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Yatabe Zenji

Research Center for Integrated Quantum ElectronicsAssociate Professor

Zenji Yatabe successfully climbed the 7,509 m peak of Mount Muztagh Ata, Xinjiang, China, in 2001. He studied at the École normale supérieure de Cachan (ENS Cachan), France from 2005 to 2006 as a Ph.D. scholar under the Collège doctoral Franco-Japonais (CDFJ) program. He received his Ph.D. degree in Biochemistry and Biotechnology from the Tokyo University of Agriculture and Technology (TUAT), Japan, in 2008. He worked as a Post-doctoral fellow from 2009 to 2010 at the Université de Pau et des Pays de l'Adour (UPPA), France. In 2011, he joined the Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University, Japan. In 2015, he moved to the Kumamoto University, Japan as an Assistant Professor, and was promoted to Associate Professor in 2020. In 2025, he was appointed Associate Professor at the Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University. His current research interests include characterization and control of surfaces and interfaces of compound semiconductor materials. He is a 2016 Japan Society of Applied Physics (JSAP) Outstanding Paper Awardee.

Google ScholarResearchgateScopus; Web of Science

Researcher basic information

■ Degree
  • Ph.D. in Biochemistry and Biotechnology, Tokyo University of Agriculture and Technology, 2008
  • Master of Agriculture, Tokyo University of Agriculture and Technology, 2005
  • Bachelor of Agriculture, Tokyo University of Agriculture and Technology, 2003
■ URL
researchmap URLホームページURL■ Various IDs
Researcher number
  • 00621773
ORCID IDResearcher ID
  • A-5506-2012
J-Global ID■ Research Keywords and Fields
Research Keyword
  • Compound semiconductors
  • Surfaces and interfaces
  • Mist-CVD
  • Fluctuations
Research Field
  • Nanotechnology/Materials, Thin film/surface and interfacial physical properties
  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering), Electron device and electronic equipment
  • Natural Science, Semiconductors, optical properties of condensed matter and atomic physics
  • Natural Science, Biophysics, chemical physics and soft matter physics

Career

■ Career
Career
  • 2025 - Present
    Hokkaido University, Research Area for Quantum Intelligent Devices, Research Center for Integrated Quantum Electronics (RCIQE), Associate Professor, Japan
  • 2023 - 2025
    Kumamoto University, Research and Education Institute for Semiconductors and Informatics (REISI), Associate Professor, Japan
  • 2020 - 2023
    Kumamoto University, Division of Informatics and Energy, Faculty of Advanced Science and Technology (FAST), Associate Professor, Japan
  • 2015 - 2020
    Kumamoto University, Priority Organization for Innovation and Excellence (POIE), Assistant Professor, Tenure track, Japan
  • 2015 - 2015
    Hokkaido University, Research Center for Integrated Quantum Electronics (RCIQE), Specially Appointed Assistant Professor, Japan
  • 2011 - 2015
    Hokkaido University, Research Center for Integrated Quantum Electronics (RCIQE), Postdoctoral Fellow, Japan
  • 2009 - 2010
    Université de Pau et des Pays de l'Adour (UPPA), Laboratoire des Fluides Complexes et leurs Réservoirs (LFC-R), Postdoctoral Fellow, France
Educational Background
  • 2005 - 2008, Tokyo University of Agriculture and Technology, United Graduate School of Agricultural Science, Department of Biochemistry and Biotechnology, Ph.D. in Biochemistry and Biotechnology, Japan
  • 2005 - 2006, École normale supérieure de Cachan (ENS Cachan), Laboratoire de Photophysique et Photochime Supramoléculaires et Macromoléculaire (PPSM), Collège Doctoral Franco-Japonais, France
  • 2003 - 2005, Tokyo University of Agriculture and Technology, Graduate School of Agriculture, Department of Natural Resources and Materials, Master of Agriculture, Japan
  • 1999 - 2003, Tokyo University of Agriculture and Technology, Faculty of Agriculture, Department of Environmental and Natural Resource Science, Bachelor of Agriculture, Japan
Committee Memberships
  • Apr. 2026 - Present
    Hokkaido Chapter, The Japan Society of Applied Physics (JSAP), Secretary, Society
  • 2025 - Present
    International Workshop on Nitride Semiconductors 2026 (IWN 2026), Member of Program Committee (Electron Devices)
  • 2025 - Present
    Compound Semiconductor Week 2026 (CSW2026), Local Arrangement, CSW Steering Committee
  • 2024 - Present
    The Japan Society of Applied Physics (JSAP), Program Committee member (Compound and power devices, process technology and characterization), Society
  • 2023 - Present
    電気学会 電子・情報・システム部門(C部門) 電子デバイス技術委員会 化合物半導体を用いた次世代高機能デバイス技術とアプリケーション調査専門委員会, 委員, Society
  • 2020 - 2025
    National Institute of Science and Technology Policy (NISTEP), The S&T Experts Network Investigator, Government
  • 2023 - 2023
    The Japan Society of Applied Physics, Local Steering Committee, The 84th JSAP Autumn Meeting 2023, Society
  • 2022 - 2022
    第13回 半導体材料・デバイスフォーラム, 実行委員
  • 2021 - 2021
    The Japan Society of Vacuum and Surface Science, Steering Committee, Annual Meeting of The Japan Society of Vacuum and Surface Science 2020, Society
  • 2018 - 2021
    Kansai Chapter, The Japan Society of Vacuum and Surface Science (JVSS), Secretary, Society
  • 2020 - 2020
    The Japan Society of Vacuum and Surface Science, Steering Committee, Annual Meeting of The Japan Society of Vacuum and Surface Science 2020, Society
  • 2019 - 2019
    Kyushu Chapter, The Japan Society of Applied Physics (JSAP), Steering Committee, JSAP Kyushu Chapter Annual Meeting 2019/The 4th Asian Applied Physics Conference (Asian-APC), Society

Research activity information

■ Awards
  • Dec. 2024, 熊本大学 大学院先導機構 URA推進室, 熊本大学Top 10 研究者 2024
    Citation部門、Top%部門
    谷田部 然治, Japan, 13160044
  • Sep. 2016, The Japan Society of Applied Physics, 38th JSAP Paper Award
    Characterization of electronic states at insulator/(Al)GaN interfaces for improved insulated gate and surface passivation structures of GaN-based transistors
    Zenji Yatabe;Yujin Hori;Joel T. Asubar;Masamichi Akazawa;Taketomo Sato;Tamotsu Hashizume, Official journal, Japan
■ Papers
  • Deposition of ternary hafnium aluminum oxide alloy thin films via single-source mist chemical vapor deposition
    Thin Nu Soe; Yusui Nakamura; Zenji Yatabe
    Journal of the Ceramic Society of Japan, 134, 5, 341, 346, The Ceramic Society of Japan, Feb. 2026, [Peer-reviewed], [Last author, Corresponding author], [Domestic magazines]
    English, Scientific journal, In this study, hafnium aluminum oxide (Hf1-xAlxOy) alloy thin films were successfully deposited using a fine-channel, single-source mist chemical vapor deposition (mist-CVD) system. The precursor solution was prepared by co-dissolving hafnium (Hf) and aluminum (Al) precursors in methanol. Hf1-xAlxOy films with different Al compositions in the range 0 ≤ x ≤ 1 were prepared and then characterized using grazing incidence X-ray diffraction (GIXRD), spectroscopic ellipsometry, and X-ray reflectivity measurements. GIXRD analysis confirmed that the incorporation of Al in HfO2 led to the formation of amorphous alloy films (x > 0.38). Increasing the Al content in the film decreased the refractive index and mass density while widening the bandgap, reflecting the compositional change from HfO2 to Al2O3. Moreover, the properties of the mist-CVD-derived Hf1-xAlxOy films were comparable to those reported in the literature, which were prepared via conventional vacuum-based atomic layer deposition. These findings suggest that mist-CVD is a promising solution-processed and non-vacuum technique for depositing high-quality Hf1-xAlxOy alloy films., 42033928
  • Low interface state density in Al2O3/n-GaN MOS capacitors with rapid deposition of Al2O3 gate insulator fabricated via mist-CVD
    Hadirah A. Radzuan; Masaya Fukumitsu; Ryota Ochi; Yusui Nakamura; Taketomo Sato; Zenji Yatabe
    Japanese Journal of Applied Physics, 64, 7, 070906-1, 5, IOP Publishing, Jul. 2025, [Peer-reviewed], [Last author, Corresponding author], [International Magazine]
    English, Scientific journal, This study highlights the potential of mist chemical vapor deposition (mist-CVD) as an eco-friendly, cost-effective gate insulator deposition method for GaN-based metal-oxide-semiconductor (MOS) devices. We deposited an Al2O3 gate insulator on homoepitaxial n-GaN structures via mist-CVD. We found that mist-CVD achieved a deposition rate of 30 nm min−1. From an admittance analysis, quantitative characterizations confirmed low interface state density at the Al2O3/n-GaN interface near the conduction band edge, in the range of 1010 cm−2eV−1. These findings demonstrate that mist-CVD exhibits performance comparable to the conventional deposition method, atomic layer deposition, highlighting the potential of mist-CVD for GaN-based MOS device applications., 42033928
  • Interface state density in mist chemical vapor deposited Al2O3/AlGaN/GaN structure
    Keigo Bito; Masaki Ishiguro; Hadirah A. Radzuan; Hikaru Hiroshige; Tomohiro Motoyama; Yusui Nakamura; Joel T. Asubar; Zenji Yatabe
    Japanese Journal of Applied Physics, 63, 8, 080905-1, 4, IOP Publishing, Aug. 2024, [Peer-reviewed], [Last author, Corresponding author], [International Magazine]
    English, Scientific journal, Uniform thickness Al2O3 thin films have been deposited by eco-friendly mist chemical vapor deposition (CVD). The obtained Al2O3 film have optical band gap value of more than 6.5 eV and refractive index of 1.64 at 633 nm (≈ 2.0 eV). The combination of capacitance–voltage (C–V) fitting method with non-linear least-squares algorithm, frequency dispersion, photo-assisted and proposed reverse bias-assisted C–V methods revealed interface state densities ranging from 1 × 1012 to 3 × 1013 cm−2eV−1 along the mist-Al2O3/AlGaN interface. These values are comparable to those reported for atomic layer deposited Al2O3 thin films., 42033928;42033915
  • Evidence of reduced interface states in Al2O3/AlGaN MIS structures via insertion of ex-situ regrown AlGaN layer
    Ali Baratov; Shinsaku Kawabata; Shun Urano; Itsuki Nagase; Masaki Ishiguro; Shogo Maeda; Takahiro Igarashi; Toi Nezu; Zenji Yatabe; Maciej Matys; Tetsu Kachi; boguslawa adamowicz; Akio Wakejima; Masaaki Kuzuhara; Akio Yamamoto; Joel T. Asubar
    Applied Physics Express, 15, 10, 104002-1, 5, IOP Publishing, Sep. 2022, [Peer-reviewed], [Internationally co-authored], [International Magazine]
    English, Scientific journal, We report on the impact of the 3-nm-thick ex-situ AlGaN regrown layer prior to insulator deposition on the interfacial properties of Al2O3/AlGaN/GaN metal-insulator-semiconductor (MIS) structures. MIS-capacitors (MIScaps) with regrown AlGaN layer exhibited anomalously excessive threshold voltage shift compared to reference sample without regrown AlGaN, suggesting highly reduced interface states density (Dit). Moreover, MIScaps with regrown AlGaN layer exhibited “spill-over” in the capacitance-voltage (C-V) profiles, further evidencing the improved Al2O3/AlGaN interfaces. Fabricated three-terminal MIS-HEMTs with regrown AlGaN showed less hysteresis in transfer curves, enhanced maximum drain current, and increased linearity over the reference device., 13160044
  • Ornstein–Uhlenbeck process in a human body weight fluctuation
    Zenji Yatabe; Joel T. Asubar
    Physica A: Statistical Mechanics and its Applications, 582, 126286-1, 6, Elsevier BV, Nov. 2021, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
    English, Scientific journal
  • Controlling surface/interface states in GaN-based transistors: Surface model, insulated gate, and surface passivation
    Joel T. Asubar; Zenji Yatabe; Dagmar Gregusova; Tamotsu Hashizume
    Journal of Applied Physics, 129, 12, 121102-1, 28, AIP Publishing, Mar. 2021, [Peer-reviewed], [Invited], [Internationally co-authored], [International Magazine]
    English, Scientific journal, Invited Tutorials Article

    Gallium nitride (GaN) is one of the front-runner materials among the so-called wide bandgap semiconductors that can provide devices having high breakdown voltages and are capable of performing efficiently even at high temperatures. The wide bandgap, however, naturally leads to a high density of surface states on bare GaN-based devices or interface states along insulator/semiconductor interfaces distributed over a wide energy range. These electronic states can lead to instabilities and other problems when not appropriately managed. In this Tutorial, we intend to provide a pedagogical presentation of the models of electronic states, their effects on device performance, and the presently accepted approaches to minimize their effects such as surface passivation and insulated gate technologies. We also re-evaluate standard characterization methods and discuss their possible pitfalls and current limitations in probing electronic states located deep within the bandgap. We then introduce our own photo-assisted capacitance–voltage (C–V) technique, which is capable of identifying and examining near mid-gap interface states. Finally, we attempt to propose some directions to which some audience can venture for future development., 13160044
  • GaN-based MIS-HEMTs with Al2O3 dielectric deposited by low-cost and environmental-friendly mist-CVD technique
    Rui Shan Low; Joel T. Asubar; Ali Baratov; Shunsuke Kamiya; Itsuki Nagase; Shun Urano; Shinsaku Kawabata; Hirokuni Tokuda; Masaaki Kuzuhara; Yusui Nakamura; Kenta Naito; Tomohiro Motoyama; Zenji Yatabe
    Applied Physics Express, 14, 3, 031004-1, 5, IOP Publishing, Feb. 2021, [Peer-reviewed], [Last author, Corresponding author], [International Magazine]
    English, Scientific journal, We report on the fabrication and characterization of AlGaN/GaN metal-insulator-semiconductor (MIS) capacitors and high-electron-mobility transistors (MIS-HEMTs) using a 5 nm thick Al2O3 dielectric deposited by cost-effective and environmental-friendly mist chemical vapor deposition (mist-CVD) technique. Practically hysteresis-free capacitance–voltage profiles were obtained from the fabricated two-terminal MIS-capacitors indicating high quality of the mist-Al2O3/AlGaN interface. Compared with reference Schottky-gate HEMTs, mist MIS-HEMTs exhibited much improved performance including higher drain current on-to-off ratio, much lower gate leakage current in both forward and reverse directions and lower subthreshold swing. These results demonstrate the potential and viability of non-vacuum mist-CVD Al2O3 in the development of high-performance GaN-based MIS-HEMTs., 13160044
  • Inverse integral transformation method to derive local viscosity distribution measured by optical tweezers
    Ruri Hidema; Zenji Yatabe; Hikari Takahashi; Ryusei Higashikawa; Hiroshi Suzuki
    Soft Matter, 16, 29, 6826, 6833, Royal Society of Chemistry (RSC), Jul. 2020, [Peer-reviewed], [International Magazine]
    English, Scientific journal, Complex fluids have a non-uniform local inner structure; this is enhanced under deformation, inducing a characteristic flow, such as an abrupt increase in extensional viscosity and drag reduction. However, it is challenging to derive and quantify the non-uniform local structure of a low-concentration solution. In this study, we attempted to characterize the non-uniformity of dilute and semi-dilute polymer and worm-like micellar solutions using the local viscosity at the micro scale. The power spectrum density (PSD) of the particle displacement, measured using optical tweezers, was analyzed to calculate the local viscosity, and two methods were compared. One is based on the PSD roll-off method, which yields a single representative viscosity of the solution. The other is based on our proposed method, called the inverse integral transformation method (IITM), for deriving the local viscosity distribution. The distribution obtained through the IITM reflects the non-uniformity of the solutions at the micro scale, i.e., the distribution widens above the entanglement concentrations of the polymer or viscoelastic worm-like micellar solutions., 13376278
  • Structural characterization of mist chemical vapor deposited amorphous aluminum oxide films using water-free solvent
    Zenji Yatabe; Koshi Nishiyama; Takaaki Tsuda; Yusui Nakamura
    Journal of the Ceramic Society of Japan, 127, 8, 590, 593, The Ceramic Society of Japan, Aug. 2019, [Peer-reviewed], [Lead author, Corresponding author], [Domestic magazines]
    English, Scientific journal, Excellent quality amorphous aluminum oxide (AlOx) thin films have been obtained by atmospheric pressure solution-processed mist chemical vapor deposition (mist-CVD) technique at 400°C using water-free solvent. X-ray fluorescence investigations verified the formation of AlOx film by the mist-CVD. X-ray diffraction, X-ray photoelectron spectroscopy, ellipsometry and X-ray reflectivity analyses revealed that the synthesized amorphous AlOx films have bandgap of 6.5 eV, refractive index of 1.64 and mass density of 2.78 g/cm3. These values are comparable to those reported for high-quality amorphous Al2O3 thin films deposited by atomic layer deposition method.
  • Synthesis and characterization of mist chemical vapor deposited aluminum titanium oxide films
    Zenji Yatabe; Koshi Nishiyama; Takaaki Tsuda; Kazuki Nishimura; Yusui Nakamura
    Japanese Journal of Applied Physics, 58, 7, 070905-1, 4, Jul. 2019, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
    English, Scientific journal, 13160044
  • On the presence of Ga2O sub-oxide in high-pressure water vapor annealed AlGaN surface by combined XPS and first-principles methods
    Mary Clare S. Escaño; Joel T. Asubar; Zenji Yatabe; Melanie Y. David; Mutsunori Uenuma; Hirokuni Tokuda; Yukiharu Uraoka; Masaaki Kuzuhara; Masahiko Tani
    Applied Surface Science, 481, 1120, 1126, Elsevier BV, Jul. 2019, [Peer-reviewed], [Internationally co-authored], [International Magazine]
    English, Scientific journal, We conducted X-ray photoelectron spectroscopy (XPS) and first-principles calculations based on density functional theory (DFT) to confirm the presence of Ga2O sub-oxide in high-pressure water vapor annealed AlGaN surface. We note that the Ga 3d XPS peak broadens and shifts towards higher binding energies, which suggests surface oxide formation. Deconvoluted Ga 3d XPS profiles between HPWVA-treated and reference samples reveal reasonable inclusion of Ga2O peak, suggesting formation of Ga2O sub-oxide. To theoretically confirm the presence of Ga2O, we calculated the Ga 3d core-level shift using initial state approximation. We obtained a 0.74 eV shift, in reasonable agreement with that of Ga2O. Moreover, based on the calculation of net charge on Ga using DFT, we also obtained a +1 oxidation state for Ga, indicating its existence in Ga2O form. By combining theory and experiment, therefore, we have explored the possibility of the formation of Ga2O sub-oxide, which may provide new avenues for obtaining highly stable operation in GaN-based devices.
  • Improved linearity, stability, and thermal performance of multi-mesa-channel AlGaN/GaN HEMTs
    Joel Tacla Asubar; Hirokuni Tokuda; Masaaki Kuzuhara; Zenji Yatabe; Kenya Nishiguchi; Tamotsu Hashizume
    PISIKA - Journal of the Physics Society of the Philippines, 1, 1, 11-1, 6, Physics Society of the Philippines (Samahang Pisika ng Pilipinas), Dec. 2018, [Peer-reviewed], [International Magazine]
    English, Scientific journal, With its wide bandgap of 3.4 eV, gallium nitride (GaN) is considered as a key semiconductor material for realizing ultra-low-loss power devices. However, GaN-based devices is still plagued by current collapse, which is the temporary reduction of current after application of electrical stress. In this work, we present the state-of-art Multi-Mesa-Channel (MMC) AlGaN/GaN HEMT being developed in our laboratory. The MMC HEMT is fabricated in a way to realize parallel mesa-shaped nano-channels separated by trenches. Investigations have revealed that the MMC HEMT is highly resistant to current collapse and other instabilities, making it a leading power electronics prospect.
  • Structural characteristics of a non-polar ZnS layer on a ZnO buffer layer formed on a sapphire substrate by mist chemical vapor deposition
    Koshi Okita; Katsuhiko Inaba; Zenji Yatabe; Yusui Nakamura
    Japanese Journal of Applied Physics, 57, 6, 065503-1, 7, IOP Publishing, May 2018, [Peer-reviewed], [International Magazine]
    English, Scientific journal
  • State of the art on gate insulation and surface passivation for GaN-based power HEMTs
    Tamotsu Hashizume; Kenya Nishiguchi; Shota Kaneki; Jan Kuzmik; Zenji Yatabe
    Materials Science in Semiconductor Processing, 78, 85, 95, Elsevier BV, May 2018, [Peer-reviewed], [Invited], [Last author], [Internationally co-authored], [International Magazine]
    English, Scientific journal
  • Analytical derivation of charge relaxation time distribution in transistor from current noise spectrum using inverse integral transformation method
    Zenji Yatabe; Shinya Inoue; Joel T. Asubar; Seiya Kasai
    Applied Physics Express, 11, 3, 031201-1, 4, IOP Publishing, Feb. 2018, [Peer-reviewed], [Lead author], [International Magazine]
    English, Scientific journal
  • Influence of oxygen-plasma treatment on AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors with HfO2 by atomic layer deposition: leakage current and density of states reduction
    R. Stoklas; D. Gregušová; M. Blaho; K. Fröhlich; J. Novák; M. Matys; Z. Yatabe; P. Kordoš; T. Hashizume
    Semiconductor Science and Technology, 32, 4, 045018-1, 8, Apr. 2017, [Peer-reviewed], [Internationally co-authored], [International Magazine]
    English, Scientific journal
  • Improvement of m-plane ZnO films formed on buffer layers on sapphire substrates by mist chemical vapor deposition
    Hironobu Tanoue; Masato Takenouchi; Tatsuya Yamashita; Shohei Wada; Zenji Yatabe; Shoji Nagaoka; Yoshihiro Naka; Yusui Nakamura
    Physica Status Solidi A – Applications and Materials Science, 214, 3, 1600603-1, 5, Wiley, Mar. 2017, [Peer-reviewed], [International Magazine]
    English, Scientific journal, The crystal quality of ZnO films grown by mist chemical vapor deposition (mist-CVD) was improved by introducing ZnO buffer layers on sapphire substrates. The ZnO films were grown by high-speed rotation-type mist-CVD with a ZnCl2 aqueous solution, which provided uniform epitaxial layers over 2-inch wafers. To grow the ZnO buffer layers, it is necessary to form small grains of polycrystal. Therefore, we attempted to grow the ZnO buffer layers using a Zn(CH3COO)2 aqueous solution, which provides a small grain size of about 100 nm. By using the buffer layers, the full width at half-maximum of an X-ray ω-rocking curve for the ZnO film was reduced from 0.69° to 0.38°, showing improvement of the crystal quality.
  • Single crystalline SnO2 thin films grown on m-plane sapphire substrate by mist chemical vapor deposition
    Zenji Yatabe; Takaaki Tsuda; Junya Matsushita; Takehide Sato; Tatsuya Otabe; Koji Sue; Shoji Nagaoka; Yusui Nakamura
    Physica Status Solidi C – Current Topics in Solid State Physics, 14, 1-2, 1600148-1, 4, Wiley, Jan. 2017, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
    English, International conference proceedings, 11191314
  • On the origin of interface states at oxide/III-nitride heterojunction interfaces
    M. Matys; B. Adamowicz; A. Domanowska; A. Michalewicz; R. Stoklas; M. Akazawa; Z. Yatabe; T. Hashizume
    Journal of Applied Physics, 120, 22, 225305-1, 11, Dec. 2016, [Peer-reviewed], [Internationally co-authored], [International Magazine]
    English, Scientific journal
  • Highly-stable and low-state-density Al2O3/GaN interfaces using epitaxial n-GaN layers grown on free-standing GaN substrates
    Shota Kaneki; Joji Ohira; Shota Toiya; Zenji Yatabe; Joel T. Asubar; Tamotsu Hashizume
    Applied Physics Letters, 109, 16, 162104-1, 5, Oct. 2016, [Peer-reviewed], [International Magazine]
    English, Scientific journal
  • Insulated gate and surface passivation structures for GaN-based power transistors
    Zenji Yatabe; Joel T. Asubar; Tamotsu Hashizume
    Journal of Physics D: Applied Physics, 49, 39, 393001-1, 19, Oct. 2016, [Peer-reviewed], [Invited], [Lead author, Corresponding author], [International Magazine]
    English, Scientific journal
  • Characterization of capture cross sections of interface states in dielectric/III-nitride heterojunction structures
    M. Matys; R. Stoklas; J. Kuzmik; B. Adamowicz; Z. Yatabe; T. Hashizume
    Journal of Applied Physics, 119, 20, 205304-1, 7, May 2016, [Peer-reviewed], [Internationally co-authored], [International Magazine]
    English, Scientific journal
  • Formation of GaN porous structures with improved structural controllability by photoassisted electrochemical etching
    Yusuke Kumazaki; Zenji Yatabe; Taketomo Sato
    Japanese Journal of Applied Physics, 55, 4S, 04EJ12-1, 5, Mar. 2016, [Peer-reviewed], [International Magazine]
    English, Scientific journal, 10390615
  • Large photocurrents in GaN porous structures with a redshift of the photoabsorption edge
    Taketomo Sato; Yusuke Kumazaki; Hirofumi Kida; Akio Watanabe; Zenji Yatabe; Soichiro Matsuda
    Semiconductor Science and Technology, 31, 1, 014012-1, 6, Jan. 2016, [Peer-reviewed], [International Magazine]
    English, Scientific journal, 10390615
  • Impact of oxygen plasma treatment on the dynamic on-resistance of AlGaN/GaN high-electron-mobility transistors
    Joel T. Asubar; Yoshiki Sakaida; Satoshi Yoshida; Zenji Yatabe; Hirokuni Tokuda; Tamotsu Hashizume; Masaaki Kuzuhara
    Applied Physics Express, 8, 11, 111001-1, 4, Nov. 2015, [Peer-reviewed], [International Magazine]
    English, Scientific journal
  • Bias-dependent Photoabsorption Properties of GaN Porous Structures under Back-side Illumination
    Taketomo Sato; Hirofumi Kida; Yusuke Kumazaki; Zenji Yatabe
    ECS Transactions, 69, 2, 161, 166, The Electrochemical Society, Oct. 2015, [Peer-reviewed], [Last author], [International Magazine]
    English, International conference proceedings, 10390615
  • Current Collapse Reduction in AlGaN/GaN HEMTs by High Pressure Water Vapor Annealing
    Joel T. Asubar; Yohei Kobayashi; Koji Yoshitsugu; Zenji Yatabe; Hirokuni Tokuda; Masahiro Horita; Yukiharu Uraoka; Tamotsu Hashizume; Masaaki Kuzuhara
    IEEE Transactions on Electron Devices, 62, 8, 2423, 2428, Aug. 2015, [Peer-reviewed], [International Magazine]
    English, Scientific journal
  • Interface trap states in Al2O3/AlGaN/GaN structure induced by inductively coupled plasma etching of AlGaN surfaces
    Zenji Yatabe; Joel T. Asubar; Taketomo Sato; Tamotsu Hashizume
    Physica Status Solidi (a) - Applications and Materials Science, 212, 5, 1075, 1080, May 2015, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
    English, Scientific journal
  • Formation of GaN-Porous Structures Using Photo-Assisted Electrochemical Process in Back-Side Illumination Mode
    Akio Watanabe; Yusuke Kumazaki; Zenji Yatabe; Taketomo Sato
    ECS Electrochemistry Letters, 4, 5, H11, H13, Mar. 2015, [Peer-reviewed], [International Magazine]
    English, Scientific journal, 10390615
  • Calculating relaxation time distribution function from power spectrum based on inverse integral transformation method
    Zenji Yatabe; Toru Muramatsu; Joel T. Asubar; Seiya Kasai
    Physics Letters A, 379, 7, 738, 742, Mar. 2015, [Peer-reviewed], [Lead author], [International Magazine]
    English, Scientific journal
  • Characterization of electronic states at insulator/(Al)GaN interfaces for improved insulated gate and surface passivation structures of GaN-based transistors
    Zenji Yatabe; Yujin Hori; Wan-Cheng Ma; Joel T. Asubar; Masamichi Akazawa; Taketomo Sato; Tamotsu Hashizume
    Japanese Journal of Applied Physics, 53, 10, 100213-1, 10, Sep. 2014, [Peer-reviewed], [Lead author], [International Magazine]
    English, Scientific journal
  • Correlation between Structural and Photoelectrochemical Properties of GaN Porous Nanostructures Formed by Photo-Assisted Electrochemical Etching
    Yusuke Kumazaki; Akio Watanabe; Zenji Yatabe; Taketomo Sato
    Journal of The Electrochemical Society, 161, 10, 705, 709, Aug. 2014, [Peer-reviewed], [International Magazine]
    English, Scientific journal, 10390615
  • Reduced thermal resistance in AlGaN/GaN multi-mesa-channel high electron mobility transistors
    Joel T. Asubar; Zenji Yatabe; Tamotsu Hashizume
    Applied Physics Letters, 105, 5, 053510-1, 5, Apr. 2014, [Peer-reviewed], [International Magazine]
    English, Scientific journal
  • Interface Characterization and Control of GaN-based Heterostructures
    Tamotsu HASHIZUME; Zenji YATABE; Taketomo SATO
    Hyomen Kagaku, 35, 2, 96, 101, Surface Science Society Japan, Feb. 2014, [Peer-reviewed], [Domestic magazines]
    Japanese, Scientific journal, Interface properties of GaN-based heterostructures have been characterized. Schottky contacts on dry-etched n-GaN layers showed leaky I-V characteristics. An anneal process at 400°C was effective in recovering the rectifying characteristics. To characterize interface properties of Al2O3 insulated gates on AlGaN/GaN structures with and without the inductively coupled plasma (ICP) etching of AlGaN, we have developed a C-V calculation method taking into account electronic state charges at the Al2O3/AlGaN interface and a photoassisted C-V technique utilizing photons with energies less than the bandgap of AlGaN. It was found that the ICP etching caused the monolayer-level interface roughness, disorder of the chemical bonds and formation of various types of defect complexes at the AlGaN surface, resulting in poor C-V characteristics due to high-density interface states at the Al2O3/AlGaN interface.
  • Characterization of interface states in Al2O3/AlGaN/GaN structures for improved performance of high-electron-mobility transistors
    Y. Hori; Z. Yatabe; T. Hashizume
    Journal of Applied Physics, 114, 24, 244503-1, 8, AIP Publishing, Dec. 2013, [Peer-reviewed], [International Magazine]
    English, Scientific journal
  • Investigation on optical absorption properties of electrochemically formed porous InP using photoelectric conversion devices
    Yusuke Kumazaki; Tomohito Kudo; Zenji Yatabe; Taketomo Sato
    Applied Surface Science, 279, 116, 120, Elsevier BV, Jul. 2013, [Peer-reviewed], [International Magazine]
    English, Scientific journal, 10390615
  • Formation and Photoelectrical Measurements of Pt Schottky Interfaces on InP Porous Structures
    Ryohei Jinbo; Yusuke Kumazaki; Zenji Yatabe; Taketomo Sato
    ECS Transactions, 50, 37, 247, 252, Mar. 2013, [Peer-reviewed], [International Magazine]
    English, International conference proceedings, 10390615
  • Effects of Cl2-Based Inductively Coupled Plasma Etching of AlGaN on Interface Properties of Al2O3/AlGaN/GaN Heterostructures
    Zenji Yatabe; Yujin Hori; Sungsik Kim; Tamotsu Hashizume
    Applied Physics Express, 6, 1, 016502-1, 4, IOP Publishing, Dec. 2012, [Peer-reviewed], [Lead author, Corresponding author], [International Magazine]
    English, Scientific journal
  • Characterization of Low-Frequency Noise in Etched GaAs Nanowire Field-Effect Transistors Having SiNx Gate Insulator
    Toru Muramatsu; Kensuke Miura; Yuta Shiratori; Zenji Yatabe; Seiya Kasai
    Japanese Journal of Applied Physics, 51, 6S, 06FE18-1, 5, Jun. 2012, [Peer-reviewed], [International Magazine]
    English, Scientific journal
  • Large photocurrent-response observed at Pt/InP Schottky interface formed on anodic porous structure
    Ryohei Jinbo; Tomohito Kudo; Zenji Yatabe; Taketomo Sato
    Thin Solid Films, 520, 17, 5710, 5714, Jun. 2012, [Peer-reviewed], [International Magazine]
    English, Scientific journal
  • Contraction behaviors of Vorticella sp. stalk investigated using high-speed video camera. II: Viscosity effect of several types of polymer additives
    Junko Kamiguri; Noriko Tsuchiya; Ruri Hidema; Zenji Yatabe; Masahiko Shoji; Chihiro Hashimoto; Robert Bernard Pansu; Hideharu Ushiki
    BIOPHYSICS, 8, 11, 19, Biophysical Society of Japan, Jan. 2012, [Peer-reviewed], [Internationally co-authored], [International Magazine]
    English, Scientific journal
  • Contraction behaviors of Vorticella sp. stalk investigated using high-speed video camera. I: Nucleation and growth model
    Junko Kamiguri; Noriko Tsuchiya; Ruri Hidema; Masatoshi Tachibana; Zenji Yatabe; Masahiko Shoji; Chihiro Hashimoto; Robert Bernard Pansu; Hideharu Ushiki
    BIOPHYSICS, 8, 1, 9, Biophysical Society of Japan, Jan. 2012, [Peer-reviewed], [Internationally co-authored], [Domestic magazines]
    English, Scientific journal
  • Image analysis of thickness in flowing soap films. I: effects of polymer
    Ruri Hidema; Zenji Yatabe; Masahiko Shoji; Chihiro Hashimoto; Robert Pansu; Gabriel Sagarzazu; Hideharu Ushiki
    Experiments in Fluids, 49, 3, 725, 732, Sep. 2010, [Peer-reviewed], [Internationally co-authored], [International Magazine]
    English, Scientific journal
  • Size evolution of onion structure under oscillatory shear flow
    Zenji Yatabe; Ruri Hidema; Chihiro Hashimoto; Robert Bernard Pansu; Hideharu Ushiki
    Chemical Physics Letters, 475, 1-3, 101, 104, Jun. 2009, [Peer-reviewed], [Lead author, Corresponding author], [Internationally co-authored], [International Magazine]
    English, Scientific journal
  • Formation process of shear-induced onion structure made of quaternary system SDS/octanol/water/NaCl
    Zenji Yatabe; Yasufumi Miyake; Masatoshi Tachibana; Chihiro Hashimoto; Robert Pansu; Hideharu Ushiki
    Chemical Physics Letters, 456, 1-3, 31, 35, Apr. 2008, [Peer-reviewed], [Lead author, Corresponding author], [Internationally co-authored], [International Magazine]
    English, Scientific journal
  • Fluorescence lifetime imaging microscopy for in situ observation of the nanocrystallization of rubrene in a microfluidic set-up
    Serge Desportes; Zenji Yatabe; Sébastien Baumlin; Valérie Génot; Jean-Pierre Lefèvre; Hideharu Ushiki; Jacques Alexis Delaire; Robert Bernard Pansu
    Chemical Physics Letters, 446, 1-3, 212, 216, Sep. 2007, [Peer-reviewed], [Internationally co-authored], [International Magazine]
    English, Scientific journal
■ Other Activities and Achievements
  • Cover
    Thin Nu Soe; Yusui Nakamura; Zenji Yatabe, Journal of the Ceramic Society of Japan, 134, 5, H5, 1, May 2026, [Invited], [Last author, Corresponding author], [International Magazine]
    The Ceramic Society of Japan, English, 42033928
  • Analysis of 1/f noise by extracting charge relaxation time distribution using inverse integral transformation
    Zenji Yatabe; Seiya Kasai, The Papers of Technical Meeting on "Electron Devices", IEE Japan, EDD-26-037, 11, 14, Mar. 2026, [Lead author, Corresponding author], [Domestic magazines]
    The Institute of Electrical Engineers of Japan (IEEJ), Japanese, Summary national conference, 42033928
  • Mist Thermal Oxidation of GaN Surface
    Zenji Yatabe; Ryosuke Hamasuna; Takumi Hirakura; Thin Nu Soe; Yusui Nakamura, IEICE technical report. Electron devices, 125, 257, 53, 56, Nov. 2025, [Lead author, Corresponding author], [Domestic magazines]
    Mist chemical vapor deposition (CVD) is an eco-friendly and cost-effective technique mainly used for oxide semiconductor growth. Recently, it has also been applied to other processes such as gate insulator deposition. In this study, we investigated the thermal oxidation of Si and GaN surfaces using mist-CVD to clarify its oxidation mechanism. The mist-oxidized SiO₂ films exhibited a refractive index and breakdown field comparable to those of conventional thermal SiO₂. For GaN, Ga₂O₃ films were formed above 800 °C. The analysis results indicate that the mist thermal oxidation mechanism is more similar to wet oxidation than to dry oxidation., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese, 42033928
  • Mist Chemical Vapor Deposited Gate Dielectrics for GaN-Based MOS Device
    Zenji Yatabe; Masaya Fukumitsu; Hiroshi Otake; Takumi Hirakura; Hadirah Radzuan; Ryota Ochi; Yusui Nakamura; Taketomo Sato, IEICE technical report. Electron devices, 124, 278, 69, 72, Nov. 2024, [Lead author, Corresponding author], [Domestic magazines]
    GaN-based metal-oxide-semiconductor (MOS) transistors are promising for next-generation high-frequency and high-power devices. A gate dielectric plays an important role in blocking the leakage current. High-quality gate dielectrics have been reportedly obtained using atomic layer deposition (ALD) technique and related vacuum deposition methods. One alternative approach to obtain high-quality gate dielectrics is the mist chemical vapor deposition (mist-CVD), which can deposit various metal oxide thin films from relative non-toxic and nonpyrophoric aqueous solution under atmospheric pressure. In this work, we report on the deposition of Al2O3-based thin films by mist-CVD method. Finally, we have fabricated and characterized GaN-based MOS devices with gate dielectrics deposited by mist-CVD., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese, Introduction scientific journal, 42033928;42033915
  • Insulated gate structures for GaN-based devices using mist-CVD method
    Zenji Yatabe; Hadirah Radzuan; Keigo Bito; Masaya Fukumitsu; Ryota Ochi; Taketomo Sato, The Papers of Technical Meeting on "Electron Devices", IEE Japan, EDD-24-032, 13, 17, Jun. 2024, [Lead author, Corresponding author], [Domestic magazines]
    GaN-based transistors are promising for high-power and high-frequency devices. A gate insulator plays an important role in blocking the leakage current. In this study, we report on the deposition of Al2O3 thin films by mist-CVD method. Finally, we have characterized GaN-based MIS capacitors using Al2O3 insulator deposited by mist-CVD., The Institute of Electrical Engineers of Japan (IEEJ), Japanese, Summary national conference, 42033928;42033915
  • Mist chemical vapor deposited-gate insulators for GaN-based MIS devices applications
    Zenji Yatabe; Yusui Nakamura; Joel T. Asubar, 2022 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK), 1, 3, Nov. 2022, [Invited], [Lead author, Corresponding author], [International Magazine]
    Mist chemical vapor deposition (mist-CVD) is a non-vacuum technique for depositing various metal oxide/sulfite films from relative non-toxic and nonpyrophoric aqueous solution, resulting in relatively simple, low-cost and fast deposition rate under atmospheric pressure. Recent reports have demonstrated the capability of mist-CVD as an able replacement for conventional vacuum deposition methods in some applications. In this work, firstly state-of-the-art literature reports on mist-CVD techniques are reviewed. Finally, we highlight the important progress in mist-CVD deposited-gate insulators for GaN-based metal-insulator-semiconductor (MIS) devices applications., Institute of Electrical and Electronics Engineers (IEEE), English, Introduction international proceedings
  • Mist chemical vapor deposited-Al2O3/AlGaN interfacial characterization for GaN MIS-HEMTs
    Tomohiro Motoyama; Zenji Yatabe; Yusui Nakamura; Ali Baratov; Rui Shan Low; Shun Urano; Joel T. Asubar; Masaaki Kuzuhara, 2021 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK), 1, 2, Nov. 2021, [Corresponding author], [International Magazine]
    Amorphous Al2O3 gate insulator on AlGaN/GaN structure have been deposited by cost-effective mist chemical vapor deposition (mist-CVD) technique. The properties of deposited mist-Al2O3 gate insulators are comparable to those reported for high-quality amorphous Al2O3 films deposited by atomic layer deposition (ALD) method. In addition, we have fabricated AlGaN/GaN metal–insulator–semiconductor (MIS) diodes using Al2O3 gate insulator deposited by mist-CVD. We obtained practically hysteresis-free with spill-over behavior in capacitance–voltage (C–V) characteristics from the fabricated mist-Al2O3 MIS diodes suggesting high interfacial quality of the mist-Al2O3/AlGaN interface., Institute of Electrical and Electronics Engineers (IEEE), English, Introduction international proceedings, 13160044
  • Recessed gate GaN-based MIS-HEMTs with Al2O3 gate dielectric deposited by mist-CVD method
    M. Ishiguro; S. Urano; R. S. Low; M. Faris; I. Nagase; A. Baratov; J. T. Asubar; T. Motoyama; Y. Nakamura; Z. Yatabe; M. Kuzuhara, 2021 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK), 1, 2, Nov. 2021, [International Magazine]
    We report on the fabrication of recessed gate AlGaN/GaN metal-insulator-semiconductor (MIS) high-electron-mobility transistors (HEMTs) with Al2O3 gate dielectric deposited by mist-CVD method. The fabricated device exhibited a high positive threshold voltage of 1.5 V in combination of high maximum drain current of 450 mA/mm, demonstrating robust enhancement-mode operation., Institute of Electrical and Electronics Engineers (IEEE), English, Introduction international proceedings, 13160044
  • Electrical properties of GaN-based MIS-HEMTs with Al2O3 gate insulator deposited by ALD and mist-CVD techniques
    S. Urano; R. S. Low; M. Faris; M. Ishiguro; I. Nagase; A. Baratov; J. T. Asubar; T. Motoyama; Y. Nakamura; Z. Yatabe; M. Kuzuhara, 2021 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK), 1, 2, Nov. 2021, [International Magazine]
    In this work, we compare the performance of AlGaN/GaN metal-insulator-semiconductor high-electron mobility transistors (MIS-HEMTs) with gate dielectric Al2O3 prepared by either ALD or mist-CVD. While for MIS-HEMTS with ALD-Al2O3 gate insulator, the threshold voltage becomes more negative with increasing thickness of Al2O3 as expected, we found that for MIS-HEMTS with mist-Al2O3 gate insulator, the threshold voltage is anomalously almost independent of Al2O thickness. We believe that these findings have potential exciting applications for achieving normally-off operation in AlGaN/GaN MIS-HEMTs., Institute of Electrical and Electronics Engineers (IEEE), English, Introduction international proceedings, 13160044
  • GaN-based MIS-HEMTs with Mist Chemical Vapor Deposited Al2O3
    Rui Shan Low; Itsuki Nagase; Ali Baratov; Joel Tacla Asubar; Hirokuni Tokuda; Masaaki Kuzuhara; Zenji Yatabe; Kenta Naito; Motoyama Tomohiro; Yusui Nakamura, IEICE technical report. Electron devices, 120, 254, 49, 52, Nov. 2020, [Corresponding author], [Domestic magazines]
    We have fabricated AlGaN/GaN metal-insulator-semiconductor high-electron mobility transistors (MIS-HEMTs) using Al2O3 gate dielectric deposited by mist chemical vapor deposition (mist-CVD) technique. The mist-Al2O3 MISHEMTs exhibited highly improved performance compared with the Schottky-gate devices. We obtained practically hysteresis-free transfer curves and capacitance-voltage profiles from the fabricated mist-Al2O3 MIS-HEMTs suggesting high interfacial quality of the mist-Al2O3/AlGaN structure., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese, 13160044
  • Epitaxial Tin Oxide Films on Sapphire Substrate Grown by Mist Chemical Vapor Deposition
    Thant Zin Win; Takumi Furukawa; Yuki Kanetake; Katsuhiko Inaba; Zenji Yatabe; Yusui Nakamura, Proceedings of 10th International Conference on Science and Engineering 2019, ICSE2019, EE-2, Dec. 2019
    English, Introduction international proceedings
  • Synthesis and characterization of AlTiO films by mist-CVD
    Zenji Yatabe; Koshi Nishiyama; Takaaki Tsuda; Kazuki Nishimura; Yusui Nakamura, 2019 Compound Semiconductor Week (CSW), TuP-H-3, May 2019, [Lead author, Corresponding author], [International Magazine]
    Institute of Electrical and Electronics Engineers (IEEE), English, Introduction international proceedings, 13160044
  • Effect of Buffer Layer on Improvement of SnO2 Thin Film on Sapphire Substrate Formed by Mist Chemical Vapor Deposition
    Thant Zin Win; Takumi Furukawa; Yudai Tanaka; Koshi Okita; Koji Sue; Zenji Yatabe; Yusui Nakamura, 2019 Compound Semiconductor Week (CSW), TuP-H-5, May 2019, [International Magazine]
    Institute of Electrical and Electronics Engineers (IEEE), English, Introduction international proceedings
  • Characterization of amorphous aluminium oxide thin films synthesized by mist-CVD
    Zenji Yatabe; Koshi Nishiyama; Takaaki Tsuda; Kazuki Nishimura; Yusui Nakamura, 2019 Compound Semiconductor Week (CSW), TuP-H-6, May 2019, [Lead author, Corresponding author], [International Magazine]
    Institute of Electrical and Electronics Engineers (IEEE), English, Introduction international proceedings, 13160044
  • Effect of Buffer Layer on the Structural Properties of Tin Oxide Thin Film on Sapphire Substrate by Mist Chemical Vapor Deposition
    Thant Zin Win; Takumi Furukawa; Yudai Tanaka; Koshi Okita; Kensuke Minami; Koji Sue; Zenji Yatabe; Yusui Nakamura, Proceedings of the Engineering Workshop 2018, OC- 6, Nov. 2018, [Domestic magazines]
    English, Introduction international proceedings
  • Formation of N-doped ZnO thin films formed by annealing in NH3 gas ambient
    Takumi Furukawa; Masato Takenouchi; Yudai Tanaka; Koji Sue; Shoji Nagaoka; Zenji Yatabe; Yusui Nakamura, Proceedings of the Engineering Workshop 2018, PC- 6, Nov. 2018, [Domestic magazines]
    English, Introduction international proceedings
  • Epitaxial growth of non-polar ZnO films on buffer layers on sapphire substrates by mist chemical vapor deposition
    Yudai Tanaka; Yuki Nagao; Takumi Furukawa; Zenji Yatabe; Koji Sue; Shoji Nagaoka; Yusui Nakamura, Proceedings of the Engineering Workshop 2018, PC-9, Nov. 2018, [Domestic magazines]
    English
  • Mist-CVD deposition of AlTiO thin films for potential applications in AlGaN/GaN MOS-HEMTs
    K. Nishiyama; K. Nishimura; T. Tsuda; Z. Yatabe; K. Sue; Y. Nakamura, Proceedings of the Engineering Workshop 2018, PC- 3, Nov. 2018, [Corresponding author], [Domestic magazines]
    English, Introduction international proceedings
  • Mist-chemical vapor deposition grown-single crystalline oxide semiconductors
    Zenji Yatabe; Hironobu Tanoue; Koshi Okita; Masato Takenouchi; Takahiro Ishida; Takaaki Tsuda; Tomoki Mikuriya; Shoji Nagaoka; Koji Sue; Yusui Nakamura, Proceedings of the 35th Samahang Pisika ng Pilipinas Physics Conference, 35, 1, INV-1B-01-1, 4, Jun. 2017, [Invited], [Lead author, Corresponding author], [International Magazine]
    English, Introduction international proceedings
  • Cover Picture: Phys. Status Solidi C 1–2/2017
    Zenji Yatabe; Takaaki Tsuda; Junya Matsushita; Takehide Sato; Tatsuya Otabe; Koji Sue; Shoji Nagaoka; Yusui Nakamura, Physica Status Solidi C – Current Topics in Solid State Physics, 14, 1-2, 1770012-1, 1, Jan. 2017, [Invited], [Lead author], [International Magazine]
    In order to obtain good crystallographic properties of tin dioxide, a candidate for realizing next-generation electrical and optical devices, relatively expensive film formation methods such as MOCVD or MBE are required. One alternative approach is a mist chemical vapour deposition (mist-CVD), which can form various oxide semiconductors under atmospheric pressure with a simple and less expensive technique. Yatabe et al. (article No. 1600148) have grown SnO2 thin films on 2-inch diameter m-plane sapphire substrates by mist-CVD at atmospheric pressure. From XRD and EBSD measure¬ments the authors found that the SnO2 films were epitaxially grown on the substrates under optimised growth condition. Epitaxial growth of the SnO2 thin film at three typical areas on the substrate was confirmed by EBSD measurements. Finally, a second SnO2 layer was overgrown on the single-crystalline SnO2 thin film, which functioned as a buffer layer (see cover image). This method drastically improved the surface rough¬ness of the second SnO2 layer., Wiley, English, Others, 11191314
  • Improved linearity, stability, and thermal performance of multi-mesa-channel AlGaN/GaN HEMTs
    Joel T. Asubar; Hirokuni Tokuda; Masaaki Kuzuhara; Zenji Yatabe; Kenya Nishiguchi; Tamotsu Hashizume, Proceedings of the 34th Samahang Pisika ng Pilipinas Physics Congress, 34, INV-1B-01-1, 4, Aug. 2016, [Invited], [International Magazine]
    English, Introduction international proceedings
  • Improvement of m-plane ZnO films formed on buffer layers on sapphire substrates by mist chemical vapor deposition
    Hironobu Tanoue; Tatsuya Yamashita; Shohei Wada; Zenji Yatabe; Shoji Nagaoka; Yusui Nakamura, 2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS), 53, MoP-ISCS-103, 34, Jun. 2016, [International Magazine]
    Institute of Electrical and Electronics Engineers (IEEE), English, Introduction international proceedings
  • SnO2 thin films grown on m-plane sapphire substrate by mist chemical vapor deposition
    Tatsuya Otabe; Takehide Sato; Junya Matsushita; Zenji Yatabe; Koji Sue; Shoji Nagaoka; Yusui Nakamura, 2016 Compound Semiconductor Week (CSW) [Includes 28th International Conference on Indium Phosphide & Related Materials (IPRM) & 43rd International Symposium on Compound Semiconductors (ISCS), MoP-ISCS-101, Jun. 2016, [Corresponding author], [International Magazine]
    English, Introduction international proceedings, 11243091
  • Electrochemical formation and UV photoresponse properties of GaN porous structures
    Hirofumi Kida; Yusuke Kumazaki; Zenji Yatabe; Taketomo Sato, IEICE technical report. Electron devices, 115, 170, 51, 54, Jul. 2015, [Domestic magazines]
    Photoresponse and photoabsorption properties of GaN porous structures were investigated by measuring photocurrent and spectroscopic photoabsorption under monochromatic light with various wavelengths. The measured photocurrents on the porous GaN electrode were larger than those on the planar electrodes due to the unique features of the former electrode, such as large surface area and low photoreflectance properties. Moreover, the photocurrents were observed even under illumination with wavelength of 380 nm, corresponding to photon energy of 3.26 eV, which is 130 meV lower than the bandgap energy of bulk GaN. The observed redshift of the photoabsorption edge can be qualitatively explained by the Franz-Keldysh effect., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese, 10390615
  • Interface states characterization of Al2O3/AlGaN/GaN structures
    Zenji Yatabe; Tamotsu Hashizume, IEICE technical report. Silicon Device and Materials, 115, 108, 1, 4, Jun. 2015, [Invited], [Lead author, Corresponding author], [Domestic magazines]
    To characterize interface properties of Al2O3-insulated gates on AlGaN/GaN structures with and without (w/o) ICP etching of AlGaN surface, in this work, we compared the measured capacitance-voltage (C-V) characteristics with those calculated, considering interface states density at the Al2O3/AlGaN interface. As a complementary method, photo-assisted C-V method utilizing photons with energies less than the bandgap of GaN was also used to probe the interface states density located near the midgap of the AlGaN. It was found that the ICP etching of the AlGaN surface significantly increased the interface state density at the Al2O3/AlGaN interface., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese, 10958502
  • Effects of surface charging and interface states on current stability of GaN HEMTs
    T. Hashizume; Z. Yatabe; K. Nishiguchi, Proceedings of the 39th Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE 2015), 51, 54, Jun. 2015, [International Magazine]
    English, Introduction international proceedings
  • Spectro-electrochemical characterization of GaN/electrolyte interface and its application to the nanostructure formation
    Yusuke Kumazaki; Akio Watanabe; Zenji Yatabe; Taketomo Sato, IEICE technical report. Electron devices, 115, 63, 63, 66, May 2015, [Domestic magazines]
    The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese, 10390615
  • Control of Insulated Gate Interfaces for GaN-based Power Transistors
    Tamotsu Hashizume; Zenji Yatabe; Taketomo Sato, The Papers of Technical Meeting on "Electron Devices", IEE Japan, EDD-14, 39-49, 13, 16, Mar. 2014, [Invited], [Domestic magazines]
    最近は絶縁ゲート構造を持つ電力スイッチング用AlGaN/GaN高電子移動度トランジスタ(HEMT)の報告が急激に増加し、様々な絶縁膜が利用されている。パワートランジスタ応用に重要な、GaN系半導体の絶縁膜界面に関連する問題点を概説し、さらに、AlGaN/GaNヘテロ構造に形成した絶縁ゲート界面の電子準位を評価する手法を紹介し、いくつかの結果を報告する。, The Institute of Electrical Engineers of Japan (IEEJ), Japanese, Introduction scientific journal
  • Photoelectrode properties of GaN porous structures formed by photo-assisted electrochemical process
    Yusuke Kumazaki; Akio Watanabe; Zenji Yatabe; Taketomo Sato, IEICE technical report. Electron devices, 113, 329, 113, 116, Nov. 2013, [Domestic magazines]
    Optical properties of GaN porous structures formed by the electrochemical process were investigated. We conducted the photo-assisted electrochemical etching for the formation of porous structures, and revealed that pore size and morphology were strongly influenced by the electrochemical conditions. According to the optical spectroscopic method, photoreflectance was so sensitive to the surface morphology and pore depth. By optimizing these structural properties, the photoelectric conversion efficiency was drastically improved at electrolyte/GaN interface, which indicates GaN porous structures are promising materials for use in photoelectrode., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese, 10390615
  • Photoabsorption and Photoelectric Conversion Properties of InP Porous Structures Formed by the Electrochemical process
    Yusuke Kumazaki; Ryohei Jinbo; Zenji Yatabe; Taketomo Sato, IEICE technical report. Electron devices, 113, 39, 61, 64, May 2013, [Domestic magazines]
    We investigated the optical absorption properties of InP porous structures formed by the electrochemical process using photoelectric conversion (PC) devices formed on p-n junction substrates. We found from the results of the photocurrent measurements by changing the incident light power that the absorption properties of InP were enhanced after the formation of porous structures showing the low photoreflectance properties. Then, we proposed the photoelectric conversion devices based on the porous structures and investigated their basic operation properties. According to current-voltage measurements under illumination, the porous devices showed larger photocurrents and higher responsivity than those of a reference planar sample., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese, 10390615
  • Effects of process conditions on AlGaN/GaN hetero-MOS structures
    Yujin Hori; Zenji Yatabe; Wan-Cheng Ma; Tamotsu Hashizume, IEICE technical report. Electron devices, 112, 327, 37, 40, Nov. 2012, [Domestic magazines]
    We have characterized effects of process conditions on Al2O3/AlGaN/GaN hetero-MOS structures prepared by atomic layer deposition. A SiN surface protection layer suppressed nitrogen-vacancy-related chemical disorder at the AlGaN surface even during high-temperature annealing, resulting in reduction of the Al2O3/AlGaN interface states. Photo-assisted C-V characteristics of the Al2O3/AlGaN/GaN structures indicated that an N2O-radical treatment was also effective in reducing the Al2O3/AlGaN interface states. The N2O-radical treated MOS-HEMT showed the improvement of transfer characteristics in the positive bias range, probably due to reduction of the Al2O3/AlGaN interface states., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese
  • Effects of ICP etching of AlGaN on interface properties of Al2O3/AlGaN/GaN structures
    Zenji Yatabe; Yujin Hori; Sungsik Kim; Tamotsu Hashizume, Proceedings of the 36th Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE 2012), 24, 25, May 2012, [Lead author, Corresponding author], [International Magazine]
    English, Introduction international proceedings
  • Interface characterization of GaN-based MOS heterostructures employing ICP-etched AlGaN surfaces
    Zenji Yatabe; Yujin Hori; Sungsik Kim; Tamotsu Hashizume, IEICE technical report. Electron devices, 112, 32, 49, 52, May 2012, [Lead author, Corresponding author], [Domestic magazines]
    Our aim is to investigate the effects of dry etching of AlGaN surface on interface properties of GaN-based MOS structure. ICP-assisted plasma with Cl2/BCl3 gas mixture was used for the dry etching. After the dry etching, we fabricated an Al2O3-insulated gate on AlGaN/GaN surface by atomic layer depositon (ALD). To characterize the interface properties of Al2O3/AlGaN, we performed standard capacitance-voltage (C-V) measurements and photo-assisted method. The lager threshold voltage shift due to the photo-assisted electron emission indicated that the ICP etching leads to an increase the Al2O3/AlGaN interface states density. From the X-ray photoelectron spectroscopy, we observed that the ICP process induced the nitrogen vacancy at the AlGaN surface, causing high-density of electron states at Al2O3/AlGaN interface., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese
  • Characterization and Analysis of Low-Frequency Noise in SiN Insulator-Gate GaAs Etched Nanowire FETs
    Toru Muramatsu; Seiya Kasai; Zenji Yatabe, IEICE technical report. Electron devices, 111, 425, 89, 93, Jan. 2012, [Last author], [Domestic magazines]
    Low-frequency noise in SiN-gate GaAs-based nanowire field-effect transistors (FETs) is characterized and analyzed focusing on its device size dependence. Noise in a nanometer-scale semiconductor is an important issue, since it increases as the feature size is decreased. We observe the increased low-frequency noise in the nanowire current, which is caused by charging and discharging electron traps in the SiN gate insulator. As the nanowire width is decreased, the noise intensity increased and the spectral shape changes from 1/f to 1/f^2. Noise spectrum is analyzed by computing the spectrum for specific trap distribution functions in terms of time constant. We find the relationship between the spectral shape and the distribution function. Change of the observed spectral slope is understood in terms of the broadening of the trap distribution., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese
  • Interface characterization of MOS structures fabricated on dry-etched GaN and AlGaN
    Sungsik Kim; Yujin Hori; Zenji Yatabe; Tamotsu Hashizume, IEICE technical report. Electron devices, 111, 290, 25, 28, Nov. 2011, [Domestic magazines]
    We have investigated impacts of dry etching of GaN and AlGaN surfaces on interface properties of GaN-based MOS structures. For the dry etching, we used ECR-assisted plasma with CH4/H2/N2/Ar gas mixture and ICP-assisted plasma with Cl2/BCl3 gas mixture. Both processes induced the disorder of chemical bonds at the GaN surface, causing high-density of electronic states at Al2O3/GaN interfaces. A post-annealing process at 400 ºC is effective in decreasing interface state densities, e.g., 5x10^11 cm^-2eV^-1 for the ICP-processed MOS sample. On the other hand, the interface state densities with 1x10^12cm^-2eV^-1 or higher remained at the ICP-processed Al2O3/AlGaN interface even after the post-annealing process., The Institute of Electronics, Information and Communication Engineers (IEICE), Japanese
  • Onion Formation Process of Oil/Water/Surfactant System under Shear Flow
    Zenji Yatabe; Chihiro Hashimoto; Robert Pansu; Hideharu Ushiki, Proceedings of the 8th Asian Thermophysical Properties Conference (ATPC 2007), Paper No. 081, Aug. 2007, [Lead author, Corresponding author], [Internationally co-authored]
    English, Introduction international proceedings
  • New Approach to Effects of Polymer in Flowing Soap Films - Some Methods of Image Processing -
    Ruri Hidema; Zenji Yatabe; Chihiro Hashimoto; Robert Pansu; Hideharu Ushiki, Proceedings of the 8th Asian Thermophysical Properties Conference (ATPC 2007), Paper No. 079, Aug. 2007, [Internationally co-authored]
    English, Introduction international proceedings
■ Books and other publications
  • 半導体・磁性体・電池の固/固界面制御と接合・積層技術
    喜多 浩之; 谷田部 然治; 佐藤 威友; 藤井 茉美; 水野 潤; 松下 智裕; 中塚 理; 大澤 健男; 田辺 克明; 後藤 和泰; 伊澤 誠一郎; 冨岡 克広; 脇坂 聖憲; 高石 慎也; 山下 正廣; 垣尾 省司; 谷川 兼一; 三谷 誠司; レ デゥックアイン; 浜屋 宏平; 谷山 智康; 村上 修一; 日暮 栄治; 重川 直輝; 梁 剣波; 松前 貴司; 梅沢 仁; 倉島 優一; 高木 秀樹; 庄司 一郎; 高 燕林; 丸山 実那; 岡田 晋; 岩﨑 拓哉; 山本 真人; 坂井 伸行; 佐々木 高義; 西尾 和記; 一杉 太郎; 土屋 敬志; 高柳 真; 樋口 透; 寺部 一弥, 第1章パワー半導体の界面現象と制御技術, 第2節GaN半導体デバイスのMIS界面評価と制御
    S&T出版, 2024, 9784911146040, 241, 11-19, Japanese, Scholarly book, 42033928;42033915, [Contributor]
■ Lectures, oral presentations, etc.
■ Affiliated academic society
  • The Japan Society of Applied Physics
■ Research Themes
  • Gate insulator deposition process for GaN-based MOS devices using mist-CVD technique
    Grants-in-Aid for Scientific Research
    Apr. 2023 - Mar. 2027
    Zenji Yatabe; Joel Asubar; Yusui Nakamura
    ゲート絶縁膜/半導体界面特性は金属-酸化物-半導体(MOS)トランジスタ特性に大きな影響を与える。
    本研究では次世代高周波・高出力半導体デバイス材料である窒化物半導体MOSデバイス用のゲート絶縁膜堆積プロセスを低コストで酸化物薄膜が堆積可能なミスト化学気相成長(ミストCVD)法を用いて、開発・発展させる。さらにMOS界面特性を独自の詳細な解析手法により明らかにし、ゲート絶縁膜堆積プロセスにフィードバックをし、界面準位密度を極限まで低減した、低コストかつ良質な窒化物半導体MOSデバイス向けゲート絶縁膜堆積プロセス技術の確立を目的とする。
    Japan Society for the Promotion of Science, Grant-in-Aid for Scientific Research (C), Kumamoto University, Principal investigator, Competitive research funding, 23K03973
  • Study on high-κ dielectric/regrown nitride semiconductor interfaces for high efficiency and highly-safe transistors
    Grants-in-Aid for Scientific Research
    Apr. 2023 - Mar. 2026
    Joel Asubar; Zenji Yatabe; Masaaki Kuzuhara
    GaNの広いバンドギャップに起因する望ましい物性値により、GaN 系デバイスは、これまでにないパワー、効率、周波数レベルを実現することが可能であり、現代社会で重要な役割を担う。ただし、この優れた2DEGにより、AlGaN/GaN HEMTは、負のしきい値電圧VTHを持つノーマリーオンとなってしまう。つまりゲートに電圧が印加されていない場合でも、電流が端子(ソース-ドレイン)間に流れてしまう。このため、フェイルセーフを確保し、複雑なゲート駆動回路を組み込む必要のない、正のしきい値電圧VTHを備えた「ノーマリーオフ」デバイスの実現が必須である。
    Japan Society for the Promotion of Science, Grant-in-Aid for Scientific Research (C), University of Fukui, Coinvestigator, Competitive research funding, 23K03971
  • 研究機器・設備整備
    令和6年度 研究機能強化促進費
    Sep. 2024 - Mar. 2025
    谷田部 然治
    熊本大学 半導体・デジタル研究教育機構, 熊本大学, Principal investigator
  • Integral transformation method to investigate flow characteristics of polymer solution from the phase transition perspective
    Grants-in-Aid for Scientific Research
    Jun. 2019 - Mar. 2022
    Ruri Hidema; Zenji Yatabe; Hiroshi Suzuki
    To clarify characteristic flow regimes of complex fluids such as polymer solutions and surfactant solutions, interactions of inner structure in the fluids were quantified by using a method of micro-rheology. Optical tweezers were used as a tool of micro-rheology; the motion of a trapped particle was analyzed to obtain distribution of local fluids properties around the bead that reflects the complexity of the fluids. Relaxation time of the fluids measured under the extensional stresses was also used to characterize inner structures. Then, flow regimes of these solutions in flow channels in micro and macro length scales were observed, which was affected by enhancement of inner structure of the fluids.
    Japan Society for the Promotion of Science, Grant-in-Aid for Challenging Research (Exploratory), Kobe University, Coinvestigator, Competitive research funding, 19K22083
  • Surface passivation and insulated gate structures for nitride-based semiconductor devices using mist-CVD method
    Grants-in-Aid for Scientific Research
    Apr. 2019 - Mar. 2022
    Zenji Yatabe; Joel Asubar; Tetsuro Sueyoshi; Yusui Nakamura
    We have developed a gate insulator deposition process for AlGaN/GaN metal-insulator-semiconductor (MIS-HEMTs) using cost-effective and environmental-friendly mist chemical vapor deposition (mist-CVD) method. Mist-deposited gate insulators deposited using optimum condition exhibited characteristics that are comparable to those reported from high-quality amorphous films prepared by the more conventional method of atomic layer deposition (ALD). In addition, we obtained good transistor characteristics from the fabricated devices suggesting high interfacial quality of the resulting insulator/AlGaN interface. These results demonstrate the potential and viability of non-vacuum mist-CVD technique in the development of high-performance AlGaN/GaN-based MIS-HEMTs.
    Japan Society for the Promotion of Science, Grant-in-Aid for Scientific Research (C), Kumamoto University, Principal investigator, Competitive research funding, 19K04473
  • Characterization and control of insulator/AlGaN interface for power device application
    Grants-in-Aid for Scientific Research
    Apr. 2015 - Mar. 2018
    Zenji Yatabe
    To control reliability and degradation issue such as threshold voltage (VTH) instability in AlGaN/GaN high-electron-mobility transistors (AlGaN/GaN HEMTs) with metal-insulator-semiconductor (MIS) structures, we have investigated insulator/AlGaN interface properties. The correlation between the interface properties and VTH instability in AlGaN/GaN MIS HEMTs were discussed on the basis of both experimental and theoretical results. From the analysis of the results, we have come to the conclusion that that the interface states at insulator/AlGaN caused VTH instability in AlGaN/GaN MIS HEMTs. In addition, aluminum titanate, a novel and promising gate dielectric was successfully fabricated by ultrasonic spray-assisted mist chemical vapor deposition (mist CVD), which is a low-cost and low-damage alternative for dielectric deposition.
    Japan Society for the Promotion of Science, Grant-in-Aid for Young Scientists (B), Hokkaido University and Kumamoto University, Principal investigator, Competitive research funding, 15K18034
  • 低温・大気圧におけるプラスチック基板上透明導電膜の作製
    マッチングプランナープログラム「企業ニーズ解決試験」
    Jun. 2016 - Mar. 2017
    谷田部 然治
    科学技術振興機構 (JST), Principal investigator, Competitive research funding
  • パワーデバイス応用に向けた絶縁膜/酸化物半導体界面の評価と制御
    平成28年度研究助成
    Apr. 2016 - Mar. 2017
    谷田部 然治
    材料科学技術振興財団 (MST), Principal investigator, Competitive research funding
  • 酸化物を用いた新型パワートランジスタの開発
    研究資金
    Dec. 2015 - Mar. 2016
    谷田部 然治
    熊本大学 エコ・エネ研究会, 熊本大学, Principal investigator
  • Nanoscale control of nitride semiconductor surface using low-damaged process for high-sensitive chemical sensors
    Grants-in-Aid for Scientific Research
    Apr. 2013 - Mar. 2016
    Taketomo Sato; Tamotsu Hashizume; Junichi Motohisa; Zenji Yatabe
    Towards the higher sensitivity of ion-sensitive field-effect transistors (ISFETs) on nitride semiconductors, the porous-gate ISFETs has been proposed and its basic technology was established. The porous structures with a high-aspect ratio having a several 10 nm-diameter were successfully formed in a controlled fashion utilizing the electrochemical oxidation and etching process. It was found that the unique features of porous structures such as a large surface area and a modified potential involved with a high-electric field are very effective to detect the photo-electrochemical reactions with high-sensitivity. The correlation between the ion-diffusion in the pores and charging and discharging to the double layer were discussed on the basis of the experimental and theoretical results, leading to the new finding for the high-speed and high-sensitive chemical sensors.
    Japan Society for the Promotion of Science, Grant-in-Aid for Scientific Research (B), Hokkaido University, Coinvestigator, Competitive research funding, 25289079
  • Onion Formation Process of Oil/Water/Surfactant System Under Shear Flow
    同窓会学生援助事業
    Aug. 2007 - Aug. 2007
    谷田部 然治
    東京農工大学同窓会, 東京農工大学, Principal investigator, Others
  • Morphological Formation Process of Onion Structure of Water/Oil/Surfactant System under Programmable Shear Flow
    Collège doctoral franco-japonais (CDFJ)
    Sep. 2005 - Aug. 2006
    Zenji Yatabe
    Consortium japonais du Collège doctoral franco-japonais, Principal investigator, Competitive research funding
■ Industrial Property Rights
■ Academic and Social Contribution Activities/Other
Industrial Property RightsSocial Contribution ActivitiesMedia Coverage
  • 北海道大学、半導体研究者60人が結集 九州からも人材獲得
    Oct. 2025
    Other than myself
    日本経済新聞
    ラピダスと北の変革 ミライの半導体人材㊦
    [Paper]
  • 次世代半導体で「熱くならない(高効率な)パワーデバイス」を
    Apr. 2025
    フロムページ 夢ナビ編集部
    夢ナビ
    [Internet]
  • 2024 TSMC Semiconductor Day in Japan
    Feb. 2025
    Other than myself
    YouTube
    TSMC
    Join us for TSMC Semiconductor Day in Japan, a dynamic event hosted by TSMC that brings together top experts from TSMC, TSMC Japan Design Technology, TSMC Japan 3DIC R&D Center, and JASM. Discover cutting-edge advancements in the semiconductor industry, learn about TSMC's groundbreaking work in Japan, and explore diverse career opportunities in this field.

    Don't miss the chance to connect with industry leaders and ignite your passion for semiconductors!, [Internet]
  • 【キャリア支援室】令和6年度熊本大学工学部編入学説明会を実施しました
    Dec. 2024
    Other than myself
    阿南工業高等専門学校 キャリア支援室
    お知らせ, 2024年12月18日(水)に熊本大学工学部情報電気工学科准教授の谷田部然治先生をお招きしてオンラインで編入学説明会を開催しました。谷田部先生からは、熊本大学工学部に関する全体説明や大学編入学試験の説明などをしていただきました。大学編入学に興味のある本科4年生9名が参加しました。
    参加者は谷田部先生からの説明を熱心に聞き、自分の進路について真剣に考える良い機会となりました。谷田部先生からは、各学科、土木建築学科、機械数理工学科、情報電気工学科、材料・応用化学科について詳細に説明していただき、また、半導体デバイス工学課程についても説明していただきました。谷田部先生には、説明会後にも学生の質問を気さくに応えていただきました。誠にありがとうございました。
  • 「世界を変える」次世代半導体デバイスの研究
    Jun. 2024
    Other than myself
    熊本大学 工学部
    熊本大学 工学部案内
    教員特集, [Pr]
  • エネルギー効率の未来 次世代半導体デバイスの探求
    Jan. 2024
    Myself
    熊本大学
    熊大通信 Vol. 91
    半導体の可能性を探求する研究者たち—DX時代におけるイノベーションをおこす—, 身の回りの電子機器や電気自動車には「パワーデバイス」と呼ばれる重要な部品が使われており、これらは主にシリコンという半導体材料で作られています。シリコンパワーデバイスは既に高度に進化しており、その性能をこれ以上大幅に向上させるのは難しくなっています。私たちの研究グループは、新しい半導体材料を使用した次世代のデバイス開発のほか、デバイスの表面や界面の制御技術、新しい評価方法の開発などにも取り組んでいます。これらの新しいデバイスは、省エネルギーにも大きく貢献する可能性があり、新たな半導体の研究には、世界初の成果を目指す大きなやりがいがあります。私たちの研究が、広く社会で活用されることを目指しています。, [Pr]
  • Mist-CVD enhances MIS-HEMTs
    May 2021
    Other than myself
    Compound Semiconductor
    27(3) 53, Thanks to mist CVD, pyrophoric materials and vacuum pumps are no longer needed to deposit insulators on GaN HEMTs., 13160044, [Paper]
  • 薄膜・表面界面物性
    Feb. 2018
    Myself
    熊本大学 大学院先導機構 URA推進室
    Tenure Track
    テニュア教員・テニュアトラック教員, [Pr]
  • 情報電気電子工学科
    Aug. 2017
    Myself
    熊本大学工業会会報
    教室だより, [Pr]
  • 大学院先導機構/情報電気工学科 助教 谷田部 然治
    Aug. 2016
    Myself
    熊本大学工業会会報
    新任の挨拶, [Pr]
  • 第38回(2016年度)応用物理学会論文賞受賞者紹介
    Aug. 2016
    応用物理学会
    応用物理
    受賞者紹介, 高性能パワーデバイス実現への要請が急速に高まる中で,AlGaN/GaN ヘテロ構造を利用する電力スイッチング用トランジスタの開発が急速に進展しているが,インバータ応用に必須となる絶縁ゲート構造を用いたデバイスは,しきい値電圧変動や電流変動の抑制が実現できていないため,いまだに実用化には至っていない.その根本原因は,絶縁膜/AlGaN/GaN 構造におけるヘテロ界面構造制御の基盤である電子準位の評価法が確立されていないことに由来する.本論文は,1)任意の準位密度分布と電子放出時定数を考慮した数値計算を行い,絶縁膜/AlGaN/GaN 構造の容量 − 電圧(C-V)特性に与える界面準位の影響と室温評価の限界について初めて統一的な見解を示したこと,2)独自に開発した光支援 C-V 法を併用して,AlGaN の禁制帯内の広いエネルギー範囲で絶縁膜/AlGaN 界面の電子準位密度分布を決定することに初めて成功したことが大きなポイントである.このように,電子物性的側面が必ずしも十分に解明されていなかった絶縁膜/AlGaN/GaN ヘテロ構造に対して界面電子密度分布を求めることができた点は,同構造の実用化に大きく貢献する.GaN MOS-HEMT のインバータ応用に必須であるゲート絶縁膜の不明な領域に新たな重要知見を見いだした功績は大きく,本手法を駆使することにより,高性能 AlGaN/GaN ヘテロ構造の実現が加速されると期待される.以上より,本論文を応用物理学会優秀論文賞にふさわしい論文として推薦する., [Pr]
  • 化合物及び酸化物半導体の表面・界面の評価と制御
    2016
    Myself
    熊本大学 大学院先導機構 マーケティング推進部 研究推進課
    平成28年度版 熊本大学 テニュアトラック事業
    テニュアトラック教員紹介, [Pr]
  • ムズターグ・アタ遠征記
    May 2003
    東京農工大学山岳会 ムスターグアタ登山隊
    MUZTAG-ATA 2001 慕士塔格山
    [Pr]
Others
  • Aug. 2001 - Aug. 2001
    summited Muztagh Ata (7,509 m)
    Ryoichi Okabayashi, Mikio Miyamoto, Yukuto Katsuragi, Nobuo Mizuno, Junji Oguchi, Zenji Yatabe
    Tokyo University of Agriculture and Technology Alpine Club (TUATAC)