameter is investigated by expanding the diameter and using a single-cell photodiode as the position-sensing detector corresponding to a small light spot. From the experimental result, the sensitivity is improved by expanding the diameter and the sensor can detect angular motion of about 0.001"., The Japan Society of Mechanical Engineers, English

D031 Self-Evaluation of Tool Edge Contour of a Single Point Diamond Tool on a Force-Controlled Fast Tool Servo
CHEN Yuan-Liu, SHIMIZU Yuki, ITO So, GAO Wei, JU Bing-Feng, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 590, 593, 06 Nov. 2013
A method is proposed for self-evaluation of edge contours of single point diamond tools on a force-controlled fast tool servo equipped on a precision lathe. A sharp point referred as reference point is generated by using the diamond tool to cut two round-shaped grooves with overlapping boundary. The diamond tool is then scanned by the reference point through servo control of the contact force, in which the edge contour is obtained by reversing the scanning trace of the tool. Experiments of evaluations of tool edge contour and out-of-roundness are carried out to demonstrate the feasibility of the proposed method., The Japan Society of Mechanical Engineers, English

C020 Precision Positioning of a Long-stroke Scanning Electrostatic Force Probe for Profile Measurement of Large Amplitude Micro-structured Surface
JIA Zhigang, HE Gaofa, GOTO Shigeaki, HOSOBUCHI Keiichiro, ITO So, SHIMIZU Yuki, GAO Wei, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 397, 402, 06 Nov. 2013
A long-stroke scanning electrostatic force probe (SEFP) is presented in this paper. The long range electrostatic force keeps large probe-to-sample distance when SEFP scans the profile. The probe is driven by an ultra-high precision Z scanner, which has a long effective measurement range of 50 μm with non-linearity error less than 10 nm as well as least significant bit resolution of 0.5 nm. The profile of a prism sheet with large amplitude of 25 μm is measured by the SEFP. The experiment result is analyzed and the effectiveness of the proposed SEFP for profile measurement of large amplitude micro-structured surface is demonstrated., The Japan Society of Mechanical Engineers, English

C021 Development of Cr-N strain-gauge-type displacement sensor for positioning of micro-XY stage
Peng Yuxin, Azuma Toyohiro, Niwa Eiji, Kaneko Junji, Shimizu Yuki, Ito So, Gao Wei, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 403, 406, 06 Nov. 2013
A strain-gauge-type precision displacement sensor, which is developed for positioning of a micro-XY stage, is described in this paper. The designed patterns of Cr-N strain gauges are directly sputtered on zirconia plates, which would be used as leaf springs in the micro-XY stage, by using photolithography processes to form a Wheatstone bridge circuit. The patterns of the strain gauges on the leaf spring are optimized to be sensitive area so that the displacement of the stage can be measured with a higher sensitivity. The experimental results confirmed that the designed sensor is applicable for sub-micrometre-scale positioning of the micro-XY stage., The Japan Society of Mechanical Engineers, English

D030 A micro optical probe for evaluation of tool edge geometry
JANG SungHo, SHIMIZU Yuki, ITO So, GAO Wei, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 586, 589, 06 Nov. 2013
This paper proposes a non-contact and on-machine measurement method for evaluating tool edge geometry. A focused laser beam having a diameter of several micrometres traces over the tool edge, while the both of signals are monitored. By utilizing a light intensity of the laser beam passed around the tool, the perpendicular distance between the optical axis and the tool edge is obtained. Measurements have been carried out with a scanning speed of 16.7 μm/s on the ultra-precision machine lathe. The measurement resolution of 30 nm of the method can be developed to greater than the diffraction limit., The Japan Society of Mechanical Engineers, English

C019 Investigation and reduction of crosstalk errors in a six-degree-of-freedom surface encoder for a planar motion stage
Li Xinghui, Ito So, Muto Hiroshi, Shimizu Yuki, Gao Wei, Dian Songyi, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 391, 396, 06 Nov. 2013
A six-degree-of-freedom (six-DOF) optical sensor has been developed for the precision positioning of a surface motor stage. The sensor consists of a two-dimensional (2D) planar grating and a reading head. This sensor has been designed in such a way that three-axis translational motions and three-axis angular rotations of the stage can be measured simultaneously through sharing a same laser source and a same measurement point on the scale grating. To improve the accuracies of the multi-DOF (MDOF) measurement system, crosstalk errors were investigated and described, and the methods to reduce the errors were proposed in this paper., The Japan Society of Mechanical Engineers, English

B012 Design of fabrication process of thermal contact sensor for surface defect inspections
OHBA Yuta, SHIMIZU Yuki, LU Wenjian, GAO Wei, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 204, 207, 06 Nov. 2013
A fabrication process of a thermal element, which would be used as a contact sensor in the concept of defect detection on smooth surfaces, has been designed. The thermal element, which consists of thin-film resistance, would be used to capture small amount of frictional heat generated at the contact with nanometer-order defects. Therefore, feasibility of the designed process has been verified by developing a first prototype of the thermal element, while considering its thermal sensitivity. Experimental results revealed that the fabricated thermal element is functional for detecting small amount of heat on the order of several-ten microwatts., The Japan Society of Mechanical Engineers, English

B003 Design of a stylus displacement sensor with a low measuring force
SEKINE Sho, OSAWA Shinichi, SHIMIZU Yuki, ITO So, GAO Wei, KUBOTA Kouji, KATO Akira, ARAKAWA Kuniaki, YASUTAKE Mutsumi, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 165, 168, 06 Nov. 2013
This paper presents a new measurement system for on-machine form measurement of surface edges. The system is composed of a laser displacement sensor and a cantilever, on which a mechanical stylus probe would be mounted. The displacement of the cantilever probe is measured by a laser displacement sensor. Tip radius of the stylus probe is smaller than the diameter of the laser spot and the cantilever is fabricated with a material with a low spring constant. The proposed system satisfies both the large measurement range and low measurement force, while it can be applied to on-machine measurements., The Japan Society of Mechanical Engineers, English

B011 Experiment of Polarization Forces in Scanning Electrostatic Force Microscopy for Measuring Surface Profile of Dielectric
HE Gaofa, JIA Zhigang, ITO So, SHIMIZU Yuki, GAO Wei, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 200, 203, 06 Nov. 2013
For measuring the surface profile of many micro-optical components with complicated shapes, which are made of non-conductive material, the electrostatic force microscopy (EFM) was recommended. The relationship between the polarization force and the tip-to-sample distance was analyzed based on dielectric polarization theory. The prototype of the scanning electrostatic force microscopy was built. The force curves of different samples with different materials and surface shapes were detected by the EFM prototype. Both theoretical analysis and the experimental results demonstrated that the EFM system can be used to measure the surface profile of non-conductor., The Japan Society of Mechanical Engineers, English

B010 Measurement of contact potential difference and material distribution by using an SEFM
HOSOBUCHI Keiichiro, JIA Zhigang, ITO So, SHIMIZU Yuki, GAO Wei, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 197, 199, 06 Nov. 2013
This paper presents a novel method for the measurement of the contact potential difference (CPD) and material distribution over the sample surface using scanning electrostatic force microscope (SEFM). Since the intensity of electrostatic force generated between the probe and the sample surface is relied on the differences of the CPD, the CPD can be calculated by using the frequency shifts of the probe oscillation when two different bias voltages are applied between tip and the sample. The detection sensitivity corresponding to the experimental conditions has been confirmed by simulation. In addition, the basic characteristic of the CPD measurement system has been evaluated., The Japan Society of Mechanical Engineers, English

B001 On-machine form measurement system of high precision ceramics parts by using a laser displacement sensor
Matsuura Daiki, Ito So, Meguro Takayuki, Shimizu Yuki, Gao Wei, Adachi Shigeru, Omiya Kyohei, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 153, 158, 06 Nov. 2013
This research describes an on-machine form measurement system of high precision ceramics parts. This system consists of a grinding machine and a laser displacement sensor. By using two horizontal axes of the grinding machine with sub-micrometric motion accuracy and the high precision laser displacement sensor which is mounted on the grinding machine, three-dimensional continuous form measurement with sub-micrometric accuracy can be realized in non-contact condition. In order to evaluate the stability and motion accuracy which influence the measurement accuracy of the system, the experiments to estimate stability and motion accuracy were conducted. And the form measurements were conducted., The Japan Society of Mechanical Engineers, English

B004 Investigation of a femtosecond laser for measurement of angular displacement
kudo Yukitoshi, Tan Siew-Leng, Shimizu Yuki, Ito So, Gao Wei, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2013, 7, 169, 172, 06 Nov. 2013
This paper describes a laser angle sensor with a femtosecond laser based on the laser autocollimation method. Instead of a semiconductor laser in the conventional laser autocollimation sensor, a femtosecond mode-locked laser is employed as the light source. The collimated beam from the femtosecond laser is projected on a target reflector. The reflected beam is received by an autocollimation unit, which is optimized for femtosecond mode-locked laser. Since the carrier frequency of the femtosecond laser is stabilized by an external rubidium frequency standard, the sensor sensitivity can be improved. The prototype sensor has been designed and fabricated, and the results of the evaluation experiments are presented., The Japan Society of Mechanical Engineers, English

In-process micro/nano measurement for micro cutting
Wei Gao, Kang Won Lee, Young Jin Noh, Yoshikazu Arai, Yuki Shimizu, Micro-Cutting: Fundamentals and Applications, 315, 344, 09 Aug. 2013
wiley, English

3次元微細加工用高速高機能工具サーボ制御装置の開発　　　　　　　　　　　　　　　
伊東聡, 陳遠流, 盧 泳辰, 清水 裕樹, 高 偉, 3次元微細加工用高速高機能工具サーボ制御装置の開発, 58, 7, 35, 43, Jul. 2013
ケミカルエンジニヤリング, Japanese, Introduction scientific journal

161 Fabrication of thin-film thermal contact sensor for detection of surface defects
LU Wenjian, OHBA Yuta, SHIMIZU Yuki, GAO Wei, 講演論文集, 2013, 48, 124, 125, 15 Mar. 2013
The Japan Society of Mechanical Engineers, English

ものづくりライセンス技術の実用化 3次元微細加工用高速高機能工具サーボ制御装置の開発
伊東聡, CHEN Yuanliu, NOH Young‐Jin, 清水裕樹, GAO Wei, ケミカルエンジニヤリング, 58, 7, 515, 523, 2013
Japanese

超高感度角度センサに関する研究
村田大, 清水裕樹, 伊東聡, GAO Wei, 精密工学会大会学術講演会講演論文集, 2013, 2013

接触型マイクロ熱検知センサによるナノ平滑面微欠陥検出に関する研究-試作素子による熱検知感度の実験的検討-
清水裕樹, 大場裕太, LU Wenjian, GAO Wei, 精密工学会大会学術講演会講演論文集, 2013, 2013

高精度セラミックス部品の形状測定に関する研究
目黒孝幸, 松浦大貴, 清水裕樹, 伊東聡, GAO Wei, 足立茂, 大宮恭平, 日本機械学会東北支部総会・講演会講演論文集, 48th, 2013

極低測定力触針式変位センサの開発-センサの設計と性能評価-
大澤慎一, 関根匠, 伊東聡, 清水裕樹, GAO Wei, 久保田晃史, 加藤明, 荒川訓明, 安竹睦実, 日本機械学会東北支部総会・講演会講演論文集, 48th, 2013

三次元微細形状測定のための静電気力顕微鏡に関する研究
細渕啓一郎, JIA Zhigang, 伊東聡, 清水裕樹, HE Gaofa, GAO Wei, 日本機械学会東北支部総会・講演会講演論文集, 48th, 2013

D14 On-machine surface form evaluation of a large-scale roll workpiece
Lee Jung Chul, Shimizu Yuki, Ito So, Gao Wei, Chun Hong Park, Jooho Hwang, Jeoung Seok Oh, The ... Manufacturing & Machine Tool Conference, 2012, 9, 215, 216, 27 Oct. 2012
This paper presents the on-machine surface form evaluation of a large-scale roll workpiece on a drum roll lathe. In this research, the surface form of a large-scale roll workpiece, which is composed of the out-of-straightness, the out-of-roundness and the differences of the diameter along the axial direction of a large-scale roll workpiece, is measured by using two capacitive type displacement probes placed on the two sides of a large-scale roll workpiece, The Japan Society of Mechanical Engineers, English

D17 Experimental study of thermal contact sensor for the detection of surface defects
LU Wenjian, SHIMIZU Yuki, OHBA Yuta, GAO Wei, The ... Manufacturing & Machine Tool Conference, 2012, 9, 221, 222, 27 Oct. 2012
Experimental study on a thermal contact sensor for the detection of defects on smooth surfaces is described. As a prototype of the thermal contact sensor, a several-ten-micrometer-sized thin-film element was fabricated by photolithography processes. By using the fabricated element, both laser exposure tests and friction tests were carried out to investigate the feasibility of the element on detecting small amount of frictional heats. Three types of sensors with the element of different sizes are employed to compare the temperature rises due to the heating. Results of theoretical calculations are also compared with the experimental results to confirm the feasibility of the contact sensor., The Japan Society of Mechanical Engineers, Japanese

大型加工物の高精度化を保証するインプロセス/オンマシン計測技術の最新動向 (特集 工作機械の高精度化を保証するインプロセス/オンマシン計測技術の最新動向)
清水 裕樹, 高 偉, 伊東 聡, 機械技術, 60, 7, 30, 37, Jul. 2012
日刊工業出版プロダクション, Japanese

193 Fast calibration of XY gratings
Kim WooJae, Shimizu Yuki, Ito So, Gao Wei, 講演論文集, 2012, 47, 192, 193, 13 Mar. 2012
The Japan Society of Mechanical Engineers, Japanese

194 Analysis and measurement of the behavior of a rotating cylinder
LEE JungChul, SHIMIZU Yuki, ITO So, GAO Wei, HWANG Jooho, OH JeongSeok, PARK ChunHong, 講演論文集, 2012, 47, 194, 195, 13 Mar. 2012
The Japan Society of Mechanical Engineers, English

196 Investigation of the dynamics of a high-precision air-bearing displacement sensor
Lee Kang-Won, Ito So, Shimizu Yuki, Gao Wei, 講演論文集, 2012, 47, 198, 199, 13 Mar. 2012
The Japan Society of Mechanical Engineers, English

195 Design and experimental validation of an XY micro-stage
Peng Yuxin, Shimizu Yuki, Ito So, Gao Wei, 講演論文集, 2012, 47, 196, 197, 13 Mar. 2012
The Japan Society of Mechanical Engineers, English

197 Compensation of eccentric error in gear metrology
XU Bin, TAKEISHI Toshiki, ITO So, SHIMIZU Yuki, GAO Wei, YAMAZAKI Hiroshi, NAKAZAWA Yoshiji, 講演論文集, 2012, 47, 200, 201, 13 Mar. 2012
The Japan Society of Mechanical Engineers, English

198 Laser interference lithography of gratings for a surface encoder
Li Xinghui, Zeng Lijiang, Shimizu Yuki, Ito So, Gao Wei, 講演論文集, 2012, 47, 202, 203, 13 Mar. 2012
The Japan Society of Mechanical Engineers, English

工作機械の高精度化を保証するインプロセス/オンマシン計測技術の最新動向 大型加工物の高精度化を保証するインプロセス/オンマシン計測技術の最新動向
清水裕樹, GAO Wei, 伊東聡, 機械技術, 60, 7, 30, 33, 2012
Japanese

モザイク格子サーフェスエンコーダに関する研究-マルチプローブセンサヘッドの開発-
細野幸治, KIM Woojae, 清水裕樹, 伊東聡, GAO Wei, 精密工学会大会学術講演会講演論文集, 2012, 2012

ウエハ表面のナノレベル欠陥検出向け接触型マイクロ熱検知センサの原理検討
清水裕樹, LU Wenjian, 東豊大, GAO Wei, 精密工学会大会学術講演会講演論文集, 2012, 2012

微細形状測定のための非接触静電気力走査型プローブ顕微鏡に関する研究
後藤成晶, 細渕啓一郎, 伊東聡, 清水裕樹, GAO Wei, 精密工学会大会学術講演会講演論文集, 2012, 2012

衛星用大型ミラーの加工機上高精度形状測定に関する研究-補正加工の実施と不確かさの評価-
武藤啓志, 後藤成晶, 細野幸治, 清水裕樹, GAO Wei, 足立茂, 大宮恭平, 佐藤広規, 久田哲弥, 齋藤佳史, 久保田浩明, 精密工学会大会学術講演会講演論文集, 2012, 2012

歯車形状測定の高精度化に関する研究-歯車と変位センサの設置誤差補正-
武石俊希, BIN Xu, 伊東聡, 清水裕樹, GAO Wei, 山崎宏, 中沢芳司, 精密工学会大会学術講演会講演論文集, 2012, 2012

ヘッド組み込み型熱検知センサを用いた磁気ディスク表面のナノ微小欠陥検出技術
清水裕樹, XU Junguo, 小平英一, 日本トライボロジー学会トライボロジー会議予稿集, 2012-5, 2012

マイクロステージ用変位センサに関する研究
東豊大, 丹羽英二, PENG Yuxin, 金子純史, 清水裕樹, 伊東聡, GAO Wei, 日本機械学会東北支部総会・講演会講演論文集, 47th, 2012

ダイヤモンド切削工具切れ刃輪郭形状測定のための光学式センサに関する研究
JANG SungHo, 清水裕樹, 伊東聡, GAO Wei, 日本機械学会東北支部総会・講演会講演論文集, 47th, 2012

大型加工物の高精度化を保証するインプロセス/オンマシン計測技術の最新動向　　　　　　　　　　　　　　　
清水裕樹, 高偉,伊東聡, 機械技術, 60, 7, 30, 33, 2012
Japanese, Introduction commerce magazine

衛星用大型ミラーの加工機上高精度形状測定に関する研究-形状測定システムの構築とアライメント手法の開発-
後藤成晶, LEE Jung Chul, 清水裕樹, GAO Wei, 足立茂, 大宮恭平, 佐藤広規, 久田哲弥, 齋藤佳史, 久保田浩明, 精密工学会大会学術講演会講演論文集, 2011, 2011

サーフェスエンコーダによる5自由度位置・姿勢の同時計測
清水裕樹, 高偉, 清野慧, 精密工学会大会学術講演会講演論文集, 2002, 2002

角度情報をベースとする多自由度位置・姿勢検出法の研究 マルチスポット光源の採用による位置検出精度向上
清野慧, 清水裕樹, 星野唯, 高偉, 精密工学会大会学術講演会講演論文集, 2000, 2000

Measurement and Instrumentation　　　　　　　　　　　　　　　
高偉, 清水裕樹, 羽根一博, 祖山均, 足立幸志, 第3章，第11章，第12章
朝倉書店, 25 Mar. 2017, Japanese, Textbook, [Joint work]

Micro-Cutting: Fundamentals and Applications　　　　　　　　　　　　　　　
Wei Gao, Kang Won Lee, Young-Jin Noh, Yoshikazu Arai, Yuki Shimizu, Chapter 11: In-Process Micro/Nano Measurement for Micro Cutting
Wiley, 2013, English, Scholarly book, [Joint work]

Nanofabrication　　　　　　　　　　　　　　　
Yuki Shimizu, Takemi Asai, Wei Gao, Chapter X
INTECH, 12 Oct. 2011, 9789533079127, English, Scholarly book, [Joint work]

Multi-degree-of-freedom Optical Sensors for Precision Positioning　　　　　　　　　　　　　　　
Yuki Shimizu
Optica Design and Fabrication Congress 2025, 18 Jun. 2025, English, Invited oral presentation
[Invited]

Calibration of diffraction scale gratings for precision positioning　　　　　　　　　　　　　　　
Yuki Shimizu
The 16th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2025), 27 May 2025, English, Keynote oral presentation
[Invited]

Fabrication, Calibration and Utilization of Diffraction Scale gratings forState-of-the-art Manufacturing Technology　　　　　　　　　　　　　　　
Yuki Shimizu
International Conference on Materials Processing Technology 2025, 07 Mar. 2025, English, Invited oral presentation
[Invited]

Calibration of diffraction scale gratings with a high-precision angle measurement technology　　　　　　　　　　　　　　　
Yuki Shimizu
The 9th International Conference on Nanomanufacturing (nanoMan2024), 03 Dec. 2024, English, Keynote oral presentation
01 Dec. 2024 - 03 Dec. 2024, [Invited]

Calibration of Diffraction Scale Grating for Precision Positioning Technology　　　　　　　　　　　　　　　
Yuki Shimizu
The 10th East Asia Mechanical and Aerospace Engineering Workshop (EAMAE2024), 22 Nov. 2024, English, Invited oral presentation
21 Nov. 2024 - 23 Nov. 2024, [Invited]

Laser interference lithography with a spatial light modulator for more flexible micropattern fabrication　　　　　　　　　　　　　　　
Yuki Shimizu
The 3rd International High-level Forum on High-end Measurement Instruments & The 13th International Symposium on Precision Engineering Measurements and Instrumentation (IFMI & ISPEMI 2024), 10 Aug. 2024, English, Keynote oral presentation
10 Aug. 2024 - 10 Aug. 2024, [Invited]

Calibration of a reflective-type diffraction scale grating based on the angle of diffraction of diffracted beams for precision positioning technology　　　　　　　　　　　　　　　
Yuki Shimizu
16th Pacific Rim Conference on Lasers and Electro-Optics (CLEO-PR 2024), 07 Aug. 2024, English, Invited oral presentation
04 Aug. 2024 - 09 Aug. 2024, [Invited]

Precise evaluation of a scale grating for precision metrology　　　　　　　　　　　　　　　
Yuki Shimizu
International Conference on Precision Engineering and Sustainable Manufacturing (PRESM2023), 20 Jul. 2023, English, Keynote oral presentation
16 Jul. 2023 - 21 Jul. 2023, [Invited]

High-precision optical angle sensor and its applications to dimensional metrology　　　　　　　　　　　　　　　
Yuki Shimizu
Optica Design and Fabrication Congress, 07 Jun. 2023, English, Invited oral presentation
04 Jun. 2023 - 08 Jun. 2023, [Invited]

Development of a multi-beam femtosecond laser autocollimator for surface profile measurement　　　　　　　　　　　　　　　
Yuki Shimizu
The 8th International Conference on Nanomanufacturing & 4th AET Symposium on ACSM and Digital Manufacturing (nanoMan2022 & AETS2022), 30 Aug. 2022, English, Keynote oral presentation
30 Aug. 2022 - 01 Oct. 2022, [Invited]

Evaluation of the pitch deviation of a diffraction scale grating with optical angle sensors　　　　　　　　　　　　　　　
Yuki Shimizu
The second International High-level Forum on High-end Measurement Instruments & 12th International Symposium on Precision Engineering Measurements and Instrumentation, 10 Aug. 2022, English, Keynote oral presentation
08 Aug. 2022 - 10 Aug. 2022, [Invited]

光周波数コムを用いた 新しい角度計測技術　　　　　　　　　　　　　　　
清水 裕樹
公益財団法人精密工学会 超精密位置決め専門委員会 4月度定例会, 16 Apr. 2021, Japanese, Public discourse
16 Apr. 2021 - 16 Apr. 2021, [Invited]

Optical Angle Measurement with a Mode-Locked Femtosecond Laser　　　　　　　　　　　　　　　
Yuki Shimizu
International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM 2020), 15 Nov. 2020, English, Invited oral presentation
15 Nov. 2020 - 18 Nov. 2020, [Invited]

Optical Metrology with a Mode-Locked Femtosecond Laser and Grating Reflectors　　　　　　　　　　　　　　　
Yuki Shimizu
The first International High-level Forum on High-end Measurement Instruments & 11th International Symposium on Precision Engineering Measurements and Instrumentation, 15 Nov. 2020, English, Keynote oral presentation
15 Nov. 2020 - 18 Nov. 2020, [Invited]

精密エンコーダによる多軸精密計測　　　　　　　　　　　　　　　
清水 裕樹
一般社団法人電気学会 精密サーボシステムに関する調査専門委員会, 26 Sep. 2018, Japanese, Invited oral presentation
[Invited], [Domestic Conference]

光周波数コムを用いた角度計測について
松隈啓, 清水裕樹, 高偉
精密工学会大会学術講演会講演論文集, 05 Sep. 2018, Japanese

マイクロ熱検知センサを利用したエンコーダに関する研究
清水裕樹, 松野優紀, 石田彩華, 松隈啓, GAO Wei
精密工学会大会学術講演会講演論文集, 20 Aug. 2018, Japanese

Development of a prototype micro thermal sensor probe for non-destructive surface defect detection　　　　　　　　　　　　　　　
Yuki Shimizu, Yuki Matsuno, Hiraku Matsukuma, Wei Gao
6th International Conference on Nanomanufacturing (nanoMan2018), 04 Jul. 2018, English, Oral presentation
[International presentation]

Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage　　　　　　　　　　　　　　　
Yuki Shimizu, Masaya Furuta, Yuan-Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao
The 15th CIRP Conference on Computer Aided Tolerancing (CIRP CAT 2018), 11 Jun. 2018, English, Oral presentation
[International presentation]

微空間での熱収支を利用した平滑面欠陥検出に関する研究―熱検知センサプローブの構築と基礎特性評価―
清水裕樹, 松野優紀, CHEN Yuan‐Liu, 松隈啓, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Mar. 2018, Japanese

Evaluation of grating periods by using pulsed laser source
Kentaro Uehara, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
In this paper, a measurement method with a mode-locked laser source for evaluation of grating periods, which is based on the laser diffraction method with the Littrow configuration, is proposed. Optical frequencies of the mode-locked laser, which are referred to as the optical frequency comb, have deterministic mode frequencies with equal intervals in the frequency domain. Since the frequency of each comb mode can be highly stabilized by a high precision external standard, measurement accuracy of the laser diffraction method is expected to be improved. In this study, a prototype optical setup based on the proposed method is developed, and some experiments are carried out to verify the feasibility of the proposed method.

Design and verification of an XYZ three-axis micro stage
Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Yuan Liu Chen, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.

Polarization ray-tracing model for orthogonal two-axis Lloyd's mirror interference lithography
Xiuguo Chen, Zongwei Ren, Yuanliu Chen, Yuki Shimizu, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
In this work, we establish a three-dimensional (3D) polarization ray-tracing model to trace the evolution of polarization states of incident beams through the corner-cube-like interferometer unit of an orthogonal two-axis Lloyd's mirror interferometer. Compared with the conventional two-dimensional Jones matrix formalism, the 3D polarization ray-tracing model that represents polarization as a three-element electric field vector in the global coordinate system provides an easier approach to trace the polarization evolution. The comparison between the simulated and experimental interference fringes obtained under different combinations of initial polarization states of incident beams verify the feasibility of the established model.

Surface form measurement of a small roll workpiece
Toshiki Saito, Yuki Machida, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
This paper proposes a new surface form measurement method using a scanning type surface profiler for small roll worlpieces, which are used in many industrial fields. In this method, inclination of a workpiece is required to be aligned precisely. For this reason, this paper also proposes a method of measuring the inclination angle of the workpiece without using any other external sensors but using a scanning probe of the surface profiler. In order to confirm the effectiveness of the proposed principles, a measurement system is developed and some experiments are carried out.

Evaluation of relative vertical error motions of a bench center by using an optical micrometer
Zengyuan Niu, Yuan Liu Chen, Yuki Shimizu, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
This paper presents a method for the measurement of relative vertical error motions with respect to vertical misalignment error of a bench center by using an optical micrometer. A roll is used as a reference object and the optical micrometer are employed as a measurement device. In order to achieve an accurate evaluation, a measurement method is proposed to remove the straightness error and the concentricity error of the roll. Through experiment, the relative vertical parallelism error motion with respect to the misalignment error was evaluated to be 1.44 um and the vertical straightness error was evaluated to be 14.01 um.

Ultra-precision angle sensor with a mode-locked laser source
Shuhei Madokoro, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
This paper presents a new optical angle sensor, in which a mode-locked laser referred to as an optical frequency comb is employed as the light source. Highly-stable carrier frequency of the optical frequency comb is expected to improve the sensor stability. This angle sensor is designed based on laser autocollimation method, and utilizes the chromatic dispersion of an objective lens to detect angular displacement of a measurement target. A detail of the proposed method is described, followed by some experimental results with the developed prototype optical sensor.

A confocal microscope with a mode-locked laser source
Yuki Shimizu, Taku Nakamura, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
An optical configuration for a confocal microscope employing a mode-locked laser source is proposed in this paper. Due to high illumination efficiency and a highly stable optical frequency of the mode-locked laser, which is traceable with the national standard of frequency and time, the proposed chromatic confocal microscope is expected to achieve a high axial resolution. In this paper, as a first step of research, design study on the optical setup for the prototype chromatic confocal microscope with the mode-locked laser is carried out.

Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer
Kazuki Mano, Ryo Aihara, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, 13 Nov. 2017
This paper presents an optical setup to fabricate a large-area two-dimensional diffraction grating by using a two-axis Lloyd's mirror interferometer. In order to fabricate large-area gratings, a large collimating lens, which generates a large diameter collimated beam, is integrated into the optical setup. In this paper, an evaluation of the intensity distribution of the collimated beam and an exposure experiment are carried out. In addition, the fabricated grating is measured by an atomic force microscope to evaluate the effectiveness of the developed setup with the large collimating lens.

EVALUATION OF A FOCUSED LASER SPOT DIAMETER FOR AN OPTICAL ANGLE SENSOR　　　　　　　　　　　　　　　
The 59th Ilmenau Scientific Colloquium, 11 Sep. 2017, Oral presentation
Germany Ilmenau, [International presentation]

ダイヤモンド切削工具形状の超精密測定に関する研究 切削工具切れ刃稜丸み径測定手法の検討
清水裕樹, 中川翔太, CHEN Yuan‐Liu, GAO Wei
精密工学会大会学術講演会講演論文集, 05 Sep. 2017, Japanese

Optical Instruments for Measurement of the Next-generation Stage Systems for Dimensional Metrolog　　　　　　　　　　　　　　　
SHIMIZU Yuki
Optical Society of Korea OSK-OSJ Joint Symposium, 11 Jul. 2017, English, Invited oral presentation
[Invited], [International presentation]

Optical Instruments for Measurement of the Next-generation Stage Systems for Dimensional Metrology　　　　　　　　　　　　　　　
Optical Society of Korea Summer Meeting 2017, 10 Jul. 2017, Invited oral presentation
Republic of Korea 釜山, [International presentation]

Quantitative evaluation of a cutting tool edge geometry by using a micro laser probe　　　　　　　　　　　　　　　
39th International MATADOR Conference on Advanced Manufacturing (Matador 2017), 05 Jul. 2017, Oral presentation
U.K. Manchester, [International presentation]

微空間での熱収支を利用した平滑面欠陥検出に関する研究―生成熱収支場による欠陥検出可能性の実験的検討―
清水裕樹, 松野優紀, CHEN Yuan‐Liu, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Mar. 2017, Japanese

Molecular dynamics simulation of form measurement process of soft materials using atomic force microscope
Yindi Cai, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, 28 Nov. 2016
© 2016 IEEE. Molecular dynamics simulations of contact mode form measurement process on a soft substrate with a special surface profile using a diamond AFM tip are preformed to investigate the contact behavior and the surface profile damages or distortions of the measured substrate. The process of contact mode imaging of the AFM can be treated as the process of nano-scratching. The simulation-predicted interaction force, including scratching force and normal force, characterizes the saw-tooth pattern, which is referred to as atomic stick-slips. The shape of measured substrate surface, especially the surface underneath the AFM tip, is distorted by the interaction force between the AFM tip and the substrate surface.

Micro thermal sensor for nanometric surface defect inspection
Yuki Shimizu, Yuki Matsuno, Yuta Ohba, Wei Gao
16th International Conference on Nanotechnology - IEEE NANO 2016, 21 Nov. 2016
© 2016 IEEE. This paper presents a concept of a micro thermal sensor to be used for defect inspection of a smoothly-finished surface such as a bare wafer or a hard disk. In the proposed concept, existences of the defects on a measurement surface will be detected by scanning the surface with the micro thermal sensor, which is utilized to detect the variation of the thermal flow in-between the sensor surface and the measurement surface. The proposed micro thermal sensor has a possibility of detecting various types of surface defects. An existence of the defect having a convex shape such as an asperity or a particle can be found by detecting a heat generated at the collision between the sensor surface and the tip of the defect. In addition, the thermal sensor is expected to be applied for the inspection of pits or scratches in a concave shape on the smooth surface. When the thermal sensor is placed with respect to the measurement surface with a tiny gap of less than 1 μm, a heat transfer system sensitive against the gap variation will be constructed at the interface between the thermal sensor and the measurement surface becomes a system.

Analysis of a Lloyd's mirror interferometer for fabrication of gratings
Zongwei Ren, Ryo Aihara, Yuki Shimizu, So Ito, Yuan Liu Chen, Wei Gao
16th International Conference on Nanotechnology - IEEE NANO 2016, 21 Nov. 2016
© 2016 IEEE. This paper presents the analysis of an orthogonal multi-beam Lloyd's mirror interferometer for fabrication of two-axis gratings, which is employed as a measurement standard. Conventionally, for the fabrication of such complicated micro patterns, ultra-precision turning with a fast tool servo or lithography process with masks has been employed. However, they require long machining or fabrication time. Meanwhile, laser interference lithography such as the Lloyd's mirror interferometer is expected as a candidate for fabrication of such periodic micro patterns. In this paper, a new optical configuration is designed based on the Lloyd's mirror interferometer. In the proposed design, differing from the one in the previous study, two mirrors and a substrate are set to be perpendicular with each other to fabricate two-axis grating patterns having both symmetric profiles and uniform depths over the wide fabrication area, which has been difficult to be achieved in the previous study. A design and fabrication of the optical configuration for the orthogonal multi-beam Lloyd's mirror interferometer, and some experimental results with the interferometer will be reported.

Nanometrology of an ultraprecision machined surface by using optical sensors
Zengyuan Niu, Ryo Kobayashi, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
16th International Conference on Nanotechnology - IEEE NANO 2016, 21 Nov. 2016
© 2016 IEEE. This paper presents nanometrology of an ultraprecision machined surface by using optical sensors. To verify the feasibilities of optical sensors on the measurement of surface profile, different types of fiber-optic sensor and laser micro interferometer are employed to measure the roundness of a ultraprecision machined cone in this paper. Experiments confirmed that the fiber-optic sensor can measure not only the roundness but also the surface roughness of the cone. Experiments also confirm that the measurement of the laser micro interferometer is highly affected by the surface roughness of the cone because of the relative measurement principle of the laser micro interferometer.

Computer simulation on the optical configuration of an ultra-sensitive angle sensor based on laser autocollimation　　　　　　　　　　　　　　　
16th International Conference on Precision Engineering (ICPE 2016), 16 Nov. 2016, Oral presentation
JAPAN 浜松, [International presentation]

A design study of an XYZ micro-stage　　　　　　　　　　　　　　　
The 7th International Conference on Positioning Technology (ICPT2016), 10 Nov. 2016, Oral presentation
Republic of Korea Seoul, [International presentation]

A sensitivity-improved micro thermal sensor for surface defect inspection　　　　　　　　　　　　　　　
The 12th Chinese-Japan International Conference on Ultra-Precision Manining Process, 04 Nov. 2016, Oral presentation
China Hunan, [International presentation]

XYZマイクロステージに関する研究―ステージ基礎特性の評価―
清水裕樹, 菅原拓馬, 安達圭祐, 伊東聡, GAO Wei, 丹羽英二, 佐々木祥弘
日本機械学会年次大会講演論文集(CD-ROM), 10 Sep. 2016, Japanese

マイクロプローブを用いたスロットダイコーターの精密溝幅計測に関する研究
伊東聡, CHEN Yuanliu, 菊地浩貴, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦
日本機械学会年次大会講演論文集(CD-ROM), 10 Sep. 2016, Japanese

Micro Thermal Sensor for Nanometric Surface Defect Inspection　　　　　　　　　　　　　　　
IEEE NANO 2016 (16th International Conference on Nanotechnology), 22 Aug. 2016, Invited oral presentation
JAPAN, [International presentation]

スロットダイコーターの精密計測に関する研究―第3報 マイクロプローブ先端球のその場校正の不確かさ評価―
伊東聡, 菊地浩貴, 小林遼, CHEN Yuan‐Liu, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦
精密工学会大会学術講演会講演論文集, 20 Aug. 2016, Japanese

Investigation on the sensitivity of an optical angle sensor based on laser autocollimation　　　　　　　　　　　　　　　
International Symposium on Optoelectronic Technology and Application 2016 (OTA 2016), 09 May 2016, Invited oral presentation
China, [International presentation]

スロットダイコーターの精密計測に関する研究―第2報 マイクロプローブによる溝幅分布測定システムの構築―
菊地浩貴, 伊東聡, 陳遠流, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦
精密工学会大会学術講演会講演論文集, 01 Mar. 2016, Japanese

微空間での熱収支を利用した平滑面欠陥検出に関する研究―非接触欠陥検出の原理検討―
清水裕樹, 松野優紀, 大場裕太, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Mar. 2016, Japanese

Laser interference lithography with a modified two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional micro patterns　　　　　　　　　　　　　　　
The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), 19 Oct. 2015, Oral presentation
[Domestic Conference]

Ductile cutting of a microstructure array on silicon surface by using a diamond tool with a negative rake angle
Yuan Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
This paper presents an experimental investigation of ductile cutting of silicon by using a diamond tool with a negative rake angle. A diamond cutting tool with a zero rake angle is inclined to form a negative rake angle for a better performance in ductile cutting. A high-sensitivity force sensor is integrated with the tool holder for detection of the tool-sample contact and monitoring the thrust force in the cutting process. The unavoidable sample tilt was probed by using the force sensor integrated diamond tool as a stylus, so that microstructures can be directly fabricated along the tilted workpiece. With accurate tilt compensation, a microstructure array with a good uniformity was successfully fabricated on the silicon surface.

Determination of the origin position for an angle sensor with a femtosecond laser
Jun Tamada, Yukitoshi Kudo, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
This paper proposes a new optical angle sensor, in which a mode-locked femtosecond laser referred to as an optical frequency comb is employed as a light source. By using the optical frequency comb whose carrier frequency is well stabilized by using an external frequency standard with an uncertainty of 10 -11 , both the sensor stability and the sensor sensitivity are expected to be improved. In this paper, a prototype optical sensor head with the femtosecond laser for the angle sensor is fabricated. Since the light wavelength of the femtosecond laser used in this paper is out of the visible range, a new alignment method using a retroreflector is introduced to determine the origin position of the angle sensor. In addition, some basic experiments are carried out to verify the feasibility of the developed angle sensor with the optical frequency comb.

Profile Measurement of micro-optics with steep sidewalls by using a long stroke atomic force microscope
Minglei Li, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
In this research, a long stroke atomic force microscope (LS-AFM) is developed for surface profile measurement of micro-optics with steep sidewalls. An electrochemically polished tungsten probe with sharpened apex is employed as the AFM probe which provides the effective length of the probe tip more than 100 μm so that the accessibility to the valley part of a deep groove can be realized. The probe tip is vibrated by a tuning fork at their resonance frequency. The probe tapping the sample surface with constant force which is feedback controlled based on the constant frequency shift signal of the tuning fork. The trace of the probe tip in Z direction can be considered as the sample surface profile. Sectional profile measurement of a Fresnel lens is carried out by utilizing the LS-AFM and a commercial optical probe. The comparison of the measurement result demonstrates the effectiveness and the advantage of the developed LS-AFM in profile measurement of micro-optics with steep sidewalls.

Micro-probing system for slit width measurement by using a shear-force detection
So Ito, Kikuchi Hirotaka, Yuan Liu Chen, Yuki Shimizu, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
A prototype measurement system by using a micro-probe is introduced for the precision measurement of the slit width. The stylus of the micro-probe is consisted of the thermally-pulled capillary glass tube and precision glass ball with 50 μm in diameter, so that the probe tip can be inserted into the inside of the micro-gap. A shear-force detection micro-probing is employed for the precision measurement of the slit width of the slot die coater. The measurement accuracy of the slit width measurement is investigated.

Noncontact electrostatic force microscopy for surface profile measurement of insulating materials
Shigeaki Goto, Minglei Li, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
This paper reports the experimental result of noncontact surface profile measurement of an insulating sample made of glass with the developed electrostatic force microscope (EFM). Noncontact scanning was carried out maintaining the tip-to-sample distance of larger than 100 nm, which significantly reduces the risk of collision between the sample and the tip. The algorism named "dual-height method" calculated the profile image with cancelling the fluctuation of the tip-to-sample distance. The same sample was measured also with the AFM, and the EFM profile images agreed with the AFM profile image quantitatively.

Measurement of angular error motions of a precision linear stage by using a high resolution clinometer
Satoshi Kataoka, Tatsuya Ishikawa, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
This paper presents measurement of the angular error motions of a precision linear stage by using a high resolution clinometer in the production process of the stage, where the measurement is repeatedly carried out together with a hand scraping operation for correction of the form errors of the stage guideways. Differing from a conventional autocollimator, the clinometer does not require a reference mirror on the stage since its angle reference is the direction of the gravitational vector. In this paper, two clinometers are employed to measure roll error motion of a linear stage, while eliminating the influences of external vibrations.

Precision measurement of vertical straightness of a roll workpiece on an ultra-precision lathe
Zengyuan Niu, Yuanliu Chen, Daiki Matsuura, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeongseok Oh, Chunhong Park
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
This paper presents a measurement method for vertical straightness of a roll workpiece on an ultra-precision lathe. The measurement of vertical straightness of a roll workpiece is directly influenced by the vertical error motions of carriage slide, which is composed of the out-of-straightness error component and the out-of-parallelism error component. The effect by the vertical error motions should be compensated in the measurement of vertical straightness of a roll workpiece. A three-probe method and new algorithms are employed to measure and evaluate both the vertical straightness and the vertical error motions, which are newly introduced. Experiments are carried out on a small roll workpiece.

Molecular dynamics simulation of nano-contact between a diamond cutting tool and a copper surface
Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao, Ying Chen
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
This paper presents molecular dynamics simulation on nanoindentation of diamond indenter on a copper workpiece. Surface damages of the workpiece are caused in the contact detection process for ultra-precision fabrication and form measurement of surface by using a force sensor-integrated fast tool servo. Molecular dynamics simulations are carried out in this paper to theoretically investigate the geometries of the damages due to the contact deformation. Taking into consideration of the holding period at the maximum indentation depth between the loading and the unloading processes, the dependence of the indentation geometry on the holding time are observed. Based on the simulation results, physical properties of the workpiece are also analyzed.

Laser interference lithography with a modified two-axis Lloyd's mirror interferometer for fabrication of two-dimensional micro patterns
Yindi Cai, Xinghui Li, Xinghui Li, Ryo Aihara, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, 18 Oct. 2015
This paper presents a design study on an optical setup for fabrication of a two-dimensional grating used in encoder systems. By adding major modifications to the conventional one-axis Lloyd's mirror interferometer, a modified two-axis Lloyd's mirror interferometer has been developed. Based on the wave optics, the two-axis interference patterns to be generated by the proposed optical configuration are simulated. To eliminate unwanted distortion of the two-dimensional micro patterns, polarization of the laser beams is controlled by inserting two half wave plates in the optical path. In addition, pattern exposure tests are carried out by using a prototype optical setup.

低測定力変位プローブによる工具刃先形状測定に関する研究
伊東聡, 関根匠, 清水裕樹, GAO Wei, 高橋和彦, 荒川訓明, 山本泰河, 久保田晃史
日本機械学会年次大会講演論文集(CD-ROM), 12 Sep. 2015, Japanese

ロール金型の加工機上測定に関する研究
清水裕樹, NIU ZengYuan, 松浦大貴, 小林遼, 伊東聡, GAO Wei
日本機械学会年次大会講演論文集(CD-ROM), 12 Sep. 2015, Japanese

微空間での熱収支を利用した平滑面欠陥検出に関する研究―10nm級サイズ欠陥との接触検知シミュレーション実験―
松野優紀, 大場裕太, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

高精度セラミックス部品の加工機上形状測定に関する研究
小林遼, 清水裕樹, 伊東聡, GAO Wei, 足立茂, 大宮恭平, 佐藤友樹
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

2次元格子とフィゾー干渉計の一括自律校正に関する研究―自律校正法の提案―
大野敦子, KIM WooJae, CAI Yindi, CHEN Yuan‐Liu, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

ダイヤモンド切削工具切れ刃の光学式形状測定に関する研究―切削工具切れ刃輪郭形状の測定―
中川翔太, JANG SungHo, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

液面基準3軸姿勢角センサに関する研究
伊東聡, 石川龍弥, 片岡智史, CHEN Yuan‐Liu, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

光周波数コムを用いた角度スケールコムに関する研究
清水裕樹, 玉田純, 工藤幸利, CHEN Yuan‐Liu, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

3ビームロイドミラー干渉計による2軸回折格子加工に関する研究
相原涼, LI Xinghui, CAI Yindi, 伊東聡, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

平面ステージ精密制御用多自由度光センサに関する研究
古田雅也, LI Xinghui, CAI Yindi, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

ステージロール運動誤差計測用高分解能クリノメータに関する研究
片岡智史, 石川龍弥, CHEN Yuan‐Liu, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

超高感度角度センサに関する研究
丸山泰司, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

水平走査プローブによる小型円筒ワークの精密形状測定に関する研究
町田裕貴, 清水裕樹, 伊東聡, GAO Wei, 山崎宏, 柴本裕輔, 花岡浩毅
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

XYZマイクロステージに関する研究―ステージの設計と製作―
菅原拓馬, 清水裕樹, 伊東聡, GAO Wei, 丹羽英二, 佐々木祥弘
精密工学会大会学術講演会講演論文集, 20 Aug. 2015, Japanese

長尺AFMプローブによるマイクロ光学素子の表面形状測定に関する研究
伊東聡, JIA Zhigang, LI Minglei, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Mar. 2015, Japanese

光学式3軸角度センサの小型化に関する研究
丸山泰司, 清水裕樹, 伊東聡, GAO Wei, TAN Siew Leng
精密工学会大会学術講演会講演論文集, 01 Mar. 2015, Japanese

S1320202 On-machine measurement of a roll mold
SHIMIZU Yuki, NIU Zeng Yuan, MATSUURA Daiki, KOBAYASHI Ryo, ITO So, GAO Wei
The Proceedings of Mechanical Engineering Congress, Japan, 2015, Japanese
This paper presents a development of a method and a system for on-machine measurement of horizontal and vertical motion errors of a carriage slide in a machine tool and form errors of roll dies including deformation due to gravity. Conventional reversal methods cannot have measured deflection of roll dies due to its principle. To realize further higher fabrication accuracy of the roll dies, a new reversal method employing a straightedge and three displacement sensors is proposed for measurement of roll dies. In the proposed method, by using the outputs from the displacement sensors, the deflection of the roll dies can be measured while cancelling the influence of the carriage slide motion error. An on-machine measurement system consisting of a small roll work-piece and three capacitive displacement sensors is constructed on an ultra-precision lathe. Experimental results confirmed that the developed system has stability enough to achieve required measurement uncertainty of ±100 nm.

S1320201 Measurement of tool cutting edge profile by a stylus displacement probe with a low measuring force
Ito So, Sekine Sho, Shimizu Yuki, Gao Wei, Takahashi Kazuhiko, Arakawa Kunmei, Yamamoto Taiga, Kubota Kouji
The Proceedings of Mechanical Engineering Congress, Japan, 2015, Japanese
This paper presents the development of the contact-type displacement probe with low measuring force for the profile measurement of the cutting edge on-machine and non-damaging. This probe is consisted of a triangulation-based laser displacement sensor and both-ends supported leaf spring, on which a stylus tip will be mounted. The displacement of the stylus tip can be measured by detecting the deflection of the leaf spring with the laser displacement sensor. The probe is mounted on the linear stage to scan the cutting edge. To realize the large measurement range and low measurement force, the probe tip is contacted intermittently in the vertical direction. The low measurement force of less than 0.1 mN can be achieved. The measurement accuracy is evaluated, and then, the profile of the sharpened edge is measured by utilizing the developed probe system.

Fabrication of two-dimensional micro patterns for adaptive optics by using laser interference lithography
Xinghui Li, Xinghui Li, Yindi Cai, Ryo Aihara, Yuki Shimizu, So Ito, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 01 Jan. 2015
© 2015 SPIE. This paper presents a fabrication method of two-dimensional micro patterns for adaptive optics with a micrometric or sub-micrometric period to be used for fabrication of micro lens array or two-dimensional diffraction gratings. A multibeam two-axis Lloyd's mirror interferometer is employed to carry out laser interference lithography for the fabrication of two-dimensional grating structures. In the proposed instrument, the optical setup consists of a light source providing a laser beam, a multi-beam generator, two plane mirrors to generate a two-dimensional XY interference pattern and a substrate on which the XY interference pattern is to be exposed. In this paper, pattern exposure tests are carried out by the developed optical configuration optimized by computer simulations. Some experimental results of the XY pattern fabrication will be reported.

接触型マイクロ熱検知センサによるナノ平滑面微欠陥検出に関する研究―素子プロファイル改善と接触検知感度の検討―
清水裕樹, 大場裕太, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Sep. 2014, Japanese

光学システムを用いたダイヤモンド切削工具切れ刃輪郭形状の3次元測定に関する研究
JANG SungHo, 清水裕樹, GAO Wei
日本機械学会東北支部総会・講演会講演論文集(CD-ROM), 14 Mar. 2014, Japanese

2軸ロイドミラー干渉計によるスケール格子の製作に関する研究
LI Xinghui, 清水裕樹, 伊東聡, GAO Wei
日本機械学会東北支部総会・講演会講演論文集(CD-ROM), 14 Mar. 2014, Japanese

マルチプローブ型サーフェスエンコーダに関する研究―6自由度計測手法の開発―
伊藤武志, LI Xinghui, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Mar. 2014, Japanese

ダイヤモンド切削工具切れ刃の光学式形状測定に関する研究
清水裕樹, JANG SungHo, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Mar. 2014, Japanese

超高感度角度センサに関する研究―測定レーザビーム径拡大に伴うレンズ収差の影響―
村田大, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Mar. 2014, Japanese

微細形状測定のための非接触静電気力顕微鏡に関する研究―形状測定の高速・高精度化のための走査方式の検討―
細渕啓一郎, JIA Zhigang, 伊東聡, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Mar. 2014, Japanese

180 An optical system for three-dimensional tool edge contour measurements
JANG SungHo, SHIMIZU Yuki, GAO Wei
The Proceedings of Conference of Tohoku Branch, 2014, Japanese

精密ステージ位置検出用モザイク格子サーフェスエンコーダに関する研究
清水裕樹, 伊藤武志, LI Xinghui, KIM WooJae, GAO Wei
砥粒加工学会学術講演会講演論文集(CD-ROM), 2014, Japanese

175 Fabrication of scale grating by using a two-axis Lloyd's mirror interferometer
LI Xinghui, SHIMIZU Yuki, ITO So, GAO Wei
The Proceedings of Conference of Tohoku Branch, 2014, Japanese

174 Compensation of frequency drifts in a scanning electrostatic force microscope for surface profile measurement
JIA Zhigang, HOSOBUCHI Keiichiro, ITO So, SHIMIZU Yuki, GAO Wei
The Proceedings of Conference of Tohoku Branch, 2014, English

On the use of mercury sessile drops as reference artefacts for the calibration of optical surface topography measuring instruments
Jacob W. Chesna, Jacob W. Chesna, Yuki Shimizu, Yuki Shimizu, Richard, K. Leach
Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013, 26 Dec. 2013

Analysis of the forces in electrostatic force microscopy for profile measurement of micro-structured surface of dielectric
Gaofa He, Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 16 Dec. 2013
For measuring the surface profile of many micro-optical components which are made of non-conductive material, such as diffractive grating and Fresnel lens, with complicated shapes on their surfaces, the electrostatic force microscopy (EFM) was recommended in noncontact condition. When a bias voltage is applied between the conducting probe tip and a back electrode where a non-conducting sample was put on, an electrostatic force will be generated between the probe tip and the sample surface. The electrostatic force will change with the distance between the probe tip and the sample surface. Firstly, the relationship between the electrostatic force and the tip-sample distance was analyzed based on the dielectric polarization theory. The theoretical result shows that the electrostatic force is proportional to 1/d2, where d is the distance between the probe tip and sample surface. Then, a numerical method (finite element method -FEM) was employed to calculate the electrostatic force and the result shows accordance with the theoretical method. Finally, the prototype of a scanning electrostatic force microscopy was built which is composed of a conducting probe unit with a Z scanner driven by piezoelectric actuators, a XY scanner unit for mounting the sample and back electrode and a circuit unit for detecting the frequency shift. The force curve, which shows the relationship between the electrostatic force and the tip-sample distance, was achieved by using the EFM prototype. All results demonstrated that it is feasible for using the EFM system to measure the surface profile of non-conductor. © 2013 SPIE.

接触型マイクロ熱検知センサによるナノ平滑面微欠陥検出に関する研究　　　　　　　　　　　　　　　
大場裕太, 盧文剣,高偉
精密工学会秋季大会, 13 Sep. 2013, Oral presentation
[Domestic Conference]

接触型マイクロ熱検知センサによるナノ平滑面微欠陥検出に関する研究―試作素子による熱検知感度の実験的検討―
清水裕樹, 大場裕太, LU Wenjian, GAO Wei
精密工学会大会学術講演会講演論文集, 28 Aug. 2013, Japanese

Feasibility study on the concept of thermal contact sensor for nanometer-level defect inspections on smooth surfaces　　　　　　　　　　　　　　　
Wenjian LU, Yuta OHBA, Wei GAO
THE 11th INTERNATIONAL SYMPOSIUM OF MEASUREMENT TECHNOLOGY ANDINTELLIGENT INSTRUMENTS, 01 Jul. 2013, Oral presentation
Germany, [International presentation]

Modeling and analysis of a scanning electrostatic force microscope for surface profile measurement
Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 12 Apr. 2013
This paper presents the analysis of a prototype scanning electrostatic force microscope (SEFM) system developed for noncontact surface profile measurement. In the SEFM system, with a dual height method, the distance between the probe tip and the sample surface can be accurately obtained through removing the influence of the electric field distribution on the sample surface. Since the electrostatic force is greatly influenced by the capacitance between the probe tip and the sample surface, a new approach for modeling and analysis of the distribution of capacitance between the probe tip with an arbitrary shape and the sample surface with a random topography by using the finite difference method (FDM) is proposed. The electrostatic forces calculated by the FDM method and the conventional sphere-plane model are compared to verify the validity of the FDM method. The frequency shift values measured by experiment are also compared with the simulation results computed by the FDM method. It has been demonstrated that the electrostatic force between arbitrary shapes of the probe tip and the sample surface can be well calculated by the finite difference method. © 2013 SPIE.

Fabrication of diffraction gratings for surface encoders by using a Lloyd's mirror interferometer with a 405 nm laser diode
Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Lijiang Zeng
Proceedings of SPIE - The International Society for Optical Engineering, 12 Apr. 2013
To fabricate a scale grating for a surface encoder in a cost-effective way, a blue laser diode with a wavelength of 405 nm is employed in a Lloyd's mirror interferometer to carry out interference lithography (IL) of the grating. The beams from the laser diode are collimated by an aspherical collimating lens to form beams with a diameter of 50 mm. These beams are then projected towards the Lloyd's mirror and the grating substrate, which are aligned perpendicularly with each other and are mounted on a rotary stage. One half of the beam directly goes to the grating substrate, and the other half reaches to the grating substrate after being reflected by the mirror. The direct beam and the reflected beam interference with each other to generate and expose the interference fringes, which correspond to the scale grating structures, on the substrate coated with a photoresist layer. The pitch and area of the grating structures are set to be 570 nm and around 300 mm 2, respectively. The fabricated grating structures are evaluated with an AFM to investigate the influence of the spectrum width of the laser beam. © 2013 SPIE.

三次元微細形状測定のための静電気力顕微鏡に関する研究
細渕啓一郎, JIA Zhigang, 伊東聡, 清水裕樹, HE Gaofa, GAO Wei
日本機械学会東北支部総会・講演会講演論文集, 15 Mar. 2013, Japanese

極低測定力触針式変位センサの開発―センサの設計と性能評価―
大澤慎一, 関根匠, 伊東聡, 清水裕樹, GAO Wei, 久保田晃史, 加藤明, 荒川訓明, 安竹睦実
日本機械学会東北支部総会・講演会講演論文集, 15 Mar. 2013, Japanese

高精度セラミックス部品の形状測定に関する研究
目黒孝幸, 松浦大貴, 清水裕樹, 伊東聡, GAO Wei, 足立茂, 大宮恭平
日本機械学会東北支部総会・講演会講演論文集, 15 Mar. 2013, Japanese

超高感度角度センサに関する研究
村田大, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集, 27 Feb. 2013, Japanese

192 Design of a stylus displacement sensor with a low measuring force
OSAWA Shinichi, SEKINE Sho, ITO So, SHIMIZU Yuki, GAO Wei, KUBOTA Kouji, KATO Akira, ARAKAWA Kuniaki, YASUTAKE Mutsumi
The Proceedings of Conference of Tohoku Branch, 2013, Japanese

191 Surface shape measurement of high-precision ceramics work
Meguro Takayuki, Matsuura Daiki, Shimizu Yuki, Ito So, Gao Wei, Adachi Shigeru, Omiya Kyohei
The Proceedings of Conference of Tohoku Branch, 2013, Japanese

190 A scanning electrostatic force microscope for surface profile measurement
HOSOBUCHI Keiichiro, JIA Zhigang, ITO So, SHIMIZU Yuki, HE Gaofa, GAO Wei
The Proceedings of Conference of Tohoku Branch, 2013, Japanese

161 Fabrication of thin-film thermal contact sensor for detection of surface defects
LU Wenjian, OHBA Yuta, SHIMIZU Yuki, GAO Wei
The Proceedings of Conference of Tohoku Branch, 2013, English

Pit detection using a contact sensor
J. Xu, Y. Shimizu, J. Liu, T. Shiramatsu, M. Furukawa, J. Li, H. Kohira
2012 Digest APMRC - Asia-Pacific Magnetic Recording Conference: A Strong Tradition. An Exciting New Look!, 01 Dec. 2012
Pit detection study of a thermal contact sensor was carried out by both experiments and simulation. The experimental results showed that the thermal contact sensor was able to detect a small pit with good sensitivity. And the simulation study revealed that the mechanism of pit detection is due to worse cooling, which results in higher sensor temperature, because the sensor/disk spacing is larger on the pit. The maximum temperature increase is significant initially with increasing pit depth but saturates when the depth is larger than 60 nm. © 2012 DSI.

An air-bearing displacement sensor for nanometrology of surface forms
Kang Won Lee, So Ito, Yuki Shimizu, Wei Gao, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai
2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings, 30 Jul. 2012
This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for the air-bearing displacement sensor are described. Then, in order to identify the basic performance of the sensor, a measuring force and displacement output of the sensor are evaluated on a vibration isolated table. The sensor is also mounted on a diamond turning machine to evaluate the surface form of micro structures. A roll workpiece with Ni-P plating surface, on which micro-lens array are fabricated by using a FS-FTS (Force sensor fast tool servo) on the machine tool, is employed as a specimen for measurement. © 2012 IEEE.

A scanning-light method for inspection of tool cutting edge
Yuki Shimizu, Sungho Jang, Takemi Asai, So Ito, Wei Gao
2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings, 30 Jul. 2012
In this paper, a scanning-light method is proposed to evaluate the form of the tool cutting edge in a wide range up to several millimeters. An optical system, which consists of a photo diode, a laser diode unit and an objective lens, was developed. A small laser spot generated by the objective lens scans across the tool cutting edge, while monitoring the intensity of the laser beam passed through the tool cutting edge. In the proposed method, variation of the detected intensity is converted into information of the measured tool form. Feasibility of the proposed method was confirmed by simulations and experiments. © 2012 IEEE.

衛星用大型ミラーの加工機上高精度形状測定に関する研究(第1報)―形状測定システムの構築とアライメント手法の開発―
後藤成晶, 清水裕樹, LEE JungChul, 伊東聡, GAO Wei, 足立茂, 大宮恭平, 佐藤広規, 久田哲弥, 齋藤佳史, 久保田浩明
精密工学会誌, 05 Jul. 2012, Japanese

Design of a Micro-sized Thermal Contact Sensor for Inspection of Surface Defects　　　　　　　　　　　　　　　
Yuki Shimizu, Wenjian Lu, Wei Gao
3rd International Conference on Nanomanufacturing (nanoMan2012), Jul. 2012, Invited oral presentation
JAPAN Wako, [International presentation]

A scanning-light method for inspection of tool cutting edge　　　　　　　　　　　　　　　
Yuki Shimizu, SungHo Jang, Takemi Asai, So Ito, Wei Gao
2012 IEEE International Instrumentation and Measurement Technology Conference, May 2012, Poster presentation
Germany Graz, [International presentation]

ヘッド組み込み型熱検知センサを用いた磁気ディスク表面のナノ微小欠陥検出技術　　　　　　　　　　　　　　　
清水 裕樹, 徐 鈞国, 小平英一
トライボロジー会議 2012 春, May 2012, Invited oral presentation
JAPAN TOKYO, [Domestic Conference]

マイクロステージ用変位センサに関する研究
東豊大, 丹羽英二, PENG Yuxin, 金子純史, 清水裕樹, 伊東聡, GAO Wei
日本機械学会東北支部総会・講演会講演論文集, 13 Mar. 2012, Japanese

ダイヤモンド切削工具切れ刃輪郭形状測定のための光学式センサに関する研究
JANG SungHo, 清水裕樹, 伊東聡, GAO Wei
日本機械学会東北支部総会・講演会講演論文集, 13 Mar. 2012, Japanese

モザイク格子サーフェスエンコーダに関する研究―マルチプローブセンサヘッドの開発―
細野幸治, KIM Woojae, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Mar. 2012, Japanese

微細形状測定のための非接触静電気力走査型プローブ顕微鏡に関する研究
後藤成晶, 細渕啓一郎, 伊東聡, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集, 01 Mar. 2012, Japanese

衛星用大型ミラーの加工機上高精度形状測定に関する研究―補正加工の実施と不確かさの評価―
武藤啓志, 後藤成晶, 細野幸治, 清水裕樹, GAO Wei, 足立茂, 大宮恭平, 佐藤広規, 久田哲弥, 齋藤佳史, 久保田浩明
精密工学会大会学術講演会講演論文集, 01 Mar. 2012, Japanese

歯車形状測定の高精度化に関する研究―歯車と変位センサの設置誤差補正―
武石俊希, BIN Xu, 伊東聡, 清水裕樹, GAO Wei, 山崎宏, 中沢芳司
精密工学会大会学術講演会講演論文集, 01 Mar. 2012, Japanese

ウエハ表面のナノレベル欠陥検出向け接触型マイクロ熱検知センサの原理検討
清水 裕樹, 盧 文剣, 東 豊大, 高 偉
精密工学会2012年度春季講演会, 01 Mar. 2012, Japanese, Oral presentation
JAPAN TOKYO, [Domestic Conference]

196 Investigation of the dynamics of a high-precision air-bearing displacement sensor
Lee Kang-Won, Ito So, Shimizu Yuki, Gao Wei
The Proceedings of Conference of Tohoku Branch, 2012, English

194 Analysis and measurement of the behavior of a rotating cylinder
LEE JungChul, SHIMIZU Yuki, ITO So, GAO Wei, HWANG Jooho, OH JeongSeok, PARK ChunHong
The Proceedings of Conference of Tohoku Branch, 2012, English

192 An optical sensor for cutting edge contour measurement of diamond cutting tool
JANG SumgHo, SHIMIZU Yuki, ITO So, GAO Wei
The Proceedings of Conference of Tohoku Branch, 2012, Japanese

D17 Experimental study of thermal contact sensor for the detection of surface defects
LU Wenjian, SHIMIZU Yuki, OHBA Yuta, GAO Wei
The Proceedings of The Manufacturing & Machine Tool Conference, 2012, Japanese
Experimental study on a thermal contact sensor for the detection of defects on smooth surfaces is described. As a prototype of the thermal contact sensor, a several-ten-micrometer-sized thin-film element was fabricated by photolithography processes. By using the fabricated element, both laser exposure tests and friction tests were carried out to investigate the feasibility of the element on detecting small amount of frictional heats. Three types of sensors with the element of different sizes are employed to compare the temperature rises due to the heating. Results of theoretical calculations are also compared with the experimental results to confirm the feasibility of the contact sensor.

D14 On-machine surface form evaluation of a large-scale roll workpiece
Lee Jung Chul, Shimizu Yuki, Ito So, Gao Wei, Chun Hong Park, Jooho Hwang, Jeoung Seok Oh
The Proceedings of The Manufacturing & Machine Tool Conference, 2012, English
This paper presents the on-machine surface form evaluation of a large-scale roll workpiece on a drum roll lathe. In this research, the surface form of a large-scale roll workpiece, which is composed of the out-of-straightness, the out-of-roundness and the differences of the diameter along the axial direction of a large-scale roll workpiece, is measured by using two capacitive type displacement probes placed on the two sides of a large-scale roll workpiece

Surface characterization of a diamond turned XY sinusoidal grating　　　　　　　　　　　　　　　
Yuki Shimizu, Shinichi Osawa, Takayuki Meguro, Wenjian Lu, Wei Gao
1st CIRP Conference on Surface Integrity (CSI), Jan. 2012, Poster presentation
Germany Bremen, [International presentation]

Height measurement of cutting edge by a laser displacement sensor
Shinichi Osawa, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato, Kouji Kubota
Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, 01 Dec. 2011
This paper presents a high speed and a high accurate measurement method for the height of the cutting edge of a rotary cutting tool with respect to the reference surface on the tool by using a laser displacement sensor. In this method, the height of the cutting edge is obtained from the output of the optical displacement sensor when the intensity output reaches the maximum. Both simulation and experimental results confirmed that the proposed method enables us to measure the height of cutting edge, the width of which is smaller than that of the laser spot.

Wavelet analysis for precision measurement of a micro-part
Toshiki Takeishi, Xu Bin, Yuki Shimizu, Wei Gao
Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, 01 Dec. 2011
This paper presents precision measurement of a micro-part which has micro-structured surfaces. Micro-parts sometimes have short pitches and large amplitudes. Measurements are conducted by the use of conventional measuring instruments and found that these instruments are difficult to measure their profiles. A novel measuring system is presented which uses a contact-type displacement sensor, probe shaft of which is levitated by air-bearings to reduce the contact force. After developing the new measuring system, measurement and analysis results are shown. Wavelet analysis reveals that there are errors in the measurement results and they are caused by stylus jump.

An angle sensor with a laser rangefinder
Takayuki Meguro, Yuki Shimizu, Wei Gao
Proceedings of the 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011, 01 Dec. 2011
This research describes an angle sensor based on laser autocollimation, with a laser rangefinder which is based on the principle of phase-difference distance measurement using a pulsed light source. The angle sensor and the laser rangefinder are combined with each other by sharing the same laser source for simultaneous measurement of the moving distance and two-axis tilt angles of a target mirror. A prototype sensor was fabricated and the evaluation experiment was conducted. Experimental results have shown that the sensor has a resolution of 1 mm for distance measurement and a resolution of 0.1 arc-seconds for tilt angle measurements.

A glass tube micro-stylus probe for surface form metrology
Bin Xu, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 01 Dec. 2011
This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology. Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip phenomena. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

Design of a linear-rotary micro-stage
Yuxin Peng, Yasumasa Sakurai, Yoshikazu Arai, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering, 01 Dec. 2011
This paper presents a linear-rotary micro-stage that can generate motions along and about the Z-axis using piezoelectric elements (PZTs). The small stroke of a PZT is extended by repeating the PZT motions based on a mechanism of impact friction drive. The friction drive mechanism has a simple driving unit, which only consists of a PZT element and a friction element. The moving element of the stage, which is a steel cylinder, is supported and actuated by a driving unit, which consists of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The dimension of the stage is 7.0 mm x 8.8 mm x 7.5 mm. The moving ranges of the stage are about 5.0 mm in the Z-direction and 360 degrees in the θ z -direction, respectively. The maximum moving speeds are approximately 30 mm/s and 84 rpm in the two directions, respectively. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).

Surface Encoders forPrecision Measurement of Multi-axis Motions　　　　　　　　　　　　　　　
Wei GAO, Yuki SHIMIZU, So Ito,WoojaeKim, Akihide Kimura, KoujiHosono
4th International Conference of Asian Society for Precision Engineeringand Nanoechnology (ASPEN2011), Nov. 2011, Invited oral presentation
China HongKong, [International presentation]

衛星用大型ミラーの加工機上高精度形状測定に関する研究―形状測定システムの構築とアライメント手法の開発―
後藤成晶, LEE Jung Chul, 清水裕樹, GAO Wei, 足立茂, 大宮恭平, 佐藤広規, 久田哲弥, 齋藤佳史, 久保田浩明
精密工学会大会学術講演会講演論文集, 05 Sep. 2011, Japanese

Spindle error motion measurement of a large-scale ultra-precision lathe　　　　　　　　　　　　　　　
李 貞徹, 清水 裕樹, 高 偉, ChunHong Park, Jooho Hwang, JeongSeok Oh
精密工学会2011年度秋季講演会, Sep. 2011, Oral presentation
JAPAN Kanazawa, [Domestic Conference]

AN OVERVIEW OF PRECISION MEASUREMENT TECHNOLOGY IN HEAD-DISK INTERFACE IN HARD DISK DRIVES　　　　　　　　　　　　　　　
Yuki Shimizu
The 7th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI2011), Aug. 2011, Invited oral presentation
China Lijiang, [International presentation]

Nano-scale defect mapping on a magnetic disk surface using contact sensor　　　　　　　　　　　　　　　
清水裕樹
(社)日本トライボロジー学会 第3種研究会 「ファイル記憶のトライボロジー」, Jul. 2011, Invited oral presentation
JAPAN TOKYO, [Domestic Conference]

Nano-scale defect mapping on a magnetic disk surface using contact sensor　　　　　　　　　　　　　　　
Yuki Shimizu, Hidekazu Kohira
2011International Magnetics Conference(INTERMAG) Taipei, Apr. 2011, Invited oral presentation
Taiwan Taipei, [International presentation]

Surface characterization of a diamond turned XY sinusoidal grating
Y. Shimizu, S. Osawa, T. Meguro, W. Lu, W. Gao
Procedia Engineering, 01 Jan. 2011
Surface characterization of an XY sinusoidal grating, which is fabricated by FTS (fast tool servo) on a diamond turning machine, is presented. The grating has a three dimensional micro-structured surface, which is a superposition of sinusoidal waves in the X- and Y-direction. The pitches and amplitudes of the sine waves are 10 ?m and 0.4 ?m, respectively. The surface form of the grating is imaged by a confocal microscope, a white light interference microscope and an atomic force microscope. The 3D images from the microscopes are compared with each other to distinguish the measurement uncertainties. The microscope images are analyzed by the two-dimensional discrete Fourier transform technique, which perfectly matches the nature of sinusoidal waves. The spatial spectrum of the grating surface is employed to identify the specific error factors introduced in the diamond turning process. © 2012 Published by Elsevier Ltd. Selection and peer-review under responsibility of Prof. E. Brinksmeier.

Effect of slider surface energy on head disk interface performance
J. Xu, Y. Shimizu, H. Matsumoto, K. Matsuda
Digest of the Asia-Pacific Magnetic Recording Conference 2010, APMRC 2010, 01 Dec. 2010
Study of lubricant coated slider showed that low slide surface energy has significant advantages in stable slider flying and less lubricant droplet formation on the disk surface at ultra-narrow clearance. Drive level evaluation showed the lubricant pick-up induced flying height increase is as one fifth low as control slider.

磁気ヘッドのナノ隙間浮上制御技術を用いた極低浮上領域における磁気ヘッド挙動の実験的検討　　　　　　　　　　　　　　　
清水裕樹
(社)日本トライボロジー学会 第3種研究会 「ファイル記憶のトライボロジー」, Aug. 2010, Invited oral presentation
JAPAN TOKYO, [Domestic Conference]

Design of damped air bearings at head disk interface
Jianhua Li, Junguo Xu, Yuki Shimizu, Masayuki Honchi, Kyosuke Ono
Proceedings of the ASME/STLE International Joint Tribology Conference 2009, IJTC2009, 24 Jun. 2010
Small perturbation and modal-analysis methods were employed to systematically study a damped slider's dynamic characteristics. We found that a design with grooves distributed on a trailing pad effectively improved the slider's damping at higher frequencies, and the damping ratio was dependent on the number of grooves, their depth, location, width, length, distribution, orientation, and types. A higher damping ratio could be obtained by optimizing these parameters. The femto slider with distributed damping grooves on a trailing pad had a higher damping ratio in the third mode, and hence, its responses to disk parallel and wavy motion were greatly reduced. This new design for the damped slider was an effective solution reducing the slider's modulation. © 2009 by ASME.

EXPERIMENTAL STUDY ON SLIDER DYNAMICS DURING TOUCHDOWN BY USING THERMAL FLYING-HEIGHT CONTROL　　　　　　　　　　　　　　　
Yuki Shimizu, Junguo Xu, Hidekazu Kohira, Kenji Kuroki, Kyosuke Ono
The 20th ASME Information Storage and Processing Systems Conference, May 2010, Oral presentation
United States Santa Clara, California, [International presentation]

Numerical simulation of touchdown/takeoff hysterisis of spherical pad slider by considering the liquid bridge between the slider and lubricant-disk
Hui Li, Jianhua Li, Junguo Xu, Yuki Shimizu, Kyosuke Ono, Shinobu Yoshida
2008 Proceedings of the STLE/ASME International Joint Tribology Conference, IJTC 2008, 16 Oct. 2009
This work carries on a numerical simulation of the touchdown/takeoff (TD/TO) hysterisis of the spherical pad slider. It numerically studies the meniscus bridge's formation and meniscus force interaction between the spherical pad and lubricant over the disk surface. It proposes a geometry model for the lubricant bridge, and correspondingly, a force model for the meniscus force acting on the spherical pad slider due to the lubricant bridge. By solving the liquid balance state at the meniscus boundary, it obtains the geometry of the liquid bridge. A parametric study is done to study the effects of the geometry of spherical pad, Hamaker constant of lubricant-disk, and surface energy of lubricant on the formation of the liquid bridge. The overflow phenomenon is analyzed to find out the acceptable dimension of the spherical pad design. Moreover, a three-dimensional (3D) model of spherical pad slider/disk interface is built to study the steady-state flying of the spherical pad slider. The different parameters are analyzed to study their effects on the TD/TO hysteresis. Copyright © 2008 by ASME.

“DAMPING SLIDER” AIR-BEARING DESIGN CONCEPTS AND SLIDER DEVELOPMENT　　　　　　　　　　　　　　　
Yuki SHIMIZU, Junguo XU, Jianhua LI, Kyosuke ONO
2009 JSME/IIP/ASME/ISPS Joint Conference on Micromechatronics for Information (MIPE2009), Jun. 2009, Oral presentation
JAPAN Tsukuba, [International presentation]

Experimental and Numerical Simulation Study on Low-Surface Energy Slider With Thermal Flying-Height Control Function　　　　　　　　　　　　　　　
Yuki Shimizu, Kyosuke Ono, Noritsugu Umehara, Junguo Xu
2009 International Magnetics Conference (Intermag2009), May 2009, Oral presentation
United States Sacrament, California, [International presentation]

Fluorine-ion-implanted Air-bearing Surface for Low-friction Head-disk Interface　　　　　　　　　　　　　　　
Yuki Shimizu, Noritsugu Umehara, Junguo Xu
The 18th ASME Information Storage and Processing Systems Conference, Jun. 2008, Oral presentation
United States Santa Clara, California, [International presentation]

A Spherical-Pad Head Slider for Stable Low-Clearance Recording　　　　　　　　　　　　　　　
Yuki Shimizu, Kyosuke Ono, Junguo Xu, Ryuji Tsuchiyama, Hidetoshi Anan
The 18th ASME Information Storage and Processing Systems Conference, Jun. 2008, Oral presentation
United States Santa Clara, California, [International presentation]

Ability of slider flying over discrete track medium
Jianhua Li, Junguo Xu, Yuki Shimizu
Proceedings of STLE/ASME International Joint Tribology Conference, IJTC 2006, 28 Nov. 2006
A simulation method, in which grooves are virtually distributed on the slider air-bearing surface instead of on grooved medium surface, is developed to investigate slider flying ability fundamentally. Its feasibility is verified. The characteristics of a slider flying over a discrete track medium (DTM) surface are simulated, including the flying attitude, groove parameters effect on flying profile, 3 a flying height, and flying height sensitivity on altitude of the slider. Simulation results indicate that when a traditional slider is flying over a DTM surface, it will have a higher 3 sigma of flying height, a more sensitivity on altitude, and a bigger flying height loss. Copyright © 2006 by ASME.

リードバック信号を利用した磁気ヘッドスライダ浮上変動測定装置の開発　　　　　　　　　　　　　　　
清水裕樹, 徐鈞国
トライボロジー会議 2005 秋, Sep. 2006, Oral presentation
JAPAN TOKYO, [Domestic Conference]

磁気ヘッド浮上面の機能性表面化によるナノ隙間浮上磁気ヘッドの安定性向上　　　　　　　　　　　　　　　
清水裕樹
(社)日本トライボロジー学会 第3種研究会 「ファイル記憶のトライボロジー」, Sep. 2006, Invited oral presentation
JAPAN TOKYO, [Domestic Conference]

Air-bearing surface chemical modification for low-friction head-disk interface　　　　　　　　　　　　　　　
Yuki Shimizu, Junguo Xu, Shozo Saegusa, Noritsugu Umehara
ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2006), Jun. 2006, Oral presentation
United States Santa Clara, California, [International presentation]

Two-Dimensional Flying-Height Modulation Mapping at HDD Drive Level　　　　　　　　　　　　　　　
Yuki Shimizu, Junguo Xu
2006 International Magnetics Conference (Intermag2006), May 2006, Oral presentation
United States San Diego, California, [International presentation]

サーフェスエンコーダによる5自由度位置・姿勢の同時計測
清水裕樹, 高偉, 清野慧
精密工学会大会学術講演会講演論文集, 05 Mar. 2002, Japanese

サーフェスエンコーダによる5自由度位置・姿勢の同時計測
清水 裕樹, 高 偉, 清野 慧
精密工学会大会学術講演会講演論文集, 01 Mar. 2002, Japanese

角度情報をベースとする多自由度位置・姿勢検出法の研究 マルチスポット光源の採用による位置検出精度向上
清野慧, 清水裕樹, 星野唯, 高偉
精密工学会大会学術講演会講演論文集, 22 Mar. 2000, Japanese

角度情報をベースとする多自由度位置・姿勢検出法の研究 : マルチスポット光源の採用による位置検出精度向上
清野 慧, 清水 裕樹, 星野 唯, 高 偉
精密工学会大会学術講演会講演論文集, 01 Mar. 2000, Japanese

光コムレーザから創出する「光のものさし」バーチャル絶対スケールによる絶対位置計測
科学研究費助成事業
30 Jun. 2023 - 31 Mar. 2026
清水 裕樹
本研究は，分光光学素子を用いて光コムレーザから生成した光絶対ビーム列をもとに，各々のサブビームが有する光周波数情報をもとに絶対位置情報を検出する「バーチャル絶対スケール」を開発し，微細目盛りを刻んだガラス基板ハードスケールを用いる従来手法の概念から脱却した，超高分解能での絶対位置検出を実現することを研究の目的としている．ガラス基板ハードスケールを不要とするバーチャル絶対スケールは全く新しいコンセプトに基づくものである．測定対象にガラス基板ハードスケールを搭載する従来手法の常識を根本から大きく変革する潜在性を有するものと期待される．また，デュアルコム分光との融合でサブnm級の超高分解能化が実現すると，学術的にも意義があるものになると期待され，工業的展開も望める．
計画1年目となる2023年度は，周波数が異なる多数の高安定モードからなる光コムレーザを高精度回折格子に入射した際に発生する1次回折光群から，各モードが高安定な絶対位置情報を有する平行サブビーム列（光絶対ビーム列）を生成する手法について，幾何光学に基づく理論的検討を進めた．また，反射型1軸回折格子とレンズを組み合わせて構築する光絶対ビーム列生成照射系について理論計算モデルを構築し，提案手法で期待される絶対位置検出分解能の理論的見積もりを進めた．さらに，研究の第一段階として，幅10 mm程度の光絶対ビーム列による原理検証実験実施に向けて，光コムレーザ光源の設計およびプロトタイプ光学系の構築に着手した．
日本学術振興会, 挑戦的研究(萌芽), 北海道大学, 23K17713

その場波面制御で自在に操る干渉定在波によるサブμｍ級自由微細構造の大面積露光創成
科学研究費助成事業
01 Apr. 2022 - 31 Mar. 2025
清水 裕樹, 高 偉
本研究では，サブマイクロメートル級微細パターンのマスクレス露光を実現する波面制御型光干渉リソグラフィ光学系を開発する．非直交型2軸ロイドミラー干渉計光学系に波面制御を融合して，不等ピッチ2軸ドットアレイの高精度創成を実現すること，波面制御型の非直交型2軸ロイドミラー干渉計にデュアル波長レーザ光源を導入し，レジスト透過レーザによる観測干渉定在波をもとに，レジスト吸収レーザで得られる露光干渉定在波をインプロセスで「その場」推定するアルゴリズムを確立し，パターン創成プロセスの効率と精度を向上すること，および露光サブビーム（直接/X/Yビーム）の波面を独立に制御するアルゴリズムを構築し，2軸干渉定在波中の各光スポットの独立制御によるマスクレスでのサブμm級自由パターン露光を実現すること，を目的とする．
計画２年目となる令和５年度は，前年度までに構築した干渉計光学系に対して空間位相変調器(SLM)を組み込んだ修正光学系を設計・構築した．この修正光学系に対して前年度に構築した観測干渉定在波「その場」観察光学系を組み合わせ，基礎特性評価実験により入射レーザビームの波面制御量と発生する干渉定在波変化との関係を実験的に明らかにした．また，ビーム内で位置毎に異なる波面制御を施すことにより，ラインパターン干渉定在波の不等ピッチ化を実現した．さらに，干渉縞をレジスト基板に転写する実験装置を構築し，構築した修整光学系により安定な微細パターン露光が可能であることを実証した．
日本学術振興会, 基盤研究(B), 北海道大学, 23K22641

その場波面制御で自在に操る干渉定在波によるサブμｍ級自由微細構造の大面積露光創成
科学研究費助成事業
01 Apr. 2022 - 31 Mar. 2025
清水 裕樹, 高 偉
日本学術振興会, 基盤研究(B), 北海道大学, 22H01370

光コム次元変換光学とその場自律校正法の創出によるサブアトム級３次元超精密計測
科学研究費助成事業 基盤研究(A)
01 Apr. 2020 - 31 Mar. 2024
高 偉, 清水 裕樹, 松隈 啓
本研究では，次世代「つながる」超精密ものづくり実現に必須となる3次元超精密「絶対」形状計測基盤の確立を目的として，不等ピッチ絶対グリッド（不等間隔のものさし）および色収差レンズの分光作用をもとに，XYZ3軸絶対位置情報を光コム光源の光周波数情報に次元変換して検出する，極高感度絶対型XYZ位置コムを開発することを研究の目的としている．ナノメートル精度が限界である従来の計測・校正分離型信頼性保証（校正）体系の打破に向け，光コム光源をGPS衛星経由で「時間」の国家標準に直結することで実現する新概念の計測・校正一体型「その場自律校正体系」を確立し，遠隔地の生産現場における国家標準に匹敵する限界精度までの極高精度化を試みる．
本年度は当初計画の通り，レーザ波面を分割制御した後に重ね合わせ，光の干渉により不等ピッチ光干渉絶対グリッド定在波を生成する1軸光学系を構築した後，波面分割型干渉計光学系に非球面ミラーを1枚追加して2軸化した．2軸化に伴うXYビーム間の干渉による歪み成分抑制のため，偏光制御光学系を導入した．HeCdレーザ光源を用いたビーム拡大光学系と組み合わせて，定在波一括転写システムを構築した．構築した定在波一括転写システムを用いて露光実験を行い不等ピッチ2軸絶対グリッドを作製するとともに，グリッドのピッチおよび振幅などを評価した．さらに，不等ピッチ絶対グリッドを用いた絶対型XY位置コムとして，光学読み取りヘッドの光源として用いるフェムト秒レーザのスペクトル帯域，および不等ピッチ絶対グリッドのピッチ変動幅を考慮して，±1次反射回折光を捕捉する差動型ファイバ受光光学系を設計・構築する生成光学系を開発した．その基本特性を実験によって調べた。
また，次年度実施予定の不等ピッチ絶対グリッド製作システムの大面積化と最適化とともに，Z位置コム生成光学系に関する検討を前倒して実施した．
日本学術振興会, 基盤研究(A), 東北大学, 20H00211

Trial for the next generation "connected" ultra-precision optical metrology　　　　　　　　　　　　　　　
JST 創発的研究支援事業
Apr. 2021 - Mar. 2024
Yuki Shimizu
国立研究開発法人 科学技術振興機構, JST 創発的研究支援事業, 東北大学, Principal investigator

透過フェムト秒レーザ熱検知プローブによる非接触・非破壊サブサーフェス評価への挑戦
科学研究費助成事業 挑戦的研究(萌芽)
30 Jul. 2020 - 31 Mar. 2023
清水 裕樹
本研究では，微小薄膜抵抗体で構成するマイクロ熱検知センサと，集光フェムト秒レーザで構成した共焦点光学系とを融合して，試料表層下（サブサーフェス）の局所加熱とそれに伴う微小熱応答の高精度検知を両立する「フェムト秒レーザ熱検知プローブ」を構築し，非接触・非破壊サブサーフェス高精度評価を実現する手法の確立に挑戦することを目的としている．試料に対して高い透過特性を有するフェムト秒レーザを集光してサブサーフェスを局所的に安定加熱するとともに，集光フェムト秒レーザ内にマイクロ熱検知センサを配置し，試料面との間隙を共焦点光学系でフィードバック制御した状態で熱応答を取得することで，組成により変化するサブサーフェスの熱特性をピンポイントで高精度検出する非接触・非破壊かつ迅速なサブサーフェス検査の実現を目指す．
計画2年目となる令和3年度は，フェムト秒レーザ熱検知プローブに用いるガラス基板マイクロ熱検知センサ向けの信号増幅回路の設計・試作を進めた．表面実装型のオペアンプ，およびブリッジ回路形成を想定したプリント基板による信号処理回路を設計して配線を極力短縮することで高周波ノイズの低減を試みるとともに，回路基板背面からレーザ光でセンサにアクセスできるよう，ガラス基板マイクロ熱検知センサ背面への回路基板配置を検討している．また，フェムト秒レーザをもとにセンサ基板-測定対象面間の間隙量を検出する手法の検討を進めている．
日本学術振興会, 挑戦的研究(萌芽), 東北大学, 20K20953

Form measurement of the next-generation optical components by the dimension-conversion-type multi-beam optical angle sensor capable of detecting multiple information
Grants-in-Aid for Scientific Research
01 Apr. 2018 - 31 Mar. 2021
Shimizu Yuki
Aiming to establish a technique for measurement of the profile of an ultra-precision free-form surface, a concept of the multi-beam angle sensor, in which the spatial position and the local slope of the point irradiated by a measurement laser beam in the group of the multiple laser beam can be obtained simultaneously, has been proposed. The theoretical investigation, as well as the development of the experimental setup including a fiber-based femtosecond laser source, has been carried out, and the feasibility of the proposed concept has been verified by the experimental results.
Japan Society for the Promotion of Science, Grant-in-Aid for Scientific Research (B), Tohoku University, 18H01345

A new method for precision displacement measurement based on the heat-flow detection by a micro thermal sensor combined with grating pattern structures
Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Research (Exploratory)
29 Jun. 2018 - 31 Mar. 2020
Shimizu Yuki
A new principle of a compact linear scale for displacement measurement, in which a heat flow generated between a micro thermal sensor and precision three-dimensionla micro pattern structures prepared on a scale surface is employed to read the scale displacement, has been proposed. A reading head composed of several micro thermal sensors patterned on a glass substrate has been fabricated based on the photolithography process. A prototype linear scale has been developed by combining the reading head with a diffraction grating, and the experimental results have demonstrated the feasibility of the proposed linear scale based on the detection of the heat flow between the micro thermal sensor and a scale grating.
Japan Society for the Promotion of Science, Grant-in-Aid for Challenging Research (Exploratory), Tohoku University, 18K18798

Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale comb
Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (S)
29 May 2015 - 31 Mar. 2020
Gao Wei
Aiming to create a Frontier of the precision optical metrology, the absolute optical scale comb that can be realized by a fusion of the two-axis optical nano-grid reference artifact and the optical frequency comb has been developed. A multi-beam interferometer has been developed to fabricate two-axis optical nano-grid reference artifact with a sub-micrometric grating pitch over a size of 100mm×100mm. In addition, the self-calibration method has been developed for the evaluation of the Z-out-of-flatness and the XY-directional pitch deviation of the optical nano-grid reference artifact. Furthermore, a method of generating the absolute optical scale comb with the enhancement of the dispersive function of the optical nano-grid reference artifact has been established.
Japan Society for the Promotion of Science, Grant-in-Aid for Scientific Research (S), Tohoku University, 15H05759

超高精度ナノグリッド基準と光絶対スケールコムの創出が拓く精密光計測フロンティア　　　　　　　　　　　　　　　
Grant-in-Aid for Scientific Research
Apr. 2015 - Mar. 2020
Competitive research funding

次世代の超精密ナノ計測を実現する光ナノグリッド基準の自律校正
科学研究費助成事業 特別研究員奨励費
07 Nov. 2016 - 31 Mar. 2019
清水 裕樹, CHEN XIUGUO
本研究では，次世代の超精密ナノ計測を実現する光ナノグリッド基準の自律校正の実現を目的とし，XYナノグリッド定在波を高安定ガラス基板レジスト層に露光して，サブマイクロメートルピッチ正弦波光ナノグリッド基準を製作する手法を検討する．レーザ波面を三つに分割して干渉させてXY ナノグリッド定在波を生成するための波面分割光学系に，XYビーム干渉による定在波の歪成分を解消するための偏光変調制御法を組み合わせて定在波を生成する．また，この生成定在波をガラス基板上に構成した薄膜レジスト層に露光してナノグリッドパターンを構成する．さらに，作成したナノグリッドについて，複数のグリッド回折光波面から校正基準を自律的に創製するという，自律校正の新原理によって，光ナノグリッド基準と評価用干渉形状測定機の誤差成分を分離して求める手法を検討する．
2年目となる29年度は，当初の予定どおりに，前年度に試作した光干渉グリッド定在波転写システムの基礎特性に関する実験的検証を進めるとともに，複数のグリッド回折光波面から校正基準を自律的に創製する自律校正の新原理によって，光ナノグリッド基準と評価用干渉形状測定機の誤差成分を分離して求める手法を検討した．新原理に基づく光ナノグリッド基準の評価アルゴリズムを構築し，計算機シミュレーションによりその妥当性を評価するとともに，自律校正システムのプロトタイプを構築し，実験的にもその妥当性を評価した．複数の１次回折光波面を測定するために，研究室で所有の光学式干渉形状測定機をベースとして，光ナノグリッド基準を測定機の光軸に合わせて回転する機構を有する実験装置を構築し，前述の光干渉グリッド定在波転写システムで創成した光ナノグリッド基準を自律校正し，そのZ平面度とXYピッチ誤差及び干渉形状測定機の参照鏡誤差を分離して求められることを実験的に実証した．
日本学術振興会, 特別研究員奨励費, 東北大学, 16F16367

２軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出
科学研究費助成事業
01 Apr. 2015 - 31 Mar. 2019
高 偉, 清水 裕樹, 伊東 聡
日本学術振興会, 基盤研究(A), 東北大学, 15H02212

Nanometric surface defect inspection based on the heat flow detection and the collaborative development of a compact scale for measurement of a nanometric displacement(Fostering Joint International Research)
Grants-in-Aid for Scientific Research Fund for the Promotion of Joint International Research (Fostering Joint International Research)
2017 - 2019
Shimizu Yuki
In this study, aiming to achieve a high resolution surface defect detection based on a micro thermal sensor through realizing the precise control of a gap between the sensor surface and the surface under inspection, a technique for measurement of the gap between two facing surfaces based on a mode-locked femtosecond laser source has been investigated, as well as the technique for stable control of the pulse repetition rate of the mode-locked femtosecond laser. In addition, a technique for measurement of a tilt angle of the two facing surfaces has also been developed to realize a newly proposed linear scale based on the micro thermal sensor, in which a heat flow between the micro thermal sensor and a scale grating is utilized to read the pattern structures on the scale.
Japan Society for the Promotion of Science, Fund for the Promotion of Joint International Research (Fostering Joint International Research), Tohoku University, 16KK0119

Defect detection for next-generation smoothly finished substrates based on a heat balance generated at a tiny gap
Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)
01 Apr. 2015 - 31 Mar. 2018
Shimizu Yuki
To realize precision surface defect detection required for the next-generation semiconductor or LED wafers having smooth surfaces, a new defect detection method utilizing a heat flow generated in a tiny gap has been proposed. A prototype micro thermal sensor composed of a thin metal film resistor and a pair of electrodes has successfully been fabricated. In addition, a micro thermal sensor probe, which has a function of detecting the displacement and tilts of the probe tip where the micro thermal sensor is mounted, has been developed. By using the developed micro thermal sensor probe, a method to detect a contact between a measurement surface and the tip of the probe has successfully been established. Furthermore, non-contact detection of micrometric surface patterns have successfully been demonstrated by the developed micro thermal sensor probe.
Japan Society for the Promotion of Science, Grant-in-Aid for Scientific Research (B), Tohoku University, Competitive research funding, 15H03907

Development of an optical method for evaluation of three-dimensional tool edge form with a high resolution beyond the diffraction limit
Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research
01 Apr. 2015 - 31 Mar. 2017
Shimizu Yuki, GAO Wei
For the quantitative evaluation of edge forms of next-generation high-precision cutting tools, a measurement method, in which a focused laser beam referred to as the micro-laser probe is employed to realize non-contact and high-speed tool edge evaluations, has been developed. A prototype optical setup with a high-precision objective lens for the micro-laser probe has been developed, and its basic characteristics have been evaluated in experiments. The experimental results have demonstrated that the developed micro-laser probe has a high measurement resolution beyond the diffraction limit for tool edge measurement. It has also been verified that the developed micro-laser probe can be applied for the quantitative evaluation of a tool edge contour. Furthermore, a feasibility of the micro-laser probe for evaluation of a tool cutting edge radius has also been verified throughout theoretical and experimental investigations.
Japan Society for the Promotion of Science, Grant-in-Aid for Challenging Exploratory Research, Tohoku University, Competitive research funding, 15K13839

A study for sub-nanometer ultra-high precision measurement method of micro cutting edge of diamond tool
Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research
01 Apr. 2014 - 31 Mar. 2016
Gao Wei, SHIMIZU YUKI
In this research, an ultra-precision form measurement has been verified for three dimensional measurement of micro-cutting edge of the diamond cutting tools. A reversal edge of the cutting edge, which is made by the indentation of the diamond cutting edge on the soft material, is created for the canceling of the measurement errors due to the AFM probe scanning. A force-sensor integrated fast tool servo (FS-FTS) was constructed for single point diamond micro-cutting and in-process measurement of both of the cutting force and tool displacement. By using the FS-FTS, the micrometric reversal edge of the cutting tool can be created during the measurement of the cutting force. Molecular dynamics (MD) simulations were introduced for the investigation and optimization of the creation of the reversal edge on the soft materials. The results of MD simulation indicated that 3D surface form of the diamond micro cutting edge could be obtained with sub-nanometric accuracy by using the reversal edge.
Japan Society for the Promotion of Science, Grant-in-Aid for Challenging Exploratory Research, Tohoku University, 26630015

Defect detection method utilizing micro-thermal balance at the nanometric gap for nanometric-smooth surface inspection
Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B)
01 Apr. 2013 - 31 Mar. 2015
SHIMIZU Yuki
To realize precision defect detection required for next-generation semiconductor or LED wafers having nanometric-smooth surfaces, a new defect detection method utilizing a heat balance in-between a nanometric gap has been proposed. Fabrication process for the contact-type thermal sensor was established, and μm-sized prototype sensors were successfully fabricated. Experimental results revealed that the fabricated sensor could detect a contact with an object having a tip radius of 40 nm in such a way that the thermal sensor detected its temperature change due to the frictional heat as a deviation of its electric resistance. Furthermore, it was also found in the experiments that a large temperature gradient between the thermal sensor and the measurement surface had a possibility of detecting the approach of the thermal sensor to the surface defect regardless of the frictional heat.
Japan Society for the Promotion of Science, Grant-in-Aid for Young Scientists (B), Tohoku University, 25820030

Development of a three-axis laser autocollimator for measurement of angular error motions of a next-generation ultra-precision positioning stage
Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)
01 Apr. 2012 - 31 Mar. 2015
GAO Wei, SHIMIZU Yuki, ITO So
To realize next-generation ultra-precision positioning systems having a sub-nanometric positioning accuracy, a new principle for angle measurement, which is referred to as a three-axis laser autocollimator in this research, has been proposed. A compact micro optical sensor head in a size of 50mmx30mmx30mm has been designed and developed based on the proposed method, and its feasibility has been investigated in experiments. It was verified in experiments that the developed sensor had resolutions of 0.01 arcsecond, 0.01 arcsecond and 0.2 arcsecond for measurement of roll, yaw and pitch motions, respectively. Furthermore, a new method, which is referred to as the edge effect in this research, for detecting position of a focused laser beam has also been proposed. Experimental results revealed that the proposed method could achieve measurement resolution of beyond 0.001arcsecond.
Japan Society for the Promotion of Science, Grant-in-Aid for Scientific Research (B), Tohoku University, Competitive research funding, 24360050

A new scanning electrostatic force microscope for noncontact surface profile measurement of micro-specimens of bio-optics
Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research
01 Apr. 2012 - 31 Mar. 2014
GAO WEI, SHIMIZU Yuki
In this research, a new scanning electrostatic force microscope has been developed for noncontact surface profile measurement of micro-specimens of bio-optics. A charged conducting probe tip is oscillated by a tuning fork quartz crystal resonator. The probe tip is scanned over the sample surface by using an XY scanner in such a way that the frequency shift of the tuning fork oscillation, which corresponds to the electrostatic force gradient, is kept constant by controlling the probe Z position with a Z scanner. A dual height method is proposed to accurately obtain the tip to sample distances through removing the influence of the electric field distribution on the sample surface.
Japan Society for the Promotion of Science, Grant-in-Aid for Challenging Exploratory Research, Tohoku University, 24656093

超精密加工用ダイヤモンド工具刃先のナノ・マイクロ摩耗定量評価技術の開発　　　　　　　　　　　　　　　
Apr. 2012 - Mar. 2014
Principal investigator, Competitive research funding

熱検知接触型センサによるウェハ表面欠陥の高感度検出技術に関する研究　　　　　　　　　　　　　　　
Grant-in-Aid for Scientific Research
Feb. 2011 - Mar. 2013
Principal investigator, Competitive research funding

Development of the thermal contact sensor for inspection of defects on wafer surface
Grants-in-Aid for Scientific Research Grant-in-Aid for Research Activity Start-up
2011 - 2012
SHIMIZU Yuki
A feasibility of newly-proposed concept for the detection of small defects on smoothly-finished surfaces has been investigated. An estimated temperature rise of the thermal element, which would detect small amount of frictional heat due to contact with a defect was analyzed based on FEM simulations. In addition, experiments were carried out with fabricated prototype of the thermal element to confirm the feasibility of the proposed concept.
Japan Society for the Promotion of Science, Grant-in-Aid for Research Activity Start-up, Tohoku University, 23860005

絶対位置測定装置および絶対位置測定方法
Patent right, 清水 裕樹, 高 偉, 松隈 啓, 石塚 稜, 国立大学法人東北大学
特願2019-057305, 25 Mar. 2019
特開2020-159771, 01 Oct. 2020
202003014371585430

変位測定装置および変位測定方法
Patent right, 清水 裕樹, 高 偉, 仲村 拓, 国立大学法人東北大学
特願2016-067247, 30 Mar. 2016
特開2017-181233, 05 Oct. 2017
特許第6570035号, 16 Aug. 2019
16 Aug. 2019
201703011120044648

切削工具切れ刃形状測定装置及び測定方法
Patent right, 清水 裕樹, 高 偉, 陳 遠流, 蔡 引テイ, 伊東 聡, 國枝 泰博, 篠田 知顕, 国立大学法人東北大学, 株式会社東京ダイヤモンド工具製作所
特願2017-218011, 13 Nov. 2017
特開2019-090638, 13 Jun. 2019
201903001302136466

ワーク円筒部の形状測定方法および形状測定装置
Patent right, 花岡 浩毅, 山崎 宏, 柴本 裕輔, 高 偉, 清水 裕樹, 伊東 聡, 町田 裕貴, 株式会社ハーモニック・ドライブ・システムズ, 国立大学法人東北大学
特願2015-053866, 17 Mar. 2015
特開2016-173320, 29 Sep. 2016
特許第6496924号, 22 Mar. 2019
22 Mar. 2019
201603001287898794

絶対角測定装置及び絶対角測定方法
Patent right, 清水 裕樹, 高 偉, 伊東 聡, 工藤 幸利, 国立大学法人東北大学
特願2014-192867, 22 Sep. 2014
特開2016-065719, 28 Apr. 2016
特許6391155
31 Aug. 2018
201603016087759800

回転角度検出装置および回転角度検出方法
Patent right, 清水 裕樹, 高 偉, 伊東 聡, 陳 遠流, 丸山 泰司, 国立大学法人東北大学
特願2016-012697, 26 Jan. 2016
特開2017-133892, 03 Aug. 2017
201703011634310860

回折格子を用いた姿勢角計測方法及び姿勢角計測装置
Patent right, 伊東 聡, 高 偉, 石川 龍弥, 清水 裕樹, 片岡 智史, 国立大学法人東北大学
特願2015-153984, 04 Aug. 2015
特開2017-032453, 09 Feb. 2017
201703019254544591

微細輪郭形状測定装置および微細輪郭形状測定方法
Patent right, 清水 裕樹, 高 偉, 張 城豪, 国立大学法人東北大学
特願2013-243881, 26 Nov. 2013
特開2015-102450, 04 Jun. 2015
201503033527564539

干渉リソグラフィにおける2次元パターンの一括露光手法
Patent right, 清水 裕樹, 高 偉, 李 星輝, 伊東 聡, 国立大学法人東北大学
特願2012-250959, 15 Nov. 2012
特開2014-099529, 29 May 2014
201403016978273687

平滑面検査装置
Patent right, 清水 裕樹, 高 偉, 蘆 文剣, 東 豊大, 国立大学法人東北大学
特願2012-097818, 23 Apr. 2012
特開2013-224887, 31 Oct. 2013
201303027242973864

表面形状測定方法及びその装置
Patent right, 伊東 聡, 高 偉, 清水 裕樹, 李 康源, 国立大学法人東北大学
特願2012-045595, 01 Mar. 2012
特開2013-181817, 12 Sep. 2013
201303005498550509

回折格子を用いた3次元干渉計参照面の校正方法、および3次元干渉計
Patent right, 高 偉, 清水 裕樹, 金 于載, 伊東 聡, 国立大学法人東北大学
特願2012-025720, 09 Feb. 2012
特開2013-160742, 19 Aug. 2013
201303052745234362

輪郭形状測定方法及び輪郭形状測定装置
Patent right, 清水 裕樹, 張 城豪, 高 偉, 浅井 岳見, 伊東 聡, 国立大学法人東北大学
特願2011-272901, 14 Dec. 2011
特開2013-124889, 24 Jun. 2013
201303083748032151

ステージ機構およびその駆動方法
Patent right, 清水 裕樹, 高 偉, 廬 文剣, 国立大学法人東北大学
特願2011-256202, 24 Nov. 2011
特開2013-108939, 06 Jun. 2013
201303008944698190

間隙測定装置、表面形状測定装置、間隙測定方法および表面形状測定方法
Patent right, 高 偉, 後藤 成晶, 清水 裕樹, 細渕 啓一郎, 国立大学法人東北大学
特願2011-143176, 28 Jun. 2011
特開2013-011471, 17 Jan. 2013
201303008552762958

夏休み子ども科学キャンパス　　　　　　　　　　　　　　　
30 Jul. 2014 - 31 Jul. 2014
Others
市内の小学校6年生を対象に，「不思議なうすい板で発電してみよう」と題して，簡単な電子工作を含む体験型学習教室の運営に講師として参加．

夏休み子ども科学キャンパス　　　　　　　　　　　　　　　
30 Jul. 2013 - 31 Jul. 2013
Others
市内の小学校6年生を対象に，「君のアイディアでいろんなものを測ってみよう」と題して，鉄道線路等々，身近なものの形状をはかる体験型学習教室の運営に講師として参加．

夏休み子ども科学キャンパス　　　　　　　　　　　　　　　
30 Jul. 2012 - 31 Jul. 2012
Others
市内の小学校6年生を対象に，「君のアイディアでいろんなものを測ってみよう」と題して，鉄道線路等々，身近なものの形状をはかる体験型学習教室の運営に講師として参加．

Mar. 2016 - Mar. 2016
ミリメートル級の長ストローク駆動におけるナノレベル位置決めを実現する超精密3軸XYZマイクロステージの開発
医療・バイオテクノロジーや精密計測・加工の分野において要求される，限られたスペース内での精密位置決めの実現を目的として，従来比1/10のサイズを有するコンパクト(縦横サイズ25 mm×25 mm)なナノ位置決め用マイクロステージを開発する．永久磁石を用いた独自のステージプレート保持機構を適用するとともに，ステージ案内機構である微小板バネ表面に新たに直接形成する高感度Cr-Nひずみゲージを変位検出センサとして活用し，独創的なステージシステム構成とする．これにより，与圧機構等を必要としないコンパクトな形態での2軸フィードバック制御を可能とし，同サイズ従来品の10倍以上であるXY各軸方向ストローク1 mmを，位置決め分解能10 nmを維持したまま実現する．更に，2軸XYマイクロステージに新たにZ軸移動機構を付与した，3軸XYZマイクロステージの開発を試み，その有効性を実証するとともに，本提案手法のメカトロニクス技術への波及効果を狙う．

Apr. 2015 - Apr. 2015
次世代ナノ位置決めステージを実現する超精密姿勢計測センサの開発
本研究では，受光素子アクティブ制御を適用したレーザー角度センサによる，超高分解能(0.001"以上)・広測定レンジ(±1000")実現を目指す．受光素子アクティブ制御機構を含む1軸角度測定用プロトタイプ光学系を構築し，その有効性を実証する．

Oct. 2012 - Oct. 2012
超精密加工用ダイヤモンド工具刃先のナノ・マイクロ摩耗定量評価技術の開発
シングルポイントダイヤモンド切削工具による超精密加工について，更なる加工精度の向上を目指し，mmオーダの広いスケールに渡る，nmオーダ分解能の高速工具輪郭形状定量評価技術の確立に向けた研究開発に取り組む．